Mechanical Parts List.pdf - 第138页

ﾌﾟﾘﾝﾄ基板搬送部(1) P.C.B. TRANSFE R SECT.( 1) 14 FN610060945AA_01-1 M121

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PART No.
ｲﾗｽﾄ
No.
REF
No.
　　　
　　　　　　　　　 PART NAME
　　　　 REMARKS　
Q'TY
13
ﾘｰﾄﾞ屑ｹｰｽﾕﾆｯﾄ
DUST BOX UNIT
部 品 名 品　 番 個数 備 考
R
1
R
2
1 N610083081AA
DUST BOX UNIT ﾘｰﾄﾞｸｽﾞｹｰｽﾕﾆｯﾄ
1
001 N210107394AA
HOSE UNION ﾎｰｽﾕﾆｵﾝ
1
A001
N610070306AA
DUST BOX UNIT ﾘｰﾄﾞｸｽﾞｹｰｽﾕﾆｯﾄ
DAT-100S S
1
N001
N452DAT1-144
VACUUM PUMP ｼﾝｸｳﾎﾟﾝﾌﾟ
AKH12B-03S
1
N002
N510035100AA
VALVE ﾊﾞﾙﾌﾞ
KQ2L12-99
1
N003
KXF0DZJ4A00
FITTING ﾂｷﾞﾃ
KQ2L12-03S
1
N004
KXF0DZJAA00
FITTING ﾂｷﾞﾃ
TU1208W-20
1
N006
KXF0DXNQA00
TUBE ﾁｭｰﾌﾞ
87MSWT13
1
N009
N510040734AA
PLUG ﾌﾟﾗｸﾞ
TS-15
1
N010
N434TS15
HOSE ﾎｰｽ
FS-25
2
N011
N462FS25
BAND ﾎｰｽﾊﾞﾝﾄﾞ
00532
2V 1 N45200532
BEARING ﾍﾞｱﾘﾝｸﾞ
00469
2
V 2 N45200469
DIAPHRAGM ﾀﾞｲﾔﾌﾗﾑ
00325
3
V 3 N45200325
FILTER ﾌｨﾙﾀ
00349
2V 4 N45200349
GASKET ｶﾞｽｹｯﾄ
00837
6V 5 N45200837
VALVE ﾊﾞﾙﾌﾞ
M120
FN610083081AA_02
ﾌﾟﾘﾝﾄ基板搬送部(1)
P.C.B. TRANSFER SECT.(1)
14
FN610060945AA_01-1
M121
PART No.
ｲﾗｽﾄ
No.
REF
No.
　　　
　　　　　　　　　 PART NAME
　　　　 REMARKS　
Q'TY
14
ﾌﾟﾘﾝﾄ基板搬送部(1)
P.C.B. TRANSFER SECT.(1)
部 品 名 品　 番 個数 備 考
R
1
R
2
1 N610060945AA
P.C. BOARD TRANSFER UNIT ﾌﾟﾘﾝﾄｷﾊﾞﾝﾊﾝｿｳﾕﾆｯﾄ
1
001 1022406534
PULLEY(TIMING) ﾌﾟｰﾘｰ(ﾀｲﾐﾝｸﾞ)
1
002 104140600201
PIN ﾋﾟﾝ
1003 N210072140AA
SHAFT ｼｬﾌﾄ
1004 104140600401
COLLAR ｶﾗｰ
1
005 104140602501
PLATE ﾌﾟﾚｰﾄ
1
012 1046906012
PLATE ﾌﾟﾚｰﾄ
1015 N210081327AA
BRACKET ﾌﾞﾗｹｯﾄ
1018 N210080167AA
PLATE ﾌﾟﾚｰﾄ
1
020 N210066239AA
SPACER ｽﾍﾟｰｻ
CDQ2B20-20DC-A73
1
N001
N401CDQ2-418
CYLINDER ｼﾘﾝﾀﾞ
FUN-008-SS
1
N002
N510022896AA
NUT ﾅｯﾄ
698ZZ
2
N003
XLC698ZZ
BALL BEARING ﾎﾞｰﾙﾍﾞｱﾘﾝｸﾞ
RB0806
1
N004
KXF08N7AA00
SHOCK-ABSORBER ｼｮｯｸｱﾌﾞｿｰﾊﾞｰ
P914S1
3
N006
N310P914S1
SENSOR ｾﾝｻ
6902ZZ
1
N010
XLC6902ZZ
BALL BEARING ﾎﾞｰﾙﾍﾞｱﾘﾝｸﾞ
M5X60-10.9 A2J (Trival
1
N011
N510017413AA
HEX. SOCKET HEAD CAP BOLT ﾛｯｶｸｱﾅﾂｷﾎﾞﾙﾄ
M5X20-45H A2J (Trivale
1
N013
N510022987AA
HEX. SOCKET SET SCREW ﾛｯｶｸｱﾅﾂｷﾄﾒﾈｼﾞ
M5-6H-4T A2J (Trivalen
1
N014
N510017862AA
HEXAGON NUT ﾛｯｶｸﾅｯﾄ
KQ2H06-M5
2
N015
KXF0A3QAA00
FITTING ﾂｷﾞﾃ
R4X0.5
2
N016
KXF089MAA00
RING ﾘﾝｸﾞ
2350-EV5GT-15
1
N017
N510027678AA
BELT ﾍﾞﾙﾄ
D-A73
1V 1 N401DA73
SENSOR ｾﾝｻ
M122
FN610060945AA_01-1