1G4C-E-MP1-4.pdf - 第4页

Ref No. Remark s R 1 Q'ty 㪈㪈㪄㪙 䊙䉴䉪䉪䊥䊷䊆䊮䉫 䊡䊆䉾䊃 㩿㪣㪀 M ask C lea nin g Un it(L ) 䍐䍵䍛䍢 㪥㫆㪅 Part No. ຠ䇭䇭ฬ ຠ⇟ ᢙ㊂ R 2 䊌䊷䉿䊥䉴䊃 Kit N o . 䉨䉾䊃ຠ ⇟ Kit Name 䉨䉾䊃ฬ⒓ KXFX03BUA00 Part Name ஻䇭䇭䇭⠨ 䍜䍖䍚䍌䍻㪥㫆㪅 PARTS LIST Section No. R 3 S…

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㪈㪈㪄㪙
䊙䉴䉪䉪䊥䊷䊆䊮䉫䊡䊆䉾䊃㩿㪣㪀
Mask Cleaning Unit(L)
䊌䊷䉿䊧䉟䉝䉡䊃
Kit N
o
.
䉨䉾䊃ຠ
⇟
Kit Name
䉨䉾䊃ฬ⒓
KXFX03BUA00
䍜䍖䍚䍌䍻㪥㫆㪅
PARTS LAYOUT
Section No.
M77
--:(:$7#
Ref
No.
Remarks
R
1
Q'ty
㪈㪈㪄㪙
䊙䉴䉪䉪䊥䊷䊆䊮䉫䊡䊆䉾䊃㩿㪣㪀
Mask Cleaning Unit(L)
䍐䍵䍛䍢
㪥㫆㪅
Part No.
ຠ䇭䇭ฬຠ⇟ ᢙ㊂
R
2
䊌䊷䉿䊥䉴䊃
Kit N
o
.
䉨䉾䊃ຠ
⇟
Kit Name
䉨䉾䊃ฬ⒓
KXFX03BUA00
Part Name
஻䇭䇭䇭⠨
䍜䍖䍚䍌䍻㪥㫆㪅
PARTS LIST
Section No.
R
3
SHAFT
1
2 KXFB034HA02
COLLAR
1
3 KXFB00B2A00
KEY
1
4 KXFB00B0A00
PULLEY
1
5 KXFB00AZA00
PLATE
1
6 KXFB034JA00
FLANGE
1
7 KXFB034KA01
SHAFT
2
9 KXFB08YSB00
HOLDER
2
15 KXFB0357A01
HOLDER
2
16 KXFB0359A00
ROD
2
17 KXFB08YYA01
CLICK
4
18 N210028532AA
PIN
8
19 KXFB035DA00
FLANGE
2
20 KXFB035HB00
SHAFT
2
22 KXFB03XVB00
COLLAR
2
23 KXFB03XWB00
BEARING
1
37 KXF03FYAA00 SFB34-8
BRAKE
1
38 KXF09T0AA00 SBR-62-10
SCREW
5
39 XXE5D10FT
Hexagon socket set screw Cup point M5X10-45H SOB
PIN
4
40 KXF02YFAA00 MS5-10
COLLAR
4
41 KXF0DWTQA00 NCLB5-12-16.5
SPRING
2
42 KXF0E1M9A00 5440
PIN
2
47 KXF086LAA00 MS3-6
PAPER
2
49 KXFP6HGVA00
A
TS-100 D100X530W
BOLT
8
52 N510017630AA
Hexagon socket Flat head bolt M5X12-10.9 A2J (Trivalent)
FLANGE
2
53 KXFB0ATRA00
M78
--:(:$7#
㪈㪈㪄㪚
䊙䉴䉪䉪䊥䊷䊆䊮䉫䊡䊆䉾䊃㩿㪣㪀
Mask Cleaning Unit(L)
䊌䊷䉿䊧䉟䉝䉡䊃
Kit N
o
.
䉨䉾䊃ຠ
⇟
Kit Name
䉨䉾䊃ฬ⒓
KXFX03BUA00
䍜䍖䍚䍌䍻㪥㫆㪅
PARTS LAYOUT
Section No.
M79
--:(:$7#