YSH20_cwd_je.pdf - 第27页
Confidential & Proprietary P A G E S61 INTERCO NNECTION DIAGRAM See YSH20 See Page 2 I/O TF BOARD See Page 7 EMERGEN CY CIRCUIT HTR TMP OK TFCN13 TFCN6 CN36 THRM EMG 2 1 4 5 2 1 A622 TC- A621 TC+ A6115 CT A6114 CT 15…
Confidential & Proprietary
PAGE
J1320
LUM
LUP
LU DI
J1196
PINA VAC
PINB VAC
J1082
LU2
J1081
LU1LU1
PINB VAC
PINA VAC
PINB UP
PINA UP
J1203
LX-AXIS ORG
J1197
N0110240
LU1-AXIS 30W
LU2-AXIS 30W
□35 MAX 4500rpm
□35 MAX 4500rpm
J1322
J1323
FLEXIBLE LU1
FLEXIBLE LU2
FLEXIBLE LX
LU1LU1
LU2
LU1,LU2
See Page 3
TFCN8
I/O TF BOARD
See Page 2
PINA UP
PINA LOW
PIN UP A
PIN B LOWER
PIN B UPPER
PIN A LOWER
PIN A UPPER
PIN A VACUUM
PIN B VACUUM
N0110242
N0110243
N0110246
N0110247
N0110244
N0110245
PIN LOW A
PINB UP
PINB LOW
PIN UP B
PIN LOW B
LX ORG
TFCN4
PIN A VACUUM
T0110012
PIN B VACUUM
T0110014
PIN A UP
T0110010
PIN B UP
T0110011
YWF HEAD SERVO BOARD 1,2
LXP
LX-AXIS 200W
LXP
LXM
□54 MAX 4500rpm
SERVO2 MO
PI2
SERVO CONTROL BOX
See Page 1
J1127
J1143
J1129
SERVO UNIT 2
M56
M61
M64
SQ504
SQ532
SQ533
SQ536
SQ537
SQ534
SQ535
YV504
YV505
YV506
YV507
CC.V1
24
EJECTOR
YWF-300
Confidential & Proprietary
PAGE
S61
INTERCONNECTION DIAGRAM
See YSH20
See Page 2
I/O TF BOARD
See Page 7
EMERGENCY CIRCUIT
HTR TMP OK
TFCN13
TFCN6
CN36
THRM EMG
2
1
4
5
2
1
A622 TC-
A621 TC+
A6115 CT
A6114 CT
15
14
A615 TC+
A612 OUT-
A611 OUT+
A6112 RUN3
A6111 RUN1
11
12
13
KA621 RUN-
KA625 RUN+ KA624 RUN2
KA623 RUN1
HTR AIR HEATER VALVE
T0110031
10
THERMO WARNING UNIT A62
THERMO CONTROL UNIT A61
A2A1
KM61A1 +24V
KM6133 RUN2
KM6141 T32BA
KM61/KM61A
KM6134 RUN3
KM6113 +24BA KM6114 +24CC
KM6142 T32B
KM61A2 0V24
U11DU11C
XT61
MAX600V/15A
V10 V10
A1
A2
14
11
12
8
7
6
9
See Page 6
POWER CIRCUIT
J1190
A619 +24V
A6110 0V
A6110 0V
A616 TMP OK
A617 EMG0A
A618 EMG0
A62A1 +24V
A62A2 0V
A6211 EMG1
A6212 EMG0A
HEATER PWR
XT62
TC2 +
TC2 -
TC1 +
TC1 -
MAX600V/15A
KA612 OUT-
KA617 OUT+ KA613 U11D
KA611 U11E
A614 TC-
I/O CONVEYOR -1-
I/O CONVEYOR -5-
CT1
U11E
V10
HEATER
YV508
J2059
J2060
J2057
J2061
J2058
J2064 J2065
J2054
J2053J2052
J2055
J2063
J2056
J2062
J2051
HEATER KM61
HEATER PWR
INPUT LOAD
5 +
1 - 3
4
KA62
A1 A2
1/L1
3/L2
5/L3
2/T1
4/T2
6/T3
33 34
41 42
13 14
V10
TC1 +
TC1 -
TC2 +
TC2 -
INPUT LOAD
KA61
1
37 +
2 -
U11E
V10
CC.V1
25
HEATER(OPTION)
YWF-300
Confidential & Proprietary
PAGE
See YSH20
INTERCONNECTION DIAGRAM
9
10
7
8
5
6
3
4
2
1
9
10
2
1
3
4
5
6
7
8
+24VF6
CN35
+24V
1.35A J0055CN35
9
10
7
8
5
6
3
4
2
1
+24V
1.85A
+24VF7
CN36
7
8
5
6
3
4
2
1
CN34
+24E
7
8
5
6
3
4
2
1
CN34
1
2
3
4
1
2
3
4
I PWRJ0793 J0791
1
2
3
4
1
2
3
4
ION Y POW
1
2
3
1
2
3
44
5
6 6
5
CN3
ION I/F BOARD ASSY P026
1
2
3
1
2
3
44
5
6
5
CN1I CN3
6
7
8
9
7
8
9
I CN1
1
2
3
4
1
2
3
4
5
6
5
6
IONIZER YWF A23
+24E
+24E
YSH20 POWER CIRCUIT -2-
INTERCONNECTION DIAGRAM
IONIZER A,B
See YSH20
1 1
2 2
3 3
CAMSEL BRD. ASSY
CN11
CAMERA SELECTOR YWF
P083
E-C+24V
J1791
I/O CONVEYOR BOARD
YSH20 POWER CIRCUIT -2-
+24A
0V24A
J0040 +24A+24A
QF54 2A(45℃ 1.75Amax)
HY+24V
J0056
+48C
QF51 3A
+48C
0V48
QF41
XT31
J0035 +48C+48C
4/T2
5/L3
3/L2
1/L1 2/T1
6/T3
J0037
J0036
+24A
0V24A
TF +24A+24A
QF53 2A
J0046
GS21
XT42
XT41
XT42
YSH20 POWER CIRCUIT -1-
See YSH20
INTERCONNECTION DIAGRAM
QF22
XT21
U11C
V10
KM51
MAX690V/6A
J0046
HY+24V
2
1
2
1
1
3
2
HY+48V
2
3
1
4
6 6
4
5 5
TFCN2
4
3
2
1
4
3
2
1
CN2
I/O TF BOARD ASSY
P028
3
2
1
4
1
2
3
4
J1301
+48V
+24V
GND+24V
GND+48V
CN1
I/O HEAD BOARD ASSY YWF
P062
CN1
J2071
1
2
4/T2
5/L3
3/L2
1/L1 2/T1
6/T3
U11C
U11C
U11C
U11C
MAX690V/6A
U11D
U11D
U11D
U11D
XT61
V10V10
V10
MAX600V/15A
2
1
2
1
HEATER PWR
V10
MAX600V/15A
V10
HEATER
U11E U11E
V10
XT62
V10
KA61
3 1KA613 U11D KA611 U11E
KM61
J2064 J2065
J2053
J2053
J2054J2051
1
2
HEATER PWR
HEATER PWR
WAFER HEATER(OPTION)
9
10
2
1
3
4
5
6
7
8
CN36 J2057
WAFER HEATER(OPTION)
THERMO CONTROL UNIT A61
THERMO WARNING UNIT A62
9 DC24V
10 0V
A1 DC24V
A2 0V
A619 +24V
A6110 0V
A62A1 +24V
A62A2 0V
CC.V1
26
POWER CIRCUIT
YWF-300