5OM-1610-002_w.pdf - 第104页
5OM-1610 3-3 Parts Location 101 1-002 G(01300) Layout under the Base (Side Panel L) Rear Side F201 F203 F202 Q201 Q206 Q204 K29 K28 K10 Q205 Q221R Q221R Q221R Vacuum Pump Q221F X Axis X Axis Y1 Axis Y2 Axis Q222F Y1 Axis…
5OM-1610
3-2
Parts Location
1011-002 D(01700)
Layout under the Base (DC Power Supply)
M174
M173
F61
M173
G1
G1
G2
G7
C129
G4
G4
G8
G8
To FG Terminal
on the rear of G1
5OM-1610
3-3
Parts Location
1011-002 G(01300)
Layout under the Base (Side Panel L)
Rear Side
F201 F203
F202
Q201 Q206
Q204
K29 K28 K10
Q205 Q221R Q221R Q221R
Vacuum
Pump
Q221F
X Axis
X Axis Y1 Axis Y2 Axis
Q222F
Y1 Axis
Q223F
Y2 Axis
5OM-1610
3-4
Parts Location
1011-002 G(01300)
Layout under the Base (Side Panel C)
B
K33A
K33B
K1
K25
K3
K4
K75
K77
K38 K50
F1
(3A)
F2
(6.3A)
F5
(6.3A)
F7
(6.3A)
F41
(3A)
F42
(5A)
F52
(6.3A)
F33
(10A)
F34
(10A)
F43
(10A)
F44
(10A)
F29
(6.3A)
F30
(6.3A)
Details B
For 24V Circuit
For 48V Circuit