YXLON-FF20-CT-Product-Brochure.pdf - 第4页
Based on the Yxlon system software Geminy which offers easy , intuitive operation with touch screens and graphical user interface, the FF20 CT / FF20 CT Metrology provide numerous special features. The users benefit from …
The extremely compact high-resolution systems
YXLON FF20 CT and FF20 CT Metrology are designed
for fine to very fine parts like
- Electronic components incl. SMD
- Semiconductor packages
- Products made from new materials or new
manufacturing methods, e.g. additively manufactured
components, fiber-reinforced plastics
- Microsystems (MEMS, MOEMS)
- Medical objects, e.g. cannulas
With comparatively high energy of 190 keV, even larger or
denser parts can be inspected to the finest detail.
Experience a structured
CT inspection workflow
Typical applications for computed tomography are
- Research and development
- Failure analysis
- Process control
- Inspection of small serial productions
- Quality assurance and material analysis
- Assembly checking
- Combined DR (digital radiography) and CT inspection
3D-CT volume of a microchip
with pillar array
Based on the Yxlon system software Geminy which offers
easy, intuitive operation with touch screens and graphical
user interface, the FF20 CT / FF20 CT Metrology provide
numerous special features. The users benefit from
unrivaled image quality, utmost flexibility regarding the
bandwidth of applications, and compact cabinet design.
Various automated functions help to save time. Different
user levels support unskilled operators as well as
experienced experts to achieve optimum results in their
inspection tasks. Health monitor and push messages keep
the user informed about system status and inspection
progress.
A detailed description of the software platform Geminy is
available in a separate brochure.
It’s the inside
that matters
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1 YXLON 190 kV nano-focus transmission tube
- Water-cooled target and coils for quick temperature
balance and highest focal spot stability
- Diamond target for high power
- 4 modes for optimal adjustment of focal spot size
with respect to power
- 150 nm detail detectability (2D image)
- TXI – „True X-ray Intensity“ for long-term stability
2 Granit-based manipulator
- Smallest thermal expansion and high stability of
temperature
- Vibration isolation from the system by active dampers
- High-precision Heidenhain encoder on all axes
- 6 axes for utmost versatility of applications
3 Extremely precise turntable
- Joint development of Yxlon and Heidenhain
- Highly precise angle encoder
- Heavy load possible
- Low-maintenance, no need for compressed air supply
4 Selection of detectors
- Up to 430 mm x 430 mm active area for large field
of view
- CsI scintillator for high local resolution and
high efficiency
- Qualified acc. to ASTM E2597
- Optimized for micro-focus CT applications
5 X-ray warning lamp
6 ESD connections
- Safe static discharge for the work with semiconductor
components
- ESD-proved construction by use of appropriate
materials
7 Integrated, ventilated control cabinet
- Outstanding accessibility for service
- Integrated high-power generator for fast installation
and smallest footprint
8 Vacuum and tube cooling components
- Easy service access
- Vibration isolation from the manipulator
Software platform Geminy
The novel software platform Geminy is the heart of the
computed tomography system FF20 CT. Its great number
of various trajectories provides enormous flexibility regard-
ing part sizes and inspection tasks. Details on Geminy are
described in a separate brochure.
Special system
characteristics
YXLON 190 kV nano-focus transmission tube
SEM (Scanning Electron Microscope) image shows the exact
dimensions of the test pattern 150 nm gap clearly visible in the
x-ray image
bar
1.16 0 n m
gap
150 nm
bar
gap