V4_MPL.pdf - 第20页
V4 Maintenance Parts List 10.HEAD NO. CODE PARTS NAME REMARK 1 LC4-M28AB-000 E-T REGULATOR Pressure Controll Head 2 LC5-M7CK1-100 VALVE ASSY. L1 QFP Head L1 Valve 3 LC5-M7CK1-200 VALVE ASSY. L2 QFP Head L2 Valve 4 LC5-M7…
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9.TRAY STOCKER
V4 Maintenance Parts List
10.HEAD
NO. CODE PARTS NAME REMARK
1 LC4-M28AB-000 E-T REGULATOR Pressure Controll Head
2 LC5-M7CK1-100 VALVE ASSY. L1 QFP Head L1 Valve
3 LC5-M7CK1-200 VALVE ASSY. L2 QFP Head L2 Valve
4 LC5-M7CK1-300 VALVE ASSY. L3 QFP Head L3 Valve
5 LC5-M7CK1-400 VALVE ASSY. L4 QFP Head L4 Valve
6 LC5-M7CK1-500 VALVE ASSY. R1 QFP Head R1 Valve
7 LC5-M7CK1-600 VALVE ASSY. R2 QFP Head R2 Valve
8 LC5-M7CK1-700 VALVE ASSY. R3 QFP Head R3 Valve
9 LC5-M7CK1-800 VALVE ASSY. R4 QFP Head R4 Valve
10 LC5-M7BK1-100 SENSOR,L1 Press&QFP Head L1 Nozzle UP
11 LC5-M7BK1-200 SENSOR,L2 Press&QFP Head L2 Nozzle UP
12 LC5-M7BK1-300 SENSOR,L3 Press&QFP Head L3 Nozzle UP
13 LC5-M7BK1-400 SENSOR,L4 Press&QFP Head L4 Nozzle UP
14 LC5-M7BK1-500 SENSOR,R1 Press&QFP Head R1 Nozzle UP
15 LC5-M7BK1-600 SENSOR,R2 Press&QFP Head R2 Nozzle UP
16 LC5-M7BK1-700 SENSOR,R3 Press&QFP Head R3 Nozzle UP
17 LC5-M7BK1-800 SENSOR,R4 Press&QFP Head R4 Nozzle UP
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Press Control Type
QFP Type
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10.HEAD