YSB55w_KLG_MPL.pdf - 第76页
KLG-1608 19 18 4 5 13 16 15 14 11 13 9 13 12 2 1 17 14 16 10 16 17 7 3 9 6 8 19 18 4 5 13 16 15 14 11 13 9 13 12 2 1 17 14 16 10 16 17 7 3 9 6 8 17 1 Valve Panel Wafer Shuttle ST
KLG-1608
Rev. :It had a change without the compatibility. Please be careful at the time of the parts ordering.
Rev.: 過去に互換性の無い変更が入った部品。部品発注時は注意してください。
No. Part No. Part Name Q’ty Remarks Rev. Rank Level
1 KLY-M7TA3-00 VALVE PANEL ASSY. 1 /
Í
2 KLY-M7T31-00 BRKT.,VALVE 2 /
Í
3 KLY-M7T32-00 COVER,VALVE 2 /
Í
4 KLY-M7TVA-00 VALVE,ASSY. 1 B
Í
5 KGS-M5184-10 SEAL,EARTH 1 4 /
Í
6 KLY-M7TB3-00 VALVE PANEL ASSY. 1 /
Í
7 KLY-M7TVB-00 VALVE,ASSY. 1 B
Í
8 91312-03006 BOLT,HEX.SOCKET HEAD 8
9 91312-03012 BOLT,HEX.SOCKET HEAD 4
10 97602-04306 SCREW,PAN HEAD W/W 6
11 91312-04010 BOLT,HEX.SOCKET HEAD 4
12 $CTAM1 ANCHOR MOUNT 6
13
14
15
16
17
18
19
20
21
22
23
24
25
26
27
28
29
30
31
32
33
34
35
36
37
38
No. Part No. Part Name Q’ty Remarks Rev. Rank Level
39
40
41
42
43
44
45
46
47
48
49
50
51
52
53
54
55
56
57
58
59
60
61
62
63
64
65
66
67
68
69
70
71
72
73
74
75
76
16
1
Valve Panel Assy
Wafer Traverser
KLG-1608
Rev. :It had a change without the compatibility. Please be careful at the time of the parts ordering.
Rev.: 過去に互換性の無い変更が入った部品。部品発注時は注意してください。
No. Part No. Part Name Q’ty Remarks Rev. Rank Level
1 KLY-M7S45-00 BRKT.,VALVE 2 /
Í
2 KLY-M7S38-00 BRKT.,CABLE FIX 4 /
Í
3 KLY-M7S47-00 BRKT.,VALVE 2 2 /
Í
4 KLY-M7SVA-00 SHUTTLE VALVE A 1 /
Í
5 KLY-M7SVB-00 SHUTTLE VALVE B 1 /
Í
6 KLY-M654E-A0 SENS,S-A1 FLOW ASSY 1 B
Í
7 KLY-M654E-B0 SENS,S-A2 FLOW ASSY 1 B
Í
8 $KM-10 MUFFLER 1 /
Í
9 KGS-M7742-00 LABEL,NOZZLE 2 /
Í
10 KLY-M654E-C0 SENS,S-B1 FLOW ASSY 1 B
Í
11 KLY-M654E-D0 SENS,S-B2 FLOW ASSY 1 B
Í
12 KGS-M5184-00 SEAL,EARTH 1 2 /
Í
13 91312-03006 BOLT HEX,SOCKET HEAD 20
14 91312-03008 BOLT HEX,SOCKET HEAD 8
15 97602-04306
SCREW PAN HEAD W/WASHER
4
16 91312-04008 BOLT HEX,SOCKET HEAD 8
17 92902-03200 WASHER,PLAIN 8
18 KLY-M7SA4-00 VALVE PANEL A ASSY 1 /
Í
19 KLY-M7SB4-00 VALVE PANEL B ASSY 1 /
Í
20
21
22
23
24
25
26
27
28
29
30
31
32
33
34
35
36
37
38
No. Part No. Part Name Q’ty Remarks Rev. Rank Level
39
40
41
42
43
44
45
46
47
48
49
50
51
52
53
54
55
56
57
58
59
60
61
62
63
64
65
66
67
68
69
70
71
72
73
74
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76
17
1
Valve Panel
Wafer Shuttle ST