5OM-1841-001w_F8S.pdf - 第76页
2-1-2 5OM-1841 POWER ON ST AR T STOP PNL CHANGE B D A S101 H101 S102 H102 S103 S104 H104A H104B S105 C Opration Panel Emergency Stop Operation Switch 1605-001 Symbol Name Symbol Name S101 POWER ON PB H101 P…
2-1-1
5OM-1841
Vacuum Pump
Front View
Manifold 1
Manifold 2
Vacuum/collective
disposal valve
Air Supply 2
Air Supply 1
Ｓ144
Ｍ66
Ｙ0938
Ｙ0939
Vacuum/collective
disposal valve
Ｙ0638
Ｙ0639
1605-001
Symbol Name Symbol Name
M66 Vacuum Pump
Y0638 Vacuum/Collective Disposal Change-Over Y0938 Vacuum/Collective Disposal Change-Over
Y0639
High-Speed/Multi-Functional Head Change-Over
Y0939
High-Speed/Multi-Functional Head Change-Over
S141 Air Pressure Drop Detection
2-1-2
5OM-1841
POWER ON
START
STOP
PNL CHANGE
B
D A
S101
H101
S102
H102
S103
S104
H104A
H104B
S105
C
Opration Panel
Emergency Stop
Operation Switch
1605-001
Symbol Name Symbol Name
S101 POWER ON PB
H101 POWER ON LED
S102 START
H102 START LED
S103 STOP
H104B LOCK LED
S104 PNL CHANGE
H104A PNL CHANGE LED
S105 Emergency Stop Operation Switch
2-1-3
5OM-1841
1605-001
H1
S132F
M102
S131B
M101
Symbol Name Symbol Name
H1 Light Tower
S132 COVER LOCK (Front Side) S132B COVER LOCK (Rear Side)
M101 Ceiling (Left) Cooling Fan M102 Ceiling (Right) Cooling Fan