YXLON-FF20-CT-Product-Brochure.pdf - 第6页
Y X L ON FF 20 CT Me tr ol ogy cylinderform 0.1000 Object: Cylinder 2 Dev: 0.0988 mm Zone: Cylindrical T arget: Actual fit points (Cylinder) Status: Ok MR T ype: None The F F20 C T Metrol og y ad ditio nall y of fers the …
1 YXLON 190 kV nano-focus transmission tube
- Water-cooled target and coils for quick temperature
balance and highest focal spot stability
- Diamond target for high power
- 4 modes for optimal adjustment of focal spot size
with respect to power
- 150 nm detail detectability (2D image)
- TXI – „True X-ray Intensity“ for long-term stability
2 Granit-based manipulator
- Smallest thermal expansion and high stability of
temperature
- Vibration isolation from the system by active dampers
- High-precision Heidenhain encoder on all axes
- 6 axes for utmost versatility of applications
3 Extremely precise turntable
- Joint development of Yxlon and Heidenhain
- Highly precise angle encoder
- Heavy load possible
- Low-maintenance, no need for compressed air supply
4 Selection of detectors
- Up to 430 mm x 430 mm active area for large field
of view
- CsI scintillator for high local resolution and
high efficiency
- Qualified acc. to ASTM E2597
- Optimized for micro-focus CT applications
5 X-ray warning lamp
6 ESD connections
- Safe static discharge for the work with semiconductor
components
- ESD-proved construction by use of appropriate
materials
7 Integrated, ventilated control cabinet
- Outstanding accessibility for service
- Integrated high-power generator for fast installation
and smallest footprint
8 Vacuum and tube cooling components
- Easy service access
- Vibration isolation from the manipulator
Software platform Geminy
The novel software platform Geminy is the heart of the
computed tomography system FF20 CT. Its great number
of various trajectories provides enormous flexibility regard-
ing part sizes and inspection tasks. Details on Geminy are
described in a separate brochure.
Special system
characteristics
YXLON 190 kV nano-focus transmission tube
SEM (Scanning Electron Microscope) image shows the exact
dimensions of the test pattern 150 nm gap clearly visible in the
x-ray image
bar
1.16 0 n m
gap
150 nm
bar
gap
YXLON FF20 CT Metrology
cylinderform
0.1000
Object: Cylinder 2
Dev: 0.0988 mm
Zone: Cylindrical
Target: Actual fit points (Cylinder)
Status: Ok
MR Type: None
The FF20 CT Metrology additionally offers
the following features:
Stabilization of interior temperature
- Smart fan control depending on door and detector
position
- Separate heat exchanger which can be placed outside
the measuring room
- Temperature range acc. to measuring quality class 3
defined by VDI 2627
- Display of readiness for measurement and fulfillment of
temperature requirements in the health monitor
Ruby Gauge
- Execution of five different SD measurements in seven
directions following VDI/VDE 2630 – sheet 1.3
- Automatic measuring process of the maximal
SD deviation incl. test report
- Convenient access to the history of SD measurements
for further analysis
Strengths of YXLON FF20 CT Metrology
- Non-destructive measurement of finest inner structures
- Capture of nearly unlimited measuring points in one
CT scan decoupled from the measurement evaluation
- Considerable time savings due to seamless defect
analysis and nominal-actual comparison
- Reduced correction loops and correction costs for
product samplings
- Conformity with standard VDI/ VDE 2630
YXLON FF20 CT Metrology
for accurate measurements of inner structures
Check out these facts
Manipulation/Inspection Part
FDD (Focus Detector Distance)
4)
~ 190 mm – 790 mm
FOD (Focus Object Distance)
4)
~ 0 – 575 mm
Loading door motorized
Maximum part weight
5)
17 kg
Maximum part size
6)
~ 280 mm Ø x 700 mm height
4) Values are average. Exact values depend on detector configuration.
5) Inspection item placed centrally on turntable, otherwise 5 kg.
6) Max. size which can be set by manual collision protection envelope.
CT - Trajectories and Scan Fields
Circular scan trajectories continuous rotation ”QuickScan“
start/stop scan ”QualityScan“
Helical scan trajectories standard ”HeliExtend”
dual ”HeliExtend Dual”
Scan extension 1.8 times horizontal extension,
vertical extension,
combination of above
Further trajectories virtual rotation axis „FlexCenter“
CT field of view, std. circular scan
7)
~ 280 mm Ø x 220 mm height
CT field of view, maximum
7,8)
~ 280 mm Ø x 430 mm height
7) Values valid for detector YXLON Panel 4343, collision protected, optimized for diameter
8) Standard cone beam scan with vertical field-of-view extension
YXLON FF20 CT
Tube Y.FXT 190.61 transmission tube Detector (recommended) YXLON Panel 4343 CT
3)
Maximum energy 190 kV Active area 432 mm x 432 mm
Maximum power 80 W Pixel pitch 150 µm
Detail visibility
150 nm
1)
Pixel matrix 2,880 x 2,880
TXI yes
2)
Frame rate up to 15 Hz
Water cooling (Target and coils) yes
1) With YXLON IQI for 2D at minimum focal spot size and HRP Target
2) TXI = True X-ray Intensity – regulation of output dose for constant intensity
Detector (alternative) YXLON Panel 2530
3)
Active area 249 mm x 302 mm
Pixel pitch 139 µm
Pixel matrix 1,792 x 2,176
Frame rate up to 30 Hz
3) Qualified acc. ASTM E-2597. Specification for more detectors on request.
Cabinet/System Operator Desk
Width ~ 2,380 mm Width ~ 1,800 mm
Height (w/o levelling wedges) ~ 2,180 mm Height ~ 700 mm – ~ 1,200 mm, motorized
Depth ~ 945 mm Depth ~ 800 mm
Weight ~ 3,400 kg Weight ~ 175 kg
Manipulator design granite base, vibration isolation
with active level control, all axes
equipped with Heidenhain
length and angle encoders
Monitor 2 pcs., capacitive touchscreen,
1920 x 1080 pixel, 21“, as well as
separate reconstruction and evaluation
station with 30“ monitor
YXLON FF20 CT Metrology
Conditions Measuring accuracy
Features, Options see above, but without virtual
rotation axis “FlexCenter“
MPE
SD
9)
3.9 µm + L/75 [L=mm]
Air conditioning inside cabinet yes, temperature range referring
to VDI 2627 measuring
room quality class 3
9) Referring to VDI/VDE 2630 part 1.3. Measured as deviation of sphere distance in
tomographic static mode (TS) with std. circular scan. More details on request. Values
valid only for YXLON FF20 CT Metrology under compliance with conditions described
beside.
Systems ambient conditions Measuring room quality class 4