YSB55w_KLG_MPL.pdf - 第5页
KLB-1608 14 W afer Ejector Section Ejector Head ........................................... 14-1 15 Flip Head Section Head Assy ............................................... 15-1 Shank / Dust Box ......................…
Contents
KLB-1608
7 Fluxer Section
Flux Plate ..................................................7-1
Pneumatic / Detection ...............................7-2
8 Pump Section
Vacuum Pump ...........................................8-1
9 Dump Section
Dump Box .................................................9-1
10 Controller Section
Controller ................................................10-1
11 Exterior, etc. Section
Exterior, etc. ............................................ 11-1
12 Wafer Elevation Section
EL / Foot .................................................12-1
Rack Assy ...............................................12-2
Cover Assy ..............................................12-3
Door Assy ................................................12-4
13 Wafer Con. Section
Shuttle .....................................................13-1
Tramsport ................................................ 13-2
Base / Mainte ..........................................13-3
Clamp Assy ............................................. 13-4
1 Base Section
Sub Assy ................................................... 1-1
2 Cover Section
Right Cover / Muzzle .................................2-1
Left Cover / Muzzle ...................................2-2
Center Cover .............................................2-3
Acrylic door ...............................................2-4
Rear Cover ................................................2-5
Base F. Cover / Ups ..................................2-6
Base R. Cover ...........................................2-7
3 Moving-axis Section
Y Axis Cable Stay / Air ..............................3-1
4 Head Section
Body Head Assy........................................ 4-1
Z Axis ........................................................4-2
5 Nozzle Section
Nozzle .......................................................5-1
6 Conveyor Section
Belt / Sensor .............................................6-1
Body / Sensor AMP ................................... 6-2
CV Motor Assy L. ......................................6-3
CV Motor Assy R. .....................................6-4
CV Motor Assy 2 / 3 / 4 .............................6-5
KLB-1608
14 Wafer Ejector Section
Ejector Head ...........................................14-1
15 Flip Head Section
Head Assy ...............................................15-1
Shank / Dust Box ....................................15-2
16 Wafer Traverser Section
Valve Panel Assy .................................... 16-1
17 Wafer Shuttle ST Section
Valve Panel ............................................. 17-1
Shank ......................................................17-2
18 Tools Section
Tools ........................................................18-1
