P-260-004e.pdf - 第16页
MODEL EG-100 0609-001 14 135 135 136 141 . 142 . 143 132 130 131 154 133 152 151 テーブル部 T ABLE SECTION Fig. C-2 真空ポンプ V acuum Pump
MODEL EG-100
1004-003
13
Key No. PART No. PART NAME Q’ty REMARKS New Code
NOTE
1 6301471891 PLATE,LOCATE 3 846C--010-001 216H0458
2 6301482620 BLOCK 1 846C--010-002 211G4711
3 6301482538 BLOCK 1 846C--010-003 211G4706
4 6301433660 PLUNGER 4 846C--010-004 226G0057
5 6301482552 BLOCK 1 846C--010-005 211G4707
6 6301488967 BLOCK 1 846C--010-006 211G4756
7 6301482613 BLOCK 1 846C--010-007 211G4710
8 6301472263 NOZZLE 1 846C--010-008 216M2532
9 6301482606 BLOCK 1 846C--010-009 211G4709
10 6301491790 ASSY,HOLDER 1 846C--010-010 016B0092
34 6300007664 BOLT,HEX-SCT 3 846C--010-034 221A0021
37 6300008913 SET SCREW 4 846C--010-037 221C0004
38 4111410505 NUT HEX 5 4 846C--010-038 221F0085
39 4111412905 WASHER SPR 4 3 846C--010-039 221H0284
40 4111414008 WASHER V 4X9X0.8 3 846C--010-040 221H0315
C-1
MODEL EG-100
0609-001
14
135
135
136
141
.
142
.
143
132
130
131
154
133
152
151
テーブル部
TABLE SECTION
Fig. C-2
真空ポンプ
Vacuum Pump
MODEL EG-100
1004-003
15
Key No. PART No. PART NAME Q’ty REMARKS New Code
NOTE
130 6301494630 COVER 1 846C--010-030 211AB129
131 6301494647 BRACKET 1 846C--010-031 211FB268
132 6301494654 BRACKET 1 846C--010-032 211FB269
133 6301486123 MECH PARTS(RUBBER LEG) 4 846C--010-033 226J2288
135 4111407901 SCR TRS 3X4 6 846C--010-035 221E0528
136 4110418908 SCR PAN 3X6 4 846C--010-036 221E0497
141 6300007954 BOLT,HEX-SCT 2 846C--010-041 221A0050
142 4111412806 WASHER SPR 3 2 846C--010-042 221H0281
143 4111191909 WASHER V 3X7X0.5 2 846C--010-043 221H0311
151 6301486109 VACUUM PUMP 1 E03 846C--010-051 224A0035
152 6301491356 UNIT,POWER 1 G02 846C--010-052 4U200302
154 6301486215 SWITCH,SEESAW 1 S02 846C--010-054 4S1L0012
C-2