YSB55w_KLG_MPL.pdf - 第75页
KLG-1608 Rev . :It had a change without the compatibility . Please be careful at the time of the parts ordering. Rev.: 過去に互換性の無い変更が入った部品。部品発注時は注意してください。 No. Part No. Part Name Q’ty Remarks Rev. Rank Level 1 KL Y -M7T A3-…
KLG-1608
Rev. :It had a change without the compatibility. Please be careful at the time of the parts ordering.
Rev.: 過去に互換性の無い変更が入った部品。部品発注時は注意してください。
No. Part No. Part Name Q’ty Remarks Rev. Rank Level
1 KLY-M7TA3-00 VALVE PANEL ASSY. 1 /
Í
2 KLY-M7T31-00 BRKT.,VALVE 2 /
Í
3 KLY-M7T32-00 COVER,VALVE 2 /
Í
4 KLY-M7TVA-00 VALVE,ASSY. 1 B
Í
5 KGS-M5184-10 SEAL,EARTH 1 4 /
Í
6 KLY-M7TB3-00 VALVE PANEL ASSY. 1 /
Í
7 KLY-M7TVB-00 VALVE,ASSY. 1 B
Í
8 91312-03006 BOLT,HEX.SOCKET HEAD 8
9 91312-03012 BOLT,HEX.SOCKET HEAD 4
10 97602-04306 SCREW,PAN HEAD W/W 6
11 91312-04010 BOLT,HEX.SOCKET HEAD 4
12 $CTAM1 ANCHOR MOUNT 6
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No. Part No. Part Name Q’ty Remarks Rev. Rank Level
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16
1
Valve Panel Assy
Wafer Traverser
