YSM10_KMG_000_2009(CWD).pdf - 第19页
P AGE 16 Condential & Proprietary H024179 YSM10 YSM10 Air circuit SC4-M3MA SGDAQ8x15-ZE135A2 S0715-5M SC4-M3MA S0715-5M SC4-M3MA プラグ 1/8 M M U U L L T T I I C C A A M M E E R R A A （ （ O O P P T T I I O O N N ) ) SC…
Confidential & Proprietary
PAGE
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416V400V380V240V220V208V200V
NN
416V400V380V240V220V208V200V
S2
R2
S2
R2
S2
R2
U50
V50
W50
T2
U50
V50
W50
U50
V50
W50
U50
V50
W50
U50
V50
W50
U50
V50
W50
U50
V50
W50
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R2
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S2
R2
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R2
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S2
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S2
R2
TM11:The selection of POWER SOURCE 2.79KVA
TC11:The selection of POWER SOURCE 1.00KVA
U10U10U10U10U10U10U10
V10V10V10V10V10V10V10
V3
15
POWER TRANSFORMER TERMINAL
YSM10
PAGE
16
Condential & Proprietary
H024179
YSM10YSM10
Air circuit
SC4-M3MA
SGDAQ8x15-ZE135A2
S0715-5M
SC4-M3MA
S0715-5M
SC4-M3MA
プラグ1/8
M
M
U
U
L
L
T
T
I
I
C
C
A
A
M
M
E
E
R
R
A
A
（
（
O
O
P
P
T
T
I
I
O
O
N
N
)
)
SC4-M3MA
KM-11
AN10-01
AN10-01
SLH6-02
RDQB63-45-M9BM
SLH6-02
SLH6-02 SLH6-02
TL8-02
UYD10-8
C
C
U
U
T
T
T
T
E
E
R
R
R
R
2
2
O
O
P
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T
I
I
O
O
N
N
C
C
U
U
T
T
T
T
E
E
R
R
R
R
1
1
O
O
P
P
T
T
I
I
O
O
N
N
C
C
U
U
T
T
T
T
E
E
R
R
F
F
2
2
C
C
U
U
T
T
T
T
E
E
R
R
F
F
1
1
AUK8
P
ISE30A-C4L-B-MD
PPP
VHS30-03B-X2119A
IR2220-02H-R-A-X1001
AUY12
UY4
AC30X-03D-A-X2649A
φ12 ORANGE
FUV10-10
UY10
UEDW8-6
φ12 ORANGE
φ10 ORANGE
φ8 ORANGE
φ4 ORANGE
φ6 ORANGE
φ6 BLACK
φ8 BLACK
φ8 ORANGE
Φ8 ORANGE
Φ6 ORANGE
Φ8 ORANGE
Φ10 ORANGE
Φ8 ORANGE
UY6
φ12 ORANGE
US10
UY10
US10
φ10 ORANGE
φ10 ORANGE
T
T
O
O
H
H
E
E
A
A
D
D
A
A
US10
US10
φ10 ORANGE
φ10 ORANGE
UP8
ATSH6-01
プラグ1/8
UP6
VQZ332B-5G1-C6
VFU2-66P-NH
TL6-01M
TL6-02
UTD6-4
UYD6-4
Φ6BLACK Φ6BLACK
φ6 ORANGE
φ6 ORANGE
Φ4 ORANGE
Φ4 ORANGE
Φ6 ORANGE
φ4 BLACK
φ4 ORANGE
φ4 ORANGE
φ4 BLACK
T
T
A
A
P
P
E
E
C
C
U
U
T
T
T
T
E
E
R
R
UC4
B
B
L
L
O
O
W
W
S
S
T
T
.
.
C
C
O
O
V
V
E
E
R
R
3
3
C
C
O
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V
E
E
R
R
1
1
⑥
⑥
⑬
⑮
⑲
⑲
⑲
④
③
②
①
⑫
⑤
⑯
Φ10 ORANGE
SGDAQ8x15-ZE135A2
USD10-8
UP6
USD6-4
PSM4M-4
PSM4M-4
PSM4M-4
PSM4M-4
Φ6 ORANGE
Φ4 ORANGE
C
C
O
O
V
V
E
E
R
R
2
2
C
C
O
O
V
V
E
E
R
R
4
4
⑲
CJ2YE16-10Z
SL4-M5
SC3W-M5-4-0
SC4-M5A
PBDAS10x10-A-ZC230A2
A
A
N
N
C
C
（
（
O
O
P
P
T
T
I
I
O
O
N
N
)
)
φ4 ORANGE
SL4-M5
SC4-M5A
φ4 BLACK
S0715-5M
UY4
SL4-M5
UY4
φ4 ORANGE
SL4-M5
φ4 ORANGE
SC3W-M5-4-0
φ4 BLACK
SC3W-M5-4-0
φ4 ORANGE
SC3W-M5-4-0
φ4 BLACK
φ4 ORANGE
C
C
L
L
A
A
M
M
P
P
B
B
O
O
A
A
R
R
D
D
CJ2YE16-10Z
φ4 BLACK
φ4 BLACK
C
C
V
V
S
S
T
T
3
3
SS0755-AWR12
C
C
V
V
S
S
T
T
2
2
C
C
V
V
S
S
T
T
1
1
KQ2T06-08A
SC3W-M5-4
RDQB63-45-M9BM
KQ2T06-08A
SC3W-M5-4
SLH6-02
AN10-01
SSD-KL-16-40-T2H3-R
SLH6-02
SLH6-02
RDQB63-45-M9BM
AN10-01
⑫
KQ2T06-08A
RDQB63-45-M9BM
φ4 BLACK
KQ2T06-08A
φ4 ORANGE
AUK8
TL8-02
SLH6-02
φ8 ORANGE
Φ8 ORANGE
φ8 BLACK
φ6 ORANGE
φ6 BLACK
FFF
PFM711S-C6L-H-M-V
R151-01
F
PFM711S-C6L-H-M-V
FF
⑦
⑨
⑨
⑧
⑧
⑧
⑧
φ6 BLACK
φ6 BLACK
φ6 ORANGE
φ6 ORANGE
⑱
⑱
⑰
USD12-10
TL10-01TL6-01
US6
US6
I
I
O
O
N
N
I
I
Z
Z
E
E
R
R
I
I
O
O
N
N
I
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⑪
⑪
⑩
VQZ3221-5M1-C8
VQZ3221-5M1-C8
AUK8
AUK8
Φ8 ORANGE
Φ8 ORANGE
⑭
⑭
⑭
⑭
M
M
U
U
L
L
T
T
I
I
C
C
A
A
M
M
E
E
R
R
A
A
（
（
O
O
P
P
T
T
I
I
O
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N
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)
オプション時追加
オプション時追加
オプション時追加
⑳
⑳
⑳
SSD-KL-16-40-T2H3-R
SC3W-M5-4
SC3W-M5-4
⑪
⑩
⑪
φ4 BLACK
φ4 ORANGE
SSD-KL-16-40-T2H3-R
SC3W-M5-4
SC3W-M5-4
⑪
⑩
⑪
φ4 BLACK
φ4 ORANGE
⑬
⑬
⑬
UC8
標準はUC8
後ｶｯﾀｰ付はUC8を外し接続する
UC4
UC4
ATS
A
A
T
T
S
S
O
O
P
P
T
T
I
I
O
O
N
N
⑲はカバー仕様で取付
⑲はカバー仕様で取付
UP6
UP6
ATS有は USD6-4を外し
ATS側の継手を接続する
ATS側配管Φ6 ORANGE
SC4-M3MA
SGDAQ8x15-ZE135A2
S0715-5M
SC4-M3MA
S0715-5M
SC4-M3MA
プラグ1/8
M
M
U
U
L
L
T
T
I
I
C
C
A
A
M
M
E
E
R
R
A
A
（
（
O
O
P
P
T
T
I
I
O
O
N
N
)
)
SC4-M3MA
KM-11
AN10-01
AN10-01
SLH6-02
RDQB63-45-M9BM
SLH6-02
SLH6-02 SLH6-02
TL8-02
UYD10-8
C
C
U
U
T
T
T
T
E
E
R
R
R
R
2
2
O
O
P
P
T
T
I
I
O
O
N
N
C
C
U
U
T
T
T
T
E
E
R
R
R
R
1
1
O
O
P
P
T
T
I
I
O
O
N
N
C
C
U
U
T
T
T
T
E
E
R
R
F
F
2
2
C
C
U
U
T
T
T
T
E
E
R
R
F
F
1
1
AUK8
P
ISE30A-C4L-B-MD
PPP
VHS30-03B-X2119A
IR2220-02H-R-A-X1001
AUY12
UY4
AC30X-03D-A-X2649A
φ12 ORANGE
FUV10-10
UY10
UEDW8-6
φ12 ORANGE
φ10 ORANGE
φ8 ORANGE
φ4 ORANGE
φ6 ORANGE
φ6 BLACK
φ8 BLACK
φ8 ORANGE
Φ8 ORANGE
Φ6 ORANGE
Φ8 ORANGE
Φ10 ORANGE
Φ8 ORANGE
UY6
φ12 ORANGE
US10
UY10
US10
φ10 ORANGE
φ10 ORANGE
T
T
O
O
H
H
E
E
A
A
D
D
A
A
US10
US10
φ10 ORANGE
φ10 ORANGE
UP8
ATSH6-01
プラグ1/8
UP6
VQZ332B-5G1-C6
VFU2-66P-NH
TL6-01M
TL6-02
UTD6-4
UYD6-4
Φ6BLACK Φ6BLACK
φ6 ORANGE
φ6 ORANGE
Φ4 ORANGE
Φ4 ORANGE
Φ6 ORANGE
φ4 BLACK
φ4 ORANGE
φ4 ORANGE
φ4 BLACK
T
T
A
A
P
P
E
E
C
C
U
U
T
T
T
T
E
E
R
R
UC4
B
B
L
L
O
O
W
W
S
S
T
T
.
.
C
C
O
O
V
V
E
E
R
R
3
3
C
C
O
O
V
V
E
E
R
R
1
1
⑥
⑥
⑬
⑮
⑲
⑲
⑲
④
③
②
①
⑫
⑤
⑯
Φ10 ORANGE
SGDAQ8x15-ZE135A2
USD10-8
UP6
USD6-4
PSM4M-4
PSM4M-4
PSM4M-4
PSM4M-4
Φ6 ORANGE
Φ4 ORANGE
C
C
O
O
V
V
E
E
R
R
2
2
C
C
O
O
V
V
E
E
R
R
4
4
⑲
CJ2YE16-10Z
SL4-M5
SC3W-M5-4-0
SC4-M5A
PBDAS10x10-A-ZC230A2
A
A
N
N
C
C
（
（
O
O
P
P
T
T
I
I
O
O
N
N
)
)
φ4 ORANGE
SL4-M5
SC4-M5A
φ4 BLACK
S0715-5M
UY4
SL4-M5
UY4
φ4 ORANGE
SL4-M5
φ4 ORANGE
SC3W-M5-4-0
φ4 BLACK
SC3W-M5-4-0
φ4 ORANGE
SC3W-M5-4-0
φ4 BLACK
φ4 ORANGE
C
C
L
L
A
A
M
M
P
P
B
B
O
O
A
A
R
R
D
D
CJ2YE16-10Z
φ4 BLACK
φ4 BLACK
C
C
V
V
S
S
T
T
3
3
SS0755-AWR12
C
C
V
V
S
S
T
T
2
2
C
C
V
V
S
S
T
T
1
1
KQ2T06-08A
SC3W-M5-4
RDQB63-45-M9BM
KQ2T06-08A
SC3W-M5-4
SLH6-02
AN10-01
SSD-KL-16-40-T2H3-R
SLH6-02
SLH6-02
RDQB63-45-M9BM
AN10-01
⑫
KQ2T06-08A
RDQB63-45-M9BM
φ4 BLACK
KQ2T06-08A
φ4 ORANGE
AUK8
TL8-02
SLH6-02
φ8 ORANGE
Φ8 ORANGE
φ8 BLACK
φ6 ORANGE
φ6 BLACK
FFF
PFM711S-C6L-H-M-V
R151-01
F
PFM711S-C6L-H-M-V
FF
⑦
⑨
⑨
⑧
⑧
⑧
⑧
φ6 BLACK
φ6 BLACK
φ6 ORANGE
φ6 ORANGE
⑱
⑱
⑰
USD12-10
TL10-01TL6-01
US6
US6
I
I
O
O
N
N
I
I
Z
Z
E
E
R
R
I
I
O
O
N
N
I
I
Z
Z
E
E
R
R
I
I
O
O
N
N
I
I
Z
Z
E
E
R
R
（
（
O
O
P
P
T
T
I
I
O
O
N
N
)
)
⑪
⑪
⑩
VQZ3221-5M1-C8
VQZ3221-5M1-C8
AUK8
AUK8
Φ8 ORANGE
Φ8 ORANGE
⑭
⑭
⑭
⑭
M
M
U
U
L
L
T
T
I
I
C
C
A
A
M
M
E
E
R
R
A
A
（
（
O
O
P
P
T
T
I
I
O
O
N
N
)
)
オプション時追加
オプション時追加
オプション時追加
⑳
⑳
⑳
SSD-KL-16-40-T2H3-R
SC3W-M5-4
SC3W-M5-4
⑪
⑩
⑪
φ4 BLACK
φ4 ORANGE
SSD-KL-16-40-T2H3-R
SC3W-M5-4
SC3W-M5-4
⑪
⑩
⑪
φ4 BLACK
φ4 ORANGE
⑬
⑬
⑬
UC8
標準はUC8
後ｶｯﾀｰ付はUC8を外し接続する
UC4
UC4
ATS
A
A
T
T
S
S
O
O
P
P
T
T
I
I
O
O
N
N
⑲はカバー仕様で取付
⑲はカバー仕様で取付
UP6
UP6
ATS有は USD6-4を外し
ATS側の継手を接続する
ATS側配管Φ6 ORANGE
PAGE
17
Condential & Proprietary
H024179
YSM10YSM10
Air circuit
真空発生用バルブ
VQD115-5MO-X1
シャフトブロー用バルブ
VQ120-5MO
VQ111U-5LO-X555
真空破壊用バルブ
H1
PPP
KKE-M7113-00X
TUS0425
VQ111U-5LO-X555
真空破壊用バルブ真空発生用バルブ
VQD115-5MO-X1
PPP
TUS0425
KKE-M7113-00X
H2
VQ111U-5LO-X555
真空破壊用バルブ真空発生用バルブ
VQD115-5MO-X1
PPP
TUS0425
KKE-M7113-00X
H10
φ10 ORENGE φ10 ORENGE
NO.
KHY-M4592-01X VAC SENSOR BRD ASSY1
PARTS NO. PARTS NAME QTY. DESCRIPTION
1
ZZB10-X1772
3
KLW-M7151-04X EJECTOR,RESIN
JOINTKKE-M7113-00X
1
10 LF3100
①
②
③③③
KHY-M4592-01X
KLW-M7151-04X
真空発生用バルブ
VQD115-5MO-X1
シャフトブロー用バルブ
VQ120-5MO
VQ111U-5LO-X555
真空破壊用バルブ
H1
NOTE
1.1.YSM10(KMG) HMYSM10(KMG) HM HEAD
PPP
KKE-M7113-00X
TUS0425
VQ111U-5LO-X555
真空破壊用バルブ真空発生用バルブ
VQD115-5MO-X1
PPP
TUS0425
KKE-M7113-00X
H2
VQ111U-5LO-X555
真空破壊用バルブ真空発生用バルブ
VQD115-5MO-X1
PPP
TUS0425
KKE-M7113-00X
H10
φ10 ORENGE φ10 ORENGE
NO.
KHY-M4592-01X VAC SENSOR BRD ASSY1
PARTS NO. PARTS NAME QTY. DESCRIPTION
1
ZZB10-X1772
3
KLW-M7151-04X EJECTOR,RESIN
JOINTKKE-M7113-00X
1
10 LF3100
①
②
③③③
KHY-M4592-01X
KLW-M7151-04X
H
H
3
3
-
-
H
H
9
9
O
O
m
m
i
i
s
s
s
s
i
i
o
o
n
n