YHP-2D_mpl_e.pdf - 第63页

KJG-091 1 5 15 7 2 10 6 17 16 4 1 1 3 10 8 1 9 9 12 1 1 15 18 20 19 20 13 14 14 1 Ejector Unit W afer Ejector Changer Unit

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KJG-0911
Rev. :It is the parts which a change was in in the past. Please be careful at the time of the parts ordering.
Rev.: 過去に変更が入った部品を示します。部品発注時は注意してください。
No. Part No. Part Name Q’ty Remarks Rev. Rank Level No. Part No. Part Name Q’ty Remarks Rev. Rank Level
1
KJG-M7222-A0 SENSOR ASSY
1 B
Í
39
2
KJG-M7227-A0
SENSOR, LCX ORG
1 B
Í
40
3
90K63-311640 AC SERVO MOTOR
1 B
Í
41
4
91312-03014 BOLT HEX. SOCKET HEAD
4 42
5
91312-04012 BOLT HEX. SOCKET HEAD
4 43
6
98502-03008 SCREW, PAN HEAD
1 44
7
KJG-M7236-00 COUPLING
1
B
Í
45
8
KJG-M7251-A0 SENSOR, LCY ORG
1
B
Í
46
9
KJG-M7252-A0 SENSOR, LCY OT
1
B
Í
47
10
90K63-311641 AC SERVO MOTOR
1 B
Í
48
11
91312-03012 BOLT HEX. SOCKET HEAD
4 49
12
98580-03008 SCREW, PAN HEAD (+)
2 50
13 51
14 52
15 53
16 54
17 55
18
56
19
57
20
58
21
59
22 60
23 61
24 62
25 63
26 64
27 65
28 66
29 67
30 68
31 69
32 70
33 71
34 72
35 73
36 74
37 75
38 76
13
1
Lcx AXIS / Lcy AXIS
Wafer Lc AXIS
KJG-0911
5
15
7
2
10
6
17
16
4
11
3
10
8
1
9
9
12
11
15
18
20
19
20
13
14
14
1
Ejector Unit
Wafer Ejector Changer Unit
KJG-0911
Rev. :It is the parts which a change was in in the past. Please be careful at the time of the parts ordering.
Rev.: 過去に変更が入った部品を示します。部品発注時は注意してください。
No. Part No. Part Name Q’ty Remarks Rev. Rank Level No. Part No. Part Name Q’ty Remarks Rev. Rank Level
1
KJG-M9703-00 CYLINDER
1 B
Í
39
2
KJG-M9722-00
CYLINDER
1 B
Í
40
3
KJG-M9724-A0 EJECTOR ASSY, A
1 B
Í
41
4
KJG-M9724-B0 EJECTOR ASSY, B
1 B
Í
42
5
KJG-M9725-A0 SENSOR ASSY, A
1 B
Í
43
6
KJG-M9725-B0 SENSOR ASSY, B
1 B
Í
44
7
91312-04025 BOLT HEX. SOCKET HEAD
2
45
8
91312-05012 BOLT HEX. SOCKET HEAD
8
46
9
$SC4-M5A SPEED CONTROLLER
2
47
10
$UL6M JOINT
2 48
11
$UT6 JOINT
2 49
12
KJG-M9709-00 KNUCKLE JOINT
1 /
Í
50
13
KJG-M9726-A0 SENSOR ASSY, A
1 B
Í
51
14
KJG-M9726-B0 SENSOR ASSY, B
1 B
Í
52
15
$SC4-01A SPEED CONTROLLER
2 /
Í
53
16
KJG-M9703-B0 SENSOR, PIN UP
1 B
Í
54
17
KJG-M9703-C0 SENSOR, PIN DOWN
1 B
Í
55
18
KJG-M9722-B0 SENSOR, PIN A
1
B
Í
56
19
KJG-M9722-C0 SENSOR, PIN B
1
B
Í
57
20
KJG-M9722-20 SENSOR BAND, CYL.
2
/
Í
58
21
59
22 60
23 61
24 62
25 63
26 64
27 65
28 66
29 67
30 68
31 69
32 70
33 71
34 72
35 73
36 74
37 75
38 76
14
1
Ejector Unit
Wafer Ejector Changer Unit