Oxford ICP-CVD SOP.pdf - 第4页

Page 4 of 11 5. Run the recip e a) From Recipes page, click “ Run ”, will hear pump whirring get louder i) NOTE: Do not click “Save” from the Recipes page, it will bring up the “Access Denied to User ” popu p ii) NOTE: s…

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A) Perform chamber condition run

Visually check for a wafer inside the loadlock

2. Check that no wafer is inside the chamber

a) Hold a flashlight against the window, shine

straight inside. If you can see a region with

three small slits radiating outward from the

center, no wafer is inside.

b) If you see a dark shiny continuous disk in

the middle, there’s a wafer inside. Find the

MNFL staff

Figure 9. Loadlock.

Wafer is inside

Figure 10. Flashlight against window,

check for wafer.

Locate your desired recipe

a) Click Process Menu, then Recipes

b) Press Load

c) A popup reading: “Currently loaded recipe

contains unsaved changes. …..”, click Yes.

This will restore the recipe to the staff-

programmed defaults (what we want)

d) Find your desired recipe from the pop-up

list, click OK

NOTE: If heating the chamber from 70C to

250C, run the “@Heat Chamber to 250C”

process before running your conditioning

process. This will take ~25 minutes.

Figure 11. Process

Menu dropdown

Figure 12. Recipe Load button on the

recipes page

[RECIPE

SELECTION

dialog]

[UNSAVED CHANGES popup]

Modify the recipe

a) Left-click on the “Dep” step (different

name in each recipe), click “Edit Step”

i) NOTE: click on the step in the white box

of the Recipe Editor window, not the

step library

b) Change the step time (circled) to allow

deposition of >100nm of material

i) NOTE: can only change step time, not

other parameters

c) Click “OK” to exit the editing screen

Figure 13. Edit Step screen, showing Step time (circled, left) and

"OK" button (circled, right)

[Recipe Editor

window]

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Run the recipe

a) From Recipes page, click “Run”, will hear

pump whirring get louder

i) NOTE: Do not click “Save” from the

Recipes page, it will bring up the

“Access Denied to User” popup

ii) NOTE: sample will be loaded from

loadlock into chamber automatically

b) When dialog box comes up asking to “run a

second process”, click yes. The first process

that was run was the previous user’s

cleaning process

c) Process page will come up automatically

Figure 14. Run button on Recipes page

Figure 15. Access Denied popup, if a User tries to save a recipe

Figure 16. "Run a second process" popup.

Monitor Process

a) Wait through “Pump” and “Purge” steps (5

minutes)

b) Once “Dep” step begins, watch RF power

stabilize on screen

i) If Reflected RF (red circles in picture)

does not stabilize at <5W, contact the

MNFL staff

c) Watch for plasma to ignite and stabilize in

chamber;

i) NOTE: if plasma is not visible once RF

power has stabilized, abort the

process, inform the MNFL staff

Figure 17. RF generator portion of Process Chamber page.

Figure 18. Plasma

in the chamber

Figure 19. Stop, Pause, and Jump

buttons.

Figure 20. Process aborted popup.

Always click yes!

Figure 21. Process Failed popup[

To abort a process, click the STOP button, on the process page

a) NOTE: If you stop a process, or it aborts due to a hardware fault, a dialog box will pop up asking if

you want your sample moved to the loadlock. Always click yes!!! You cannot unload your sample

manually, so if you click no, the staff will have to assist you

b) NOTE: NEVER CLICK THE ‘STOP ALL AUTO PROCESSES’ button in the top-right corner of the screen

c) The PAUSE and JUMP buttons allow you to a) temporarily shut off only the RF (Don’t do this,

reignition may not occur correctly), and b) skip the rest of the current step (avoid skipping steps

unless you need to shorten the actual deposition time mid-process)

d) A successfully-aborted process will result in your wafer being returned to the loadlock, where

you’ll see the “Yellow alert”, and a “Process Failed” popup. Remove your wafer, and contact the

MNFL staff

Once process is complete, a “Yellow Alert”

pop-up will appear

b) Click on it, click “Continue”

Wait ~30s for wafer unload sequence to finish

Figure 22. Yellow Alert popup

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B) Vent chamber, load your sample, pump chamber

Vent the Loadlock:

a) Visually check that the wafer has been unloaded into the

loadlock

b) Click System Menu, then Pumping

c) Under the loadlock interface, click Stop

d) A popup, “Wafer ….. has finished processing”. Click OK

e) Click Vent

f) Wait until “Vent Time Left” countdown reaches 0. This will

take 4 minutes.

Figure 23. "Wafer has finished processing"

popup

Figure 24. Loadlock pump/vent interface

Open the loadlock

a) Pull upwards on the black knob on the loadlock door

(circled). No twisting.

i) It will be slightly difficult to open, the interlock switch

sticks

ii) Place your elbow against the hinge for better leverage

Figure 25. Loadlock lid. Grab by knob

Load your sample

a) If using your hands, double-glove before handling wafer

b) Gently place your 4” carrier wafer (or 4” sample wafer) on

the loadlock tray, up against the round cams (circled), with

the flat facing towards the process chamber

c) Make sure the edge of your sample lines up with the

circular marker line (arrow)

i) NOTE: if you cannot get the wafer aligned to the

marker line (off by >1mm), contact the MNFL staff

Figure 26. Marker line and pins in loadlock.

Pump the loadlock

a) Close the loadlock door

b) Click “Stop”, then “Evacuate”

c) In the popup, enter a sample name. Press “OK” to indicate

a wafer in the loadlock, or “CANCEL” to indicate no wafer

in the loadlock

d) When "Cycling Loadlock Pumping" is displayed, the

vacuum is good enough for your recipe to be run

Figure 27. Loadlock Pump/Vent interface

Figure 28. "Name the wafer" popup. OK for

YES wafer, CANCEL for NO wafer