YSH20_cwd_je.pdf - 第25页
Confidential & Proprietary P A G E J1305 HY2 HY1 J1307 J1313 J1312 J1306 LRORG LP1 LP2 LRORG J1077 LR1-AX IS ORG AIR FLOW SENSOR 2 AIR FLOW SENSOR 1 LR2-AX IS ORG AIR FLOW SENSOR 3 AIR FLOW SENSOR 4 J1310 HYA/D CN5 J…
Confidential & Proprietary
PAGE
J1136
1
5
4
3J1452
J1151 J1154
LZP
LZM
LZB
KA51
MAINE MACHINE
LZP
J1128
J1451
J1143
J1127
See Page 1
J1083
J1203
J1708
MGZN SET2
MGZN SET2
MGZN SET1
J1204
J1701
DO4,5 CN11
DO7 CN10
DO6 CN9
DC24V OUT CN1
DI8,9 CN22
DI7 CN15
DI6 CN14
DI3 CN13
DO1 CN4
DO3 CN6
J1181
DI1,2 CN7
DI0 CN12
DO2 CN5
DIP SW(S2)
0N
16
J1201
DO0 CN3
SENSOR CN21
CN16
COM2
COM1
CN18
CN17
MGZN DI
J1162
J1702
MGZN EMG DO
MGZN DO
TF +24V
J1163
N0110202
N0110203
N0110204
MGZN DI
PLT STP
J1710
MGZN SET
DOOR OPEN SWITCH
N0110206/T0110020
J1703
SW DO
SW DISW DI
PLT STP UP
PLT STP DOWN
N0110261
N0110262
SW DO
J1704
PLT ORG1
MGZN EMG
J1171
+24V
+24V
T0110021
PLT STP
TFCN1
TFCN14
TFCN4
TFCN5
TFCN12
TFCN3
TFCN7
TFCN6
J1164COVER
MAGAZINE COVER UPPER SW
MGZN COVER UP
J1167
MAGAZINE COVER LOWER SW
MGZN COVER LOW
COVER
CLOSE
LOCK
+24E
PLT STP
J1205
PLT ORG3
+24V
PLT CHK
+24V
+24V
SQ103
SQ104
SQ105
MAGAZINE DETECT 1
MAGAZINE DETECT 2
MAGAZINE DETECT 3
PALETTE CHECK
N0110205
TRAY LATCH
TRAY LATCH CLOSE
TRAY LATCH OPEN
DIP SW(S1)
DC24V INCN2
0N
4321
TFCN2
5
CN24 COM2
CN23 COM1I/O C
TF SET
MGZN EMG
See YSH20
INTERCONNECTION DIAGRAM
J1170
I/O TF BOARD ASSY P028
J0046
J0106
REMOTE IF BOARD
See YSH20
INTERCONNECTION DIAGRAM
CN23 TF
CN24 TF
VAC SEN.
+24V
PALETTE ORIGIN2
N0110201
PALETTE ORIGIN
N0110200
PALETTE ORIGIN3
N0110207
FLXY1 HK DO
FLXY1 HK DI
J1196
DI4,5 CN8
TFCN8
J1711
13 14
A1 A2
1/L1
3/L2
5/L3
2/T1
4/T2
6/T3
51
61
71
81
52
62
72
82
J1152
KM52/KM52A
13 EMG9 14 EMG8
S51
J1169
J1168
1 LZ U50
3 LZ V50
5 LZ W50
51 LZ U51
61 LZ V51
71 LZ W51
2 LZ U51
4 LZ V51
6 LZ W51
R3R2R1
J1153
52 LZ U52
62 LZ V52
72 LZ W52
1 0V
5 LZ MB 3 +24V
4 LZBK
LZP
LZM
LZ-AXIS 300W
LZB
BRAKE OFF
J1709
J1453
BRK OFF
□76 MAX 3000rpm
A2A1
J1706
PLT ORG2
FLEXIBLE LZ
MGZN SET
J1707
J1074
I/O CONVEYOR -1-
KM11A 83,84
See YSH20
INTERCONNECTION DIAGRAM
ELEVATION
WAFER TABLE
ION Y ALM
KA62,HTR AIR
PIN VAC,PIN UP
See Page 4
EJECTOR
LX ORG,LU DI
See Page 1
TFCN13 J1190
FLXY1 TBL DI
HTR TMP OK
See Page 5
QF53,XT42
See Page 6
POWER CIRCUIT
HEATER
SERVO UNIT 2 PI2
SERVO2 MO
SRV2 BRAKE
SERVO CONTROL BOX
I/O CONVEYOR -1-
CONTROL BOX
SB62
SB61
TF SET SW
M55
YV503
SQ523
SQ524
SQ528A
SQ528B
SQ525
SQ526
SQ527
SQ529A
SQ529B
SQ530B
SQ530A
SQ531A
SQ531B
J2059
CN.V1
22
ELEVATION
YWF-300
Confidential & Proprietary
PAGE
J1305
HY2
HY1
J1307
J1313
J1312
J1306
LRORG
LP1
LP2
LRORG
J1077
LR1-AXIS ORG
AIR FLOW SENSOR 2
AIR FLOW SENSOR 1
LR2-AXIS ORG
AIR FLOW SENSOR 3
AIR FLOW SENSOR 4
J1310
HYA/D
CN5
J1309
LP1
LR1
J1315
J1075
LCY-AXIS ORG
LP1-AXIS 30W
□35 MAX 1500rpm
LP2-AXIS 30W
□35 MAX 1500rpm
LR1-AXIS 15W
□42 MAX 650rpm
LR2-AXIS 15W
□42 MAX 650rpm
DI/DO CN6
CN1 POW
CN18 GOOD
CN4FAN
TXD/RXDCN2 CN5
CN2
CN2
CN2
CN3 XORG,XOT
AD0,AD1
AD3/DA3
AD2/DA2
DI/DO
CN7SPARE
INTOL CN8
CN10LASER
CN4
CN4
CN4
M0
M1
M0
M1
M0
M1
HEAD SERVO UNIT YWF
HEAD I/O1 BOARD ASSY P061
HEAD I/O2 BOARD ASSY P062
HEAD I/O3 BOARD ASSY P063
HEAD SERVO BOARD ASSY 1 P064
HEAD SERVO BOARD ASSY 3 P066
HEAD SERVO BOARD ASSY 2 P065
HY DO
CN6 HEAD1
HEAD2
HEAD3
HEAD4
HEAD2 (VACUUM/BLOW)
HEAD1 (VACUUM/BLOW)
HEAD3 (VACUUM/BLOW)
HEAD4 (VACUUM/BLOW)
J1303
CN4
J1311
CN3
J1304
J1301 HY POW
HY+48V
HY+24V
J0056
J0037
J1401
H1
H2
J1302
J1308
DC24VCN11
CN5
CN4CAM1
CN7LIGHT1
CN6CAM2
CN9LIGHT2
CN8CAM3
CN10LIGHT3CAMOUTVISION BOARD 2 V2 CAM4
E-C+24V
See YSH20
INTERCONNECTION DIAGRAM
CAMERA SELECTOR YWF P083
CN35
J1506
J1507
LIGHT1
J1503
CN5
CAM
WAFER CAMERA
P094
S.LIGHT COAX ASSY
WAFER CAMERA
LIGHT1J1505
LIGHT1
FLEXIBLE LCXFLEXIBLE LCY1
J1504
J1502
LIGHT1
CAM1 CAM1
□54 MAX 5000rpm
□54 MAX 5000rpm
LFX-AXIS 200W
□54 MAX 5000rpm
J1150
LFXM
LCX-AXIS 200W
□54 MAX 4500rpm
LCXM
J1142
LCXM
LCXP
LFXP
LFXM
J1122
LCY1P LCY1P
LCY1M
LCY1-AXIS 200W
LCY2P LCY2P
LCY2M
LCY2-AXIS 200W
LCXP
LFXP
SERVO3 MO
PI1
SERVO1 MO
SERVO CONTROL BOX
See Page 1
PI3
J1121
LCXP/LFXP
J1125
J1126
FLEXIBLE LCY2
FLEXIBLE LFX
LCX ORG
LFX ORG
LCX/LFX ORG
N100D005
N100D006
N100D004
LCX-AXIS ORG
LFX-AXIS ORG
LCY ORG
T100C000/T100C002
T100C001/T100C003
T100C400/T100C402
T100C401/T100C403
HY DI
HYA/D
LU1
LP1 J1314
LPR 1
LR1
LU2
LP2 J1317
LR2
LP2
LR2
J1318
LPR 2
LUP,LUM
See Page 4
EJECTOR
J1320
FLEXIBLE LP1
FLEXIBLE LP2
H1
H2
H3
H4
LR
LR
LR1
LR2
N100D002
N100D003
J0163 HY CN18
CN11
KM51,XT31
QF54,XT42
J1501
J0055
J0141
J1141
J1123
J0121
IF2 SRVA
See YSH20
INTERCONNECTION DIAGRAM
SERVO BOARD 3
SERVO BOARD 1
REMOTE IF BOARD
CN2
J0180
POWER CIRCUIT
See Page 6
CONTROL BOX
See YSH20
INTERCONNECTION DIAGRAM
I/O CONVEYOR -5-
CONTROL BOX
See YSH20
INTERCONNECTION DIAGRAM
I/O CONVEYOR -1-
M53
M54
M59
M52
M62
M63
M65
M66
YV509
YV510
YV511
YV512
SQ541
SQ543
SQ542
SQ545
SQ546
SQ538
SQ540
SQ539
SQ544
CC.V1
23
WAFER HEAD
YWF-300
Confidential & Proprietary
PAGE
J1320
LUM
LUP
LU DI
J1196
PINA VAC
PINB VAC
J1082
LU2
J1081
LU1LU1
PINB VAC
PINA VAC
PINB UP
PINA UP
J1203
LX-AXIS ORG
J1197
N0110240
LU1-AXIS 30W
LU2-AXIS 30W
□35 MAX 4500rpm
□35 MAX 4500rpm
J1322
J1323
FLEXIBLE LU1
FLEXIBLE LU2
FLEXIBLE LX
LU1LU1
LU2
LU1,LU2
See Page 3
TFCN8
I/O TF BOARD
See Page 2
PINA UP
PINA LOW
PIN UP A
PIN B LOWER
PIN B UPPER
PIN A LOWER
PIN A UPPER
PIN A VACUUM
PIN B VACUUM
N0110242
N0110243
N0110246
N0110247
N0110244
N0110245
PIN LOW A
PINB UP
PINB LOW
PIN UP B
PIN LOW B
LX ORG
TFCN4
PIN A VACUUM
T0110012
PIN B VACUUM
T0110014
PIN A UP
T0110010
PIN B UP
T0110011
YWF HEAD SERVO BOARD 1,2
LXP
LX-AXIS 200W
LXP
LXM
□54 MAX 4500rpm
SERVO2 MO
PI2
SERVO CONTROL BOX
See Page 1
J1127
J1143
J1129
SERVO UNIT 2
M56
M61
M64
SQ504
SQ532
SQ533
SQ536
SQ537
SQ534
SQ535
YV504
YV505
YV506
YV507
CC.V1
24
EJECTOR
YWF-300