M20_LE6_R03-cwd.pdf - 第22页
Confidential & P roprietary P A GE 3 2 1 4 GND GND VACUUM BREAK1 VACUUM1 R BK YV1 5 6 7 8 GND GND VACUUM2 VACUUM BREAK2 R BK YV2 9 R BK 10 11 12 R BK R BK R BK BL BR BK PAD16pi n 3 2 1 24V GND HEAD1 PRESS BL BR BK 3 …
Confidential & Proprietary
PAGE
P3
SQ9
SQ10
1
2
3
4
5
6
PA6pin
24V
24V
BL
BR
BK
BL
BR
BK
X OT-
X OT+
EE-SX911P-R
EE-SX911P-R
EE-SX911P-R
GND
GND
12
11
10
9
8
7
6
5
4
3
2
1
PAD12pin
24V
24V
24V
24V
Z1 OT+
Z2 OT+
Z3 OT+
Z4 OT+
GND
GND
GND
GND
4
3
2
1
24V
24V
GND
GND
Z5 OT+
Z6 OT+
PAD6pin
X20
X19
X18
5
6
1
2
3
PA6pin
24V
BK
R
YL
FAN1 LOCK
FAN12
GND
□80-T25
X2
4
5
6
24V
FAN2 LOCK
GND
3
2
1
4
5
6
7
8
9
10
PAD10pin
GND
GND
GND
GND
24V
24V
RESERVE
X3
P3
SQ5
SQ6
SQ7
SQ8
BL
BR
BK
BL
BR
BK
BL
BR
BK
BL
BR
BK
EE-SX911P-R
EE-SX911P-R
EE-SX911P-R
EE-SX911P-R
XiO.Hi11 Rev.B XiO.Hi11 Rev.B
M71H6-03x
LC2-M654R-00x
LC2-M654R-00x
LC2-M654R-00x
LC2-M654R-00x
LC2-M654R-00x
LC2-M654R-00x
LE6-M6548-00x
M65E9-00x
M65A4-00x
M65EA-00x
M71H6-03x
LC2-M654R-00x
RESERVE_DI0
RESERVE_DI1
RESERVE_DO0
RESERVE_DO1
CN3.
18
Hi(5) 4Z-4T
M20
Confidential & Proprietary
PAGE
3
2
1
4
GND
GND
VACUUM BREAK1
VACUUM1
R
BK
YV1
5
6
7
8
GND
GND
VACUUM2
VACUUM BREAK2
R
BK
YV2
9 R
BK
10
11
12
R
BK
R
BK
R
BK
BL
BR
BK
PAD16pin
3
2
1
24V
GND
HEAD1 PRESS
BL
BR
BK
3
2
1
24V
GND
BL
BR
BK
3
2
1
24V
GND
HEAD2 PRESS
HEAD3 PRESS
GND
GND
VACUUM3
VACUUM BREAK3
PAD16pin
PAD16pin
PA3pin
PA3pin
PA3pin
YV3
X10
X11
X12
X7
X7
X7
P3
GND
GND
R
BK
13
14
15
16
YV4
VACUUM4
VACUUM BREAK4
R
BK
BL
BR
BK
PAD16pin
3
2
1
24V
GND
HEAD4 PRESS
PA3pin
X13
GND
GND
3
2
1
24V
GND
PA3pin
GND
GND
3
2
1
24V
GND
PA3pin
X14
X15
X8
X8
HEAD5 PRESS
VACUUM5
VACUUM BREAK5
HEAD6 PRESS
VACUUM BREAK6
VACUUM6
1
2
3
4
5
6
7
8
X7
PAD10pin
9
10
-
-
PAD10pin
P3
XiO.Hi11 Rev.B XiO.Hi11 Rev.B
M71H6-03x
M71A2-00x
M71A2-00x
M71A2-00x
M71H6-03x
M66X4-00x
M66X4-00x
M71A2-00x
M65H8-00x M65H8-00x
CN3.
19
Hi(6) 4Z-4T
M20
Confidential & Proprietary
PAGE
P3
SQ9
SQ10
1
2
3
4
5
6
PA6pin
24V
24V
BL
BR
BK
BL
BR
BK
X OT-
X OT+
EE-SX911P-R
EE-SX911P-R
EE-SX911P-R
GND
GND
12
11
10
9
8
7
6
5
4
3
2
1
PAD12pin
24V
24V
24V
24V
Z1 OT+
Z2 OT+
Z3 OT+
Z4 OT+
GND
GND
GND
GND
4
3
2
1
24V
24V
GND
GND
Z5 OT+
Z6 OT+
PAD6pin
X20
X19
X18
5
6
1
2
3
PA6pin
24V
BK
R
YL
FAN1 LOCK
FAN12
GND
□80-T25
X2
4
5
6
24V
FAN2 LOCK
GND
3
2
1
4
5
6
7
8
9
10
PAD10pin
GND
GND
GND
GND
24V
24V
RESERVE
X3
P3
SQ5
SQ6
SQ7
SQ8
BL
BR
BK
BL
BR
BK
BL
BR
BK
BL
BR
BK
EE-SX911P-R
EE-SX911P-R
EE-SX911P-R
EE-SX911P-R
BL
BR
BK
EE-SX911P-R
BL
BR
BK
EE-SX911P-R
SQ13
SQ14
XiO.Hi11 Rev.B XiO.Hi11 Rev.B
M71H6-03x
M65EA-10x
LC2-M654R-00x
LC2-M654R-00x
LC2-M654R-00x
LC2-M654R-00x
M65EA-20x
LC2-M654R-00x
LC2-M654R-00x
M65A4-00x
M71H6-03x
M65E9-00x
LC2-M654R-00x
LC2-M654R-00x
LE6-M6548-00x
RESERVE_DI0
RESERVE_DI1
RESERVE_DO0
RESERVE_DO1
CN3.
20
Hi(7) 6Z-2T
M20