YHP-2D_mpl_e.pdf - 第62页
KJG-091 1 Rev . :It is the parts which a change was in in the past. Please be careful at the time of the parts ordering. Rev.: 過去に変更が入った部品を示します。部品発注時は注意してください。 No. Part No. Part Name Q’ty Remarks Rev . Rank Level No. Par…
KJG-0911
6
2
4
1
3
1
4
5
11
10
7
12
12
8
9
13
1
Lcx AXIS / Lcy AXIS
Wafer Lc AXIS
KJG-0911
Rev. :It is the parts which a change was in in the past. Please be careful at the time of the parts ordering.
Rev.: 過去に変更が入った部品を示します。部品発注時は注意してください。
No. Part No. Part Name Q’ty Remarks Rev. Rank Level No. Part No. Part Name Q’ty Remarks Rev. Rank Level
1
KJG-M7222-A0 SENSOR ASSY
1 B
Í
39
2
KJG-M7227-A0
SENSOR, LCX ORG
1 B
Í
40
3
90K63-311640 AC SERVO MOTOR
1 B
Í
41
4
91312-03014 BOLT HEX. SOCKET HEAD
4 42
5
91312-04012 BOLT HEX. SOCKET HEAD
4 43
6
98502-03008 SCREW, PAN HEAD
1 44
7
KJG-M7236-00 COUPLING
1
B
Í
45
8
KJG-M7251-A0 SENSOR, LCY ORG
1
B
Í
46
9
KJG-M7252-A0 SENSOR, LCY OT
1
B
Í
47
10
90K63-311641 AC SERVO MOTOR
1 B
Í
48
11
91312-03012 BOLT HEX. SOCKET HEAD
4 49
12
98580-03008 SCREW, PAN HEAD (+)
2 50
13 51
14 52
15 53
16 54
17 55
18
56
19
57
20
58
21
59
22 60
23 61
24 62
25 63
26 64
27 65
28 66
29 67
30 68
31 69
32 70
33 71
34 72
35 73
36 74
37 75
38 76
13
1
Lcx AXIS / Lcy AXIS
Wafer Lc AXIS
KJG-0911
5
15
7
2
10
6
17
16
4
11
3
10
8
1
9
9
12
11
15
18
20
19
20
13
14
14
1
Ejector Unit
Wafer Ejector Changer Unit