IP-IIIE-11.pdf - 第42页
10.1.Y 軸ﾃｰﾌﾞﾙ 2(QPT) 10.1.Y axis 番号 図番 & ｺｰﾄﾞ番号 個数 品名 規格 備考 No. Drg.No. & Code No. QTY Description Rating Remarks 1 APPT8010 4 PIN, BACKUP(φ15Vacuum Pin) ﾋﾟﾝ ﾊﾞｯｸｱｯﾌﾟ 2 APPT8020 3 PIN, BACKUP(Regular Pin) ﾋﾟﾝ ﾊﾞｯ…
IP-
III
E PARTS LIST ver11
10.1.Y軸テーブル 2(QPT)
10.1.Y axis table 2(QPT)
10 - 1
10.1.Y軸テーブル 2(QPT)
10.1.Y axis table 2(QPT)
Ref.31-1
Ref.31-1
Ref.31-1
Ref.33-7
x6
A
B
25
36
60
24
25
23
60
24
25
27
48
55
26
49
31 2
53
47
74
28
58
29
77
70
32
66
80
78
70
77
70
73
69
30
31
77
70
78
70
77
70
73
69
29
58
33
7
65
78
21
21
34
62
12
14
22
38
67
65
75
75
65
67
22
38
14
62
12
13
62
12
38
22
67
65
75
13
62
12
38
22
67
65
75
208
176
165
175
161
175
161
175
161
183
162
176
167
175
161
13
13
B
A
139
26
10.1.Y 軸ﾃｰﾌﾞﾙ 2(QPT)
10.1.Y axis
番号 図番 & ｺｰﾄﾞ番号 個数 品名 規格 備考
No. Drg.No. & Code No. QTY Description Rating Remarks
1 APPT8010 4
PIN, BACKUP(φ15Vacuum Pin)
ﾋﾟﾝ ﾊﾞｯｸｱｯﾌﾟ
2 APPT8020 3 PIN, BACKUP(Regular Pin) ﾋﾟﾝ ﾊﾞｯｸｱｯﾌﾟ
3 APPT8030 3 PIN, BACKUP(Regular Pin) ﾋﾟﾝ ﾊﾞｯｸｱｯﾌﾟ
7 PPT0310 1 DOG ﾄﾞｯｸﾞ
12 PPT0482 4 BOLT, STOPPER ﾎﾞﾙﾄ ｽﾄｯﾊﾟ
13 PPT0490 2 BLOCK ﾌﾞﾛｯｸ
14 PPT0500 2 BLOCK ﾌﾞﾛｯｸ
21 PPT0640 2 GUIDE ｶﾞｲﾄﾞ
22 PPT0700 4 BKT BKT
23 PPT0900 3 PLATE ﾌﾟﾚｰﾄ
24 PPT0910 3 PIN ﾋﾟﾝ
25 PPT0980 12 BOLT ﾎﾞﾙﾄ
26 PPT1170 3 PIN, BACKUP ﾋﾟﾝ ﾊﾟｯｸｱｯﾌﾟ
27 PPT1180 6 HOLDER ﾎﾙﾀﾞ
28 PPT1470 1 TERMINAL ﾀｰﾐﾅﾙ
29 PPT1481 2 PLATE ﾌﾟﾚｰﾄ
30 PPT1490 208 PLUG ﾌﾟﾗｸﾞ
31 PPT1562 1 PLATE, VACUUM ﾌﾟﾚｰﾄ ﾊﾞｷｭｰﾑ
32 PPT1571 1 PLATE ﾌﾟﾚｰﾄ
33 PPT1581 1 BKT, STOPPER BKT ｽﾄｯﾊﾟ
34 PPT1591 1 BKT, STOPPER BKT ｽﾄｯﾊﾟ
36 PPT1630 3 PLATE ﾌﾟﾚｰﾄ
38 IPB5391 4 KEY ｷｰ
47 Y3084T 1 UNION, HALF ﾕﾆｵﾝ ﾊｰﾌ KQ2H08-01S
48 A5132A 6 O RING O ﾘﾝｸﾞ S10
49 A5161T 6 O RING O ﾘﾝｸﾞ S15
53 T2064A 320 TUBE ﾁｭｰﾌﾞ TU0805B
55 H1189A 3 PAD ﾊﾟｯﾄ VP-15RS
58 K5357M 14
SCREW,HEX SOCKET COUNTERSUNK
小ﾈｼﾞ 六角穴皿 M3X6L
60 N1085A 4 NUT, HEX ﾅｯﾄ 六角 M6 P=1.0
62 N1082A 4 NUT, HEX ﾅｯﾄ 六角 M5 P=0.8
65 W1022A 16 WASHER, LOCK ﾜｯｼｬ ｽﾌﾟﾘﾝｸﾞ 4M/M
66 W1021A 46 WASHER, LOCK ﾜｯｼｬ ｽﾌﾟﾘﾝｸﾞ 3M/M
67 W1043A 8 WASHER, FLAT ﾜｯｼｬ 平 4W-4
69 W1012A 8 WASHER, CONICAL ﾜｯｼｬ 皿 M-5-L
70 W1011A WASHER, CONICAL ﾜｯｼｬ 皿 M-4-L
73 H5299A BOLT, HEX SOCKET ﾎﾞﾙﾄ 六角穴 M5X12L
74 H5292A 5 BOLT, HEX SOCKET ﾎﾞﾙﾄ 六角穴 M4X20L
75 H5290A 8 BOLT, HEX SOCKET ﾎﾞﾙﾄ 六角穴 M4X15L
IP-ⅢE PARTS LIST ver11 10 - 2
10.1.Y 軸ﾃｰﾌﾞﾙ 2(QPT)
10.1.Y axis table 2(QPT)
10.1.Y 軸ﾃｰﾌﾞﾙ 2(QPT)
10.1.Y axis
番号 図番 & ｺｰﾄﾞ番号 個数 品名 規格 備考
No. Drg.No. & Code No. QTY Description Rating Remarks
77 H5288A 8 BOLT, HEX SOCKET ﾎﾞﾙﾄ 六角穴 M4X10L
78 H5287A 18 BOLT, HEX SOCKET ﾎﾞﾙﾄ 六角穴 M4X8L
80 H5275A 46 BOLT, HEX SOCKET ﾎﾞﾙﾄ 六角穴 M3X8L ･
IP-ⅢE PARTS LIST ver11 10 - 3
10.1.Y 軸ﾃｰﾌﾞﾙ 2(QPT)
10.1.Y axis table 2(QPT)