00900068-02_SM_ASM_ProcessLens_EN.pdf - 第80页
ASM Proces sLens Single - l ane 03/2020 Edit ion 80 Magnified side v iew of the height t arget. The target is a rais ed disc against a f lat substrate. Certified glass hei ght tar get in f ixture. Teach an d Verify Seq u…
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4.5 Calibrations – FOV Height Calibration
What is FOV Height Calibration?
This procedure is a Type 1 Gauge study to determine the ProcessLens as a measurement system
is capable of measuring parts consistently and accurately.
What is Cg & Cgk?
Cg compares the known tolerance with measurement variation, while Cgk compares the known
tolerance with both measurement variation and bias. Large Cg and Cgk indicate the variation due
to the measurement system is small compared with the tolerance range. A typical threshold for
both these values is 1.33 (i.e. the ProcessLens performance is acceptable only if the Cg and Cgk
exceeds 1.33).
Target Height Reference
The target height reference serves as a point of comparison in the study. It is determined by
averaging multiple measurements by the ProcessLens against the target that was measured with
measuring equipment of higher level of accuracy and precision (the "golden unit" of reference)..
Ideally, the height measured should be close to the center of the height's tolerance zone.
● The target is a Diameter 2mm cylindrical disc of nominal design height 120±6µm.
● Refer to the certificate that comes with the target for the certified height.
Handling Caution
● Fragile! Handle with care. The target is made from high precision ceramic.
● Touching the target will contaminate the target with debris (sebum oil and human skin) which
will severely distort measurements.
Target Information:
Mechanical feature
Dimension
Mechanic
al feature
Dimension
Fixture overall length
155mm
Target shape
Circle
Fixture overall width
122mm
Target diameter
2mm
Fixture edge thickness
4mm
Target thickness
123
µm (in the range of
120
µm)
Target area (standard)
4mm x 4mm
CAUTION
DO NOT TOUCH THE TARGET.
Maintain the target area free from dirt and contamination.
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Magnified side view of the height target.
The target is a raised disc against a flat
substrate.
Certified glass height target in fixture.
Teach and Verify Sequences:
The camera moves over the target and captures the target at 9 different positions of the FOV (Field
of View). In each FOV position, the camera measures the Golden target 50 times to determine the
average value, calibrate the height measurements across the FOV, and determine the repeatability
for each position.
Before running this calibration it is assumed:
● The 2D and 3D calibration procedure is performed again. See calibration flow.
● Correct top.dev file is installed.
Run times:
The calibration run will take approximately 18 minutes
● The verification run will take approximately 15 minutes
Step 1
Check the data correctness of the top.dev file. The top.dev file is a configuration file that
contains the details of the calibration target mechanical dimensions.
Each manufactured glass target comes with a certificate and a top.dev file of that glass target.
The nominal design height of the target is 120µm, but can vary by a few microns due to
manufacturing
Copy the top.dev file to:
C:\wineagle\system\Calibration\DataFile\01-D10373(SPI)\
GoldenUnitCompensate
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Refer to the target height certificate:
● The serial number of the target must match the serial number stated on the certificate.
● The Expect Height variable in the top.dev file must be equal to the height of the target stated in
the certificate.