1G4C-E-MP1-4.pdf - 第5页

㪈㪈㪄㪚 䊙䉴䉪䉪䊥䊷䊆䊮䉫 䊡䊆䉾䊃 㩿㪣㪀 M ask C lea nin g Un it(L ) 䊌䊷䉿䊧䉟䉝䉡䊃 Kit N o . 䉨䉾䊃ຠ ⇟ Kit Na me 䉨䉾䊃ฬ⒓ KXF X03BUA00 䍜䍖䍚䍌䍻㪥㫆㪅 PARTS LAYOUT Section No.   M79 --:(:$7#

100%1 / 26
Ref
No.
Remarks
R
1
Q'ty
㪈㪈㪄㪙
䊙䉴䉪䉪䊥䊷䊆䊮䉫䊡䊆䉾䊃㩿㪣㪀
Mask Cleaning Unit(L)
䍐䍵䍛䍢
㪥㫆㪅
Part No.
ຠ䇭䇭ฬຠ⇟ ᢙ㊂
R
2
䊌䊷䉿䊥䉴䊃
Kit N
o
.
䉨䉾䊃ຠ
⇟
Kit Name
䉨䉾䊃ฬ⒓
KXFX03BUA00
Part Name
஻䇭䇭䇭⠨
䍜䍖䍚䍌䍻㪥㫆㪅
PARTS LIST
Section No.
R
3
SHAFT
1
2 KXFB034HA02
COLLAR
1
3 KXFB00B2A00
KEY
1
4 KXFB00B0A00
PULLEY
1
5 KXFB00AZA00
PLATE
1
6 KXFB034JA00
FLANGE
1
7 KXFB034KA01
SHAFT
2
9 KXFB08YSB00
HOLDER
2
15 KXFB0357A01
HOLDER
2
16 KXFB0359A00
ROD
2
17 KXFB08YYA01
CLICK
4
18 N210028532AA
PIN
8
19 KXFB035DA00
FLANGE
2
20 KXFB035HB00
SHAFT
2
22 KXFB03XVB00
COLLAR
2
23 KXFB03XWB00
BEARING
1
37 KXF03FYAA00 SFB34-8
BRAKE
1
38 KXF09T0AA00 SBR-62-10
SCREW
5
39 XXE5D10FT
Hexagon socket set screw Cup point M5X10-45H SOB
PIN
4
40 KXF02YFAA00 MS5-10
COLLAR
4
41 KXF0DWTQA00 NCLB5-12-16.5
SPRING
2
42 KXF0E1M9A00 5440
PIN
2
47 KXF086LAA00 MS3-6
PAPER
2
49 KXFP6HGVA00
A
TS-100 D100X530W
BOLT
8
52 N510017630AA
Hexagon socket Flat head bolt M5X12-10.9 A2J (Trivalent)
FLANGE
2
53 KXFB0ATRA00
M78
--:(:$7#
㪈㪈㪄㪚
䊙䉴䉪䉪䊥䊷䊆䊮䉫䊡䊆䉾䊃㩿㪣㪀
Mask Cleaning Unit(L)
䊌䊷䉿䊧䉟䉝䉡䊃
Kit N
o
.
䉨䉾䊃ຠ
⇟
Kit Name
䉨䉾䊃ฬ⒓
KXFX03BUA00
䍜䍖䍚䍌䍻㪥㫆㪅
PARTS LAYOUT
Section No.
M79
--:(:$7#
Ref
No.
Remarks
R
1
Q't
y
㪈㪈㪄㪚
䊙䉴䉪䉪䊥䊷䊆䊮䉫䊡䊆䉾䊃㩿㪣㪀
Mask Cleaning Unit(L)
䍐䍵䍛䍢
㪥㫆㪅
Part No.
ຠ䇭䇭ฬຠ⇟ ᢙ㊂
R
2
䊌䊷䉿䊥䉴䊃
Kit No.
䉨䉾䊃ຠ
⇟
Kit Name
䉨䉾䊃ฬ⒓
KXFX03BUA00
Part Name
஻䇭䇭䇭⠨
䍜䍖䍚䍌䍻㪥㫆㪅
PARTS LIST
Section No.
R
3
DUCT
1
1 KXFB08YNA01
PLATE
1
2 KXFB034DC01
PLATE
1
3 N210051270AA
PLATE
1
4 KXFB08YQA02
NOZZLE
1
5 KXFB08YTA01
NOZZLE
1
6 N210001863AA
PLATE
1
7 KXFB035FB00
COLLAR
2
8 KXFB08Z0A01
COVER
1
9 KXFB08Z4A02
BRACKET
1
10 N210044752AB
OIL-SEAL
1
11 KXF0E19NA00 BM 1215 A3
CYLINDER
1
12 KXF0DXCKA00 SSD-L-32-30-T0V-D
SPEED-CONTROLLER
2
13 KXF0DZHSA00 AS2301F-01-04S
PLUNGER
1
14 KXF0E0UDA00 PFSSN5
LINEAR-WAY
2
15 N510019504AA LWLF24C1R80BCSS1E724
PLUG
1
16 KXF0AP5AA00 SP2001
WASHER
1
17 KXF0DYYLA00 FWSSB-D20.0-V8.0-T7.0
SCREW
2
18 N510018419AA
Hexagon socket set screw Flat point M3X3-45H A2J (Trivalent)
SCREW
2
19 N510018257AA
Cross recessed Truss head machine screw M4X10-4.8 A2J (Trivalent)
BOLT
2
20 N510017452AA
Hexagon socket head cap screw M6X65-10.9 A2J (Trivalent)
WASHER
2
21 KXF0B6AAA00 WSSB14-6-3
WASHER
1
22 KXF0CPJAA00 WSSB20-8-3
WASHER
1
23 KXF0AJKAA00 WSSB13-8-3
PIN
2
24 KXF01UYAA00 MS3-8
BOLT
6
25 KXF08P0AA00 Hexagon socket head cap screw M3X25L(SUS)
BOLT
4
26 KXF08RNAA00 Hexagon socket head cap screw M4X16L(SUS)
JOINT
5
27 N510001107AA L4N6X4-PT1/8ST
NOZZLE
1
28 KXFB0ATQA00
M80
--:(:$7#