SP-0088-001.pdf - 第9页
Fig. E1 1003-001 Fig. E1-4 C D 373 386 366 372 381 384 385 364 371 364 363 386 380 384 385 365 362 374
D
C
(BASE:Document No.P-309-00X or P-310-00X
UNIT-4 Fig.E1-4)
C
D
373
368
366
372
381
384
385
364
371
364
363
386
380
384
385
365
362
374
Fig. E1-4 X
ビームユニット
X Beam Unit
1003-001
Fig. E1
バッドマーク検出（センサ方式）
BAD BOARD REJECT FUNCTION
Fig. E1
1003-001
Fig. E1-4
C
D
373
386
366
372
381
384
385
364
371
364
363
386
380
384
385
365
362
374
Key No. PART No. PART NAME Q’ty
REMARKS
NOTE
362 0978B104 PLATE 1 3097800206-002
363 0914DAAC Bkt_Badmark1 1 3097800206-003
364 0978B106 SENSOR 1 3097800206-004
365 221AA013 BOLT_HEX-SCT 2 3097800206-005
366 0916D209 ACCESS_WIRING 1 3097800206-006
371 23G00167 SENSOR_PELEC 1 3097800201-001
372 0914DAA5 CONNECTOR 2 3097800201-002
373 23N20103 TUBE_WIRING 2 3097800201-003
374 23G00168 SENSOR_PELEC 1 3097800201-004
380 221AA020 ROHS_HEX-SCT 2 1097800200-010
381 221AA015 ROHS_HEX-SCT 2 1097800200-011
384 221HA104 WASHER 4 1097800200-014
385 221HA004 WASHER 4 1097800200-015
386 0916D209 ACCESS_WIRING 30 1097800200-016
Fig. E1-4
Fig. E1
1003-001
GS-IB100