5OM-1343-008_w.pdf - 第85页
3-8-2 AKFEPED-ID 0607-002 Underframe X/Y Servo Power Supply Section C Underframe X/Y Servo Power Supply Section C
3-8-1
AKFEPED-ID
Underframe X/Y Servo Power Supply Section B
0604-001
Underframe X/Y Servo Power Supply Section B
3-8-2
AKFEPED-ID
0607-002
Underframe X/Y Servo Power Supply Section C
Underframe X/Y Servo Power Supply Section C
3-8-3
AKFEPED-ID
0604-001
Underframe X/Y Servo Power Supply Section D
Underframe X/Y Servo Power Supply Section D