5OM-1610-002_w.pdf - 第193页
5OM-1610 5-6 101 1-002G(01300-7) Side Panel C 2 Q221R 1 3 5 2 4 6 Q222R 1 3 5 2 4 6 Q223R 1 3 5 2 4 6 L116 L216 L316 L117 L217 L317 L118 L218 L318 L112 L212 L312 13 14 10B 802 13 14 803 802 13 14 803 514 X10520-3 Q221F 1…
5OM-1610
5-51011-002G(01300-7)
Q201
1 3 5
2 4 6
Q206
1 3
2 4
Q204
1 3
2 4
1
2
3
4
5
6
21
22
A1
A2
K29
L100
L200
L300
L100
L200
L120
L220
L110
L210
L310
L120
L220
L121
L221
1
2
3
4
5
6
21
22
A1
A2
K28
L130
L230
L330
L131
L231
L331
L122
L222
24A2
10A
24A1
534
1
2
3
4
5
6
21
22
A1
A2
K10
K3-34
L140
L240
L340
334
10A
K38-A22
417
405B
Q205
1 3 5
2 4 6
L130
L230
L330
14
713
X10520-8
13
10B
X10520-7
X10520-1
M66
XG01
A3
A2
A1
L120
L220
L140
L240
L340
Q206-2
Q206-4
B3
B2
B1
L110
L210
L310
L121
L221
L110
L210
L310
L110
L210
L310
U07:X27163-1
K33A-13
K33A-1,3,5
U07:X2723-2
TB:DC1(10A)
Vacuum Pump
G01,G02,G04,G07 Power Supply
TB:P1(L122,L222)
TB:P1(L121,L221)
TB:P1(L100,L200)
TB:P1(L110,L210, L310)
TB:P1(L100,L200, L300)
10B503A
L120
L220
XG01
TB:DC1(24A1)
TB:DC1(24A2)
Side Panel C 1
5OM-1610
5-6
1011-002G(01300-7)
Side Panel C 2
Q221R
1 3 5
2 4 6
Q222R
1 3 5
2 4 6
Q223R
1 3 5
2 4 6
L116
L216
L316
L117
L217
L317
L118
L218
L318
L112
L212
L312
13
14
10B
802
13
14
803
802
13
14
803
514
X10520-3
Q221F
1 3 5
2 4 6
Q222F
1 3 5
2 4 6
Q223F
1 3 5
2 4 6
L113
L213
L313
L114
L214
L314
L115
L215
L315
L112
L212
L312
13
14
10B
805
13
14
806
805
13
14
806
515
X10520-5
X10520-6
X10520-4
X10520
6
5
4
3
2
1
10B
512
Q201-14/AXaR(Red)
10B
514
Q221R-13
Q223R-14
10B
515
Q221F-13
Q223F-14
7
10B
Q205-13
8
713
Q205-14
9
10B
10
533
X10520
A21(X)Main Power:F
(L113, L213, L313)
A22(Y1)Main Power:F
(L114, L214, L314)
A23(Y2)Main Power:F
(L115, L215, L315)
A21(X)
Main Power:R
(L116, L216, L316)
A22(Y1)Main Power:R
(L117, L217, L317)
A23(Y2)Main Power:R
(L118, L218, L318)
K33B-2,4,6
K33B-2,4,6
K33B-14
F201-3
F201-4
HLS PCB Collective Section
5OM-1610
5-71011-001G(01300-8)
A
1
2
3
4
5
6
21
22
A1
A2
K33B
L111
L211
L311
L112
L212
L312
42910A
13
14
416
503
1
2
3
4
5
6
21
22
A1
A2
K33A
L101
L210
L310
L111
L211
L311
43010A
13
14
415
503B
414
503A
14 13
24 23
34 33
44 43
A2 A1
24A20
24A2
24A1
10A
K1B
F2
14 13
24 23
34 33
44 43
A2 A1
24G
24G3A
24A3
546
K75
TB:DC1(24G)
TB:DC1(24A3)
14 13
24 23
34 33
44 43
A2 A1
24G
24G3B
24A3
547
K77
TB:DC1(24G)
X11234-2
TB:DC1(24A1)
TB:DC1(24A2)
TB:DC1(10A)
10A 10A
〈TB:DC1〉
10A 10A
10A 10A
10A 10A
10A 10A
10A 10A
24A1 24A1
24A1 24A1
24A2 24A2
24A2 24A2
24A2 24A2
24A2 24A2
24A3 24A3
24C 24C
10C 10C
24F 24F
10F 10F
10B 10B
10B 10B
10B 10B
10B 10B
10B 10B
10B 10B
24B1 24B1
24B1 24B1
24B1 24B1
24B1 24B1
24B1 24B1
24B2 24B2
24A3 24A3
24B3 24B3
24B4 24B4
10G 10G
24G 24G
10G 10G
24G 24G
10G 10G
24G 24G
10D 10D
10D 10D
10D 10D
500 500
X7110/X7405
K1B-A2
K33A-A2/K10-A2
REED-X19601/XM171
X10503/X11203
M105/M106
XM101/XM102
M123,M124
M121,M122
U27:X1-1,-2
K38-A2
K3
61
24A2
53
43
33
23
13
A1
T23
T32
T31
T12
T11
A2
PE
B
A
T22
T21
62
336
54
44
34
24
14
335
331
24A2
332
24A1
10A
408
412
441
445
334
426
420
405B
405A
401
K1B-A1/K29-A1
X11203
U27:X1-4,K25-5
F1 3A
F2 6.3A
F5 6.3A
F7 6.3A
F41 3A
F42 5A
F52 6.3A
F33 10A
F34 10A
F43 10A
F44 10A
F29 5A
F30 5A
REED-X19601/K1B-14
XM171
M105/M106
XM101/XM102
M123,M124
M121,M122
U27:X1-5,K28-A1
K75-A1/X10503
U27:X1-6
X10701
X10701
X231P1
X231P1
1
2
3
4
5
6
21
22
A1
A2
K38
48D3E
48D3F
426
10A
48D2E
48D2F
48D2G
48D3G
417
418
1
2
3
4
5
6
21
22
A1
A2
K50
48D3H
48D3J
426
10A
48D2H
48D2J
48D2K
48D3K
419
418
24A0
24A
24A
24A
24A20
24A30
24B1
24B2
24B3
24B4
48D2E
48D2F
48D2G
48D2H
48D2J
48D2K
U27:X2701-3
K1B-13
TB:DC1(24B1)
TB:DC1(24B2)
TB:DC1(24B3)
TB:DC1(24B4)
X2412R/X2412F
X8515/X17110
X7307/X7210
CONN:OP1/OP2
X231P1(R)/X231P1(F)
X7405(R),X7405(F)
X14110,X116110
X0803,X1403
X14310,X116210
X2412R/X2412F
X8515/X7307
CONN:OP1/OP2
X7210
X7405(R)/X7405(F)
X231P1(R)/X231P1(F)
X10503/X11203
F7
X14110,X116110
X14310,X116210
X0803,X1403
X1300D1(R),X1300D1(F)
F41
F42
F52
G02,04
A2
A1
B1
A3
B2
B3
X2711-1
X2711-2
10D
48D
10G
24G
10D
48D
G01B
2
1
10B
24B
U27:X15-1,X16-1
U27:X17-1,3
U27:X17-2,4
X14906
K75-13/K77-13
TB:DC1 K4-S24
415
503B
X11234-1
X11234
2
1
546
K75-A2
547
K77-A2
G01A
A2
A1
B1
A3
B2
B3
10A
10A
10A
24A
24A
24A
A5
A4
A6
10C
10F
B5
B4
B6
24C
24F
X12742-2,X12742-4
U27:X27150-13
K10-A1
K38-A1
U27:X27150-8
U27:X27150-12
U27:X27150-11
U27:X27150-2
U27:X27150-4
U27:X27150-7
U27:X27150-6
U27:X27150-5
U27:X27150-3
U27:X27150-1
10B 10B
X10701
X1300D1(R),X1300D1(F)
X10503/X11203
X10701
X17110
XS006-03
REED-G04
XS006-03
REED-G04
X1300B2(R)/X1300B2(F)
X14106
X15306
X15506
U27:X23-3
X1300F3(R)/X1300F3(F)
X11234
U27:X2723-1
X14106-2
X14106-3
X15306-2
X15306-3
X14906-2
X14906-3
X15506-2
X15506-3
X1300B2-2
X1300B2-2
(R)
(F)
10A 10A
K3-24TB:DC1(10A)
X10520-2
U27:X2715-2
U27:X2716-2
K10-21
PSU:G2,G4
PSU:G1
PSU:G2,G4
U27:X2711
HLS PCB Collective Section
L112
L212
L312
Q221-Q223F Terminal Block
Q221-Q223R Terminal Block
K25-3
D1 D1
D D
D2 D2
D3 D3
K4-S14
Q201-2,4,6
Q201-11/AXcR Yellow
K4-T31
K4-T33
K4
D3
D3
D2
D1
T33
T32
T31
A1
X2
X1
Y1
T12
T11
A2
T42
T41
T22
T21
D4
D4
L1
S54
S44
S24
S14
D2
D1
416
24A1
414
24A1
10A
440
429
430
446
24A1
443
K33A-A1
K33B-A1
K33A-21
K33B-22
X12741-3
X22765-1
X22765-2
D4 D4
TB:DC2(D3)
TB:DC2(D2)
TB:DC2(D1)
TB:DC2(D4)
X12741-1
X0804,X1404
X0804,X1404
〈TB:DC2〉
K4-D1
K4-D2
K4-D3
K4-D4
S151F
5
24A1
1
542
3
2
4
K25
24A30 24A3
U27:X27163-2
F5
S151F,S151B
S151B
S151F,S151B
S151F,S151B
24B
48D
24B
24B
24B
48D
48D
48D
48D
48D
TB:DC1(24A3)
K25-4
TB:DC1(24A1)
Side Panel C 3