YHP-2D_mpl_e.pdf - 第61页
KJG-091 1 6 2 4 1 3 1 4 5 1 1 10 7 12 12 8 9 13 1 Lcx AXIS / Lcy AXIS W afer Lc AXIS
KJG-0911
Rev. :It is the parts which a change was in in the past. Please be careful at the time of the parts ordering.
Rev.: 過去に変更が入った部品を示します。部品発注時は注意してください。
No. Part No. Part Name Q’ty Remarks Rev. Rank Level No. Part No. Part Name Q’ty Remarks Rev. Rank Level
1
KJG-M1844-00 BELT
1 /
Í
39
2
KJG-M1851-A0
SENSOR, LH ORG
1 B
Í
40
3
KJG-M1854-00 CYLINDER ASSY
1 B
Í
41
4
KJG-M1872-00 CYLINDER ASSY, HOOK
1 B
Í
42
5
90K63-311320 AC SERVO MOTOR
1 B
Í
43
6
91312-03014 BOLT HEX. SOCKET HEAD
2 44
7
91312-03016 BOLT HEX. SOCKET HEAD
2
45
8
91312-04010 BOLT HEX. SOCKET HEAD
4
46
9
98902-03008 SCREW, BINDING HEAD
1
47
10
$SC4-M5A SPEED CONTROLLER
2 48
11
$SL6-M5 JOINT
2 49
12
KJG-M1854-B0 SENSOR, ARM OP
1 50
13
KJG-M1854-C0 SENSOR, ARM CL
1 51
14
KJG-M1854-20 SENSOR HOLDER,CYL.
2 52
15
KJG-M1872-B0 SENSOR, HOOK OP
1 53
16
KJG-M1872-C0 SENSOR, HOOK CL
1 54
17
KJG-M1872-20 SENSOR, HOLDER,CYL.
2 55
18
56
19
57
20
58
21
59
22 60
23 61
24 62
25 63
26 64
27 65
28 66
29 67
30 68
31 69
32 70
33 71
34 72
35 73
36 74
37 75
38 76
12
2
LH AXIS
Wafer Hook
KJG-0911
6
2
4
1
3
1
4
5
11
10
7
12
12
8
9
13
1
Lcx AXIS / Lcy AXIS
Wafer Lc AXIS
KJG-0911
Rev. :It is the parts which a change was in in the past. Please be careful at the time of the parts ordering.
Rev.: 過去に変更が入った部品を示します。部品発注時は注意してください。
No. Part No. Part Name Q’ty Remarks Rev. Rank Level No. Part No. Part Name Q’ty Remarks Rev. Rank Level
1
KJG-M7222-A0 SENSOR ASSY
1 B
Í
39
2
KJG-M7227-A0
SENSOR, LCX ORG
1 B
Í
40
3
90K63-311640 AC SERVO MOTOR
1 B
Í
41
4
91312-03014 BOLT HEX. SOCKET HEAD
4 42
5
91312-04012 BOLT HEX. SOCKET HEAD
4 43
6
98502-03008 SCREW, PAN HEAD
1 44
7
KJG-M7236-00 COUPLING
1
B
Í
45
8
KJG-M7251-A0 SENSOR, LCY ORG
1
B
Í
46
9
KJG-M7252-A0 SENSOR, LCY OT
1
B
Í
47
10
90K63-311641 AC SERVO MOTOR
1 B
Í
48
11
91312-03012 BOLT HEX. SOCKET HEAD
4 49
12
98580-03008 SCREW, PAN HEAD (+)
2 50
13 51
14 52
15 53
16 54
17 55
18
56
19
57
20
58
21
59
22 60
23 61
24 62
25 63
26 64
27 65
28 66
29 67
30 68
31 69
32 70
33 71
34 72
35 73
36 74
37 75
38 76
13
1
Lcx AXIS / Lcy AXIS
Wafer Lc AXIS