V4_MPL.pdf - 第11页
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V4 Maintenance Parts List
5.XY-Axis
NO. CODE PARTS NAME REMARK
1 LC5-M25A2-A00 XY STAGE,L1 L1 Head
2 LC5-M25A2-E00 XY STAGE,L2 L2 Head
3 LC5-M25A2-F00 XY STAGE,L3 L3 Head
4 LC5-M25A2-H00 XY STAGE,L4 L4 Head
5 LC5-M25A2-J00 XY STAGE,R1 R1 Head
6 LC5-M25A2-K00 XY STAGE,R2 R2 Head
7 LC5-M25A2-L00 XY STAGE,R3 R3 Head
8 LC5-M25A2-M00 XY STAGE,R4 R4 Head
9 LC5-M25E1-A10 XY STAGE,L1 L1 Head for 350N・180N
10 LC5-M25E1-B10 XY STAGE,L2 L2 Head for 350N・180N
11 LC5-M25E1-C10 XY STAGE,L3 L3 Head for 350N・180N
12 LC5-M25E1-D10 XY STAGE,L4 L4 Head for 350N・180N
13 LC5-M25E1-E10 XY STAGE,R1 R1 Head for 350N・180N
14 LC5-M25E1-F10 XY STAGE,R2 R2 Head for 350N・180N
15 LC5-M25E1-G10 XY STAGE,R3 R3 Head for 350N・180N
16 LC5-M25E1-H10 XY STAGE,R4 R4 Head for 350N・180N
B:20100416
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5.XY-Axis
V4 Maintenance Parts List
6.Z-Axis
NO. CODE PARTS NAME REMARK
1 LC5-M2611-000 GUIDE,Z-AXIS
2 LC5-M26A2-000 CABLE DUCT
3 LC5-M488G-010 AC SERVO Z-MOTOR L1 Z Motor
4 LC5-M488G-110 AC SERVO Z-MOTOR L2 Z Motor
5 LC5-M488G-210 AC SERVO Z-MOTOR L3 Z Motor
6 LC5-M488G-310 AC SERVO Z-MOTOR L4 Z Motor
7 LC5-M488G-410 AC SERVO Z-MOTOR R1 Z Motor
8 LC5-M488G-510 AC SERVO Z-MOTOR R2 Z Motor
9 LC5-M488G-610 AC SERVO Z-MOTOR R3 Z Motor
10 LC5-M488G-710 AC SERVO Z-MOTOR R4 Z Motor
11 LC5-M26K1-001 SENSOR,ASSY L1 Z Origin Sensor
12 LC5-M26K1-101 SENSOR,ASSY L2 Z Origin Sensor
13 LC5-M26K1-201 SENSOR,ASSY L3 Z Origin Sensor
14 LC5-M26K1-301 SENSOR,ASSY L4 Z Origin Sensor
15 LC5-M26K1-401 SENSOR,ASSY R1 Z Origin Sensor
16 LC5-M26K1-501 SENSOR,ASSY R2 Z Origin Sensor
17 LC5-M26K1-601 SENSOR,ASSY R3 Z Origin Sensor
18 LC5-M26K1-701 SENSOR,ASSY R4 Z Origin Sensor
B:20100416