V4_MPL.pdf - 第18页
V4 Maintenance Parts List 9.TRAY STOCKER NO. CODE PARTS NAME REMARK 1 LC5-M31K1-101 SENSOR ASSY.O Stocker1 Hook OPEN 2 LC5-M31K2-101 SENSOR ASSY.C Stocker1 Hook CLOSE 3 LC5-M31K3-103 SENSOR ASSY.FULL Stockre1 Tray FULL 4…
A
1
2
3
4
5
7
8
12
19
20
21
22
23
13
14
15
16
17
18
6
9
10
11
24
8.TRAY TRANSFER
V4 Maintenance Parts List
9.TRAY STOCKER
NO. CODE PARTS NAME REMARK
1 LC5-M31K1-101 SENSOR ASSY.O Stocker1 Hook OPEN
2 LC5-M31K2-101 SENSOR ASSY.C Stocker1 Hook CLOSE
3 LC5-M31K3-103 SENSOR ASSY.FULL Stockre1 Tray FULL
4 LC5-M31KA-101 VALVE ASSY. Stocker1 Hook Valve
5 LC5-M31K1-201 SENSOR ASSY.O Stocker2 Hook OPEN
6 LC5-M31K2-201 SENSOR ASSY.C Stocker2 Hook CLOSE
7 LC5-M31K3-203 SENSOR ASSY.FULL Stockre2 Tray FULL
8 LC5-M31KA-201 VALVE ASSY. Stocker2 Hook Valve
9 LC5-M31K1-301 SENSOR ASSY.O Stocker3 Hook OPEN
10 LC5-M31K2-301 SENSOR ASSY.C Stocker3 Hook CLOSE
11 LC5-M31K3-303 SENSOR ASSY.FULL Stockre3 Tray FULL
12 LC5-M31KA-301 VALVE ASSY. Stocker3 Hook Valve
13 LC5-M31K1-401 SENSOR ASSY.O Stocker4 Hook OPEN
14 LC5-M31K2-401 SENSOR ASSY.C Stocker4 Hook CLOSE
15 LC5-M31K3-403 SENSOR ASSY.FULL Stockre4 Tray FULL
16 LC5-M31KA-401 VALVE ASSY. Stocker4 Hook Valve
17 LC5-M31K1-501 SENSOR ASSY.O Stocker5 Hook OPEN
18 LC5-M31K2-501 SENSOR ASSY.C Stocker5 Hook CLOSE
19 LC5-M31K3-503 SENSOR ASSY.FULL Stockre5 Tray FULL
20 LC5-M31KA-501 VALVE ASSY. Stocker5 Hook Valve
21 LC5-M31K1-601 SENSOR ASSY.O Stocker6 Hook OPEN
22 LC5-M31K2-601 SENSOR ASSY.C Stocker6 Hook CLOSE
23 LC5-M31K3-603 SENSOR ASSY.FULL Stockre6 Tray FULL
24 LC5-M31KA-601 VALVE ASSY. Stocker6 Hook Valve
25 LC5-M31K1-701 SENSOR ASSY.O Stocker7 Hook OPEN
26 LC5-M31K2-701 SENSOR ASSY.C Stocker7 Hook CLOSE
27 LC5-M31K3-703 SENSOR ASSY.FULL Stockre7 Tray FULL
28 LC5-M31KA-701 VALVE ASSY. Stocker7 Hook Valve
B:20100416
A
1
2
4
3
9.TRAY STOCKER