1G4C-E-MP1-4.pdf - 第10页

Ref No. Remarks R 1 Q't y 㪈㪈㪄㪜 䊙䉴䉪䉪䊥䊷䊆䊮䉫䊡䊆䉾䊃㩿㪣㪀 Mask Cleaning Unit(L) 䍐䍵䍛䍢 㪥㫆㪅 Part No. ຠ䇭䇭ฬ ຠ⇟ ᢙ㊂ R 2 䊌䊷䉿䊥䉴䊃 Kit No . 䉨䉾䊃ຠ ⇟ Kit Name 䉨䉾䊃ฬ⒓ KXFX03BUA00 Part N ame ஻䇭䇭䇭⠨ 䍜䍖䍚䍌䍻㪥㫆㪅 PARTS LIST Section No. R 3 HOUSING 1…

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㪈㪈㪄㪜
䊙䉴䉪䉪䊥䊷䊆䊮䉫䊡䊆䉾䊃㩿㪣㪀
Mask Cleaning Unit(L)
䊌䊷䉿䊧䉟䉝䉡䊃
Kit N
o
.
䉨䉾䊃ຠ
⇟
Kit Name
䉨䉾䊃ฬ⒓
KXFX03BUA00
䍜䍖䍚䍌䍻㪥㫆㪅
PARTS LAYOUT
Section No.
M83
--:(:$7#
Ref
No.
Remarks
R
1
Q't
y
㪈㪈㪄㪜
䊙䉴䉪䉪䊥䊷䊆䊮䉫䊡䊆䉾䊃㩿㪣㪀
Mask Cleaning Unit(L)
䍐䍵䍛䍢
㪥㫆㪅
Part No.
ຠ䇭䇭ฬຠ⇟ ᢙ㊂
R
2
䊌䊷䉿䊥䉴䊃
Kit No.
䉨䉾䊃ຠ
⇟
Kit Name
䉨䉾䊃ฬ⒓
KXFX03BUA00
Part Name
஻䇭䇭䇭⠨
䍜䍖䍚䍌䍻㪥㫆㪅
PARTS LIST
Section No.
R
3
HOUSING
1
1 KXFB038CA00
MANIFOLD
1
2 N210002141AA
BRACKET
1
3 N210019803AA
BRACKET
1
4 KXFB024JA00
BRACKET
1
5 N210059540AA
BRACKET
1
6 KXFB00LRA00
PW004A0
2
7 KXFB01CCA00
PUMP
1
8 KXF0DY17A00 PB1013-01-X18(DDA)
JOINT
3
9 KXF02BPAA00 KQL04-01S
TANK
1
10 N610010652AA
C-RING
1
11 KXF07ZFAA00 STW-32
TUBE
1
12 KXF0DWU4A00 PN-4-10X6.5 milk-white
FILTER
1
13 N510001105AA UY3/8(mesh40)
BUSH
1
14 KXF0DXZNA00 No.386 M-3/8X1/8 SUS
VALVE
1
15 KXF0E0KWA00 USG3-X0891(DDA)
SILENCER
1
16 KXF00W9AA00 AN103-01
NIPPLE
2
17 N510019610AA No.507 21X3/4 SUS
HOSE
1
18 KXF0DWU6A00 Duct EE-type D50
HOSE-BAND
2
19 KXF05QVAA00 ABA band 19-28
FILTER
1
20 N510024186AA
A
VFY036A
VALVE
2
21 KXF0E0KSA00 ADK11-25X2732(DDA)
NIPPLE
2
22 N510020198AA V6N-10
JOINT
1
23 N510020199AA VT-10
NIPPLE
2
24 N510020200AA VRN-1008
JOINT
3
25 KXF05HJAA00 KQH08-02S
PLUG
3
26 KXF02CSAA00 KQP-08
TUBE
1
27 KXF0DX38A00 Chemi-flex inner diameter D19
NIPPLE
1
28 KXF0DXJCA00 No.404 1 1/4X34
HOSE
1
29 N510005275AA TAC D32
BAND
2
30 KXF0DZHTA00 VE36
BAND
2
31 KXF0DWUAA00 VE54
JOINT
3
32 KXF0977AA00 CPS15M-8B
JOINT
3
33 KXF09Y3AA00 CPP15-8B
SENSOR
1
34 KXF078BAA00 GT7SN
PLATE
2
35 KXF05EMAA00 GP5-1
BUSH
1
36 N510020201AA (Bu)1X3/4
BUSH
1
37 N510020202AA VBU-1610
NIPPLE
1
38 N510020203AA VRN-1608
JOINT
1
39 N510020204AA (SL)3/4
FILTER
1
40 N510024187AA
A
VFY036A-E
SOCKET
3
41 KXF0DX37A01 (DA KXF0DX37A01)
BAND
3
42 N510019612AA AS-60
M84
--:(:$7#
㪈㪉
ၮ
᧼
਄᛼䈋䊡䊆䉾䊃㩿㪣㪀
Board Flattening Unit(L)
䊌䊷䉿䊧䉟䉝䉡䊃
Kit N
o
.
䉨䉾䊃ຠ
⇟
Kit Name
䉨䉾䊃ฬ⒓
KXFX03BVA00
䍜䍖䍚䍌䍻㪥㫆㪅
PARTS LAYOUT
Section No.
M85
--:(:$8#