YSM20_KLW-100_cwd.pdf - 第27页

PAGE

23

Condential & Proprietary

YSM20

H024106

Air circuit

SC4-M3MA

SGDAQ10x15-L-ZE135A2-47W

TL4-01

UT4

TL4-01

SC4-M3MA

TL4-01M

SSU4

TL4-01

UT4

TL4-01M

MGPM40-15Z-DCR4203R

PA

C250-16WY

PA

UT4

MGPM40-15Z-DCR3899R

SSU4

TL4-01

SSU4

MGPM40-15Z-DCR3899R

SSU4

SS0755-AWS07

TL4-01

TL4-01M

TL4-01

UT4

PA

C250-16WY

PA

MGPM40-15Z-DCR4203R

UT4

TL4-01M

UT4

TL4-01M

SSU4

TL4-01M

SSU4

TL4-01M

UT4

SSU4

PA

C250-16WY

PA

SSU4

MGPM40-15Z-DCR3899R

TL4-01

SC4-M3MA

CLA

M

P UNIT F2

C

LAMP U

N

I

T

R

1

プラグ1/8

CL

A

MP UNIT

R

2

MULTI CA

M

ERA

RE

AR

（O

P

TION)

M

ULTI CAMERA

F

RON

T

（OPTION)

CLAMP UNIT F1

TL4-01

UT4

SC4-M3MA

TL4-01

SSU4

UT4

SSU4

TL4-01M

PA

C250-16WY

PA

TL4-01M

SSU4

TL4-01M

TL4-01

UT4

TL4-01

MGPM40-15Z-DCR4203R

TL4-01M

TL4-01

MGPM40-15Z-DCR3899R

MGPM40-15Z-DCR4203R

SSU4

UT4

TL4-01

UT4

KM-11

AN05-M5

VQZ1221-5L1-C4

AN05-M5

KQ2L04-02NS

AN05-M5

KQ2L06-M5N

KQ2L04-02NS

AN05-M5

CDBQ2B63-50DC-RN-M9BM

VQZ1221-5L1-C4

KQ2L04-02NS

AN05-M5

KQ2L04-02NS

CDQ2B63-50DZ-M9BM

KQ2L04-02NS

KQ2L06-M5N

UY8

KK3P-06H

CUTTER R

2

KK3S-06E

C

UT

TER R1

UYD8-6

CUTTER F2

CU

T

TE

R F

1

UK6

KK3P-06H

KK3S-06E

KK3P-06H

KQ2L06-M5N

CDBQ2B63-50DC-RN-M9BM

KQ2L04-02NS

CDQ2B63-50DZ-M9BM

KK3P-06H

UK6

UYD8-6

KK3S-06E

KQ2L04-02NS

AN05-M5

P

ISE30A-C4L-B-MD

PPP

VHS30-03B-X2119A

IR2220-02H-R-A-X1001

UY4

AC30X-03D-A-X2649A

φ12 ORANGE

FUV8-8

US10

φ10 ORANGE

Φ6 ORANGE

UY10

UYD10-8

UYD8-6

UEDW10-8

φ12 ORANGE

φ10 ORANGE EGNARO 4φEGNARO 8φ

TO

　CO

N

VE

YO

R　R

TO

　CON

VE

YO

R　L

US10

φ6 ORANGE

φ10 ORANGE

φ4 ORANGE

φ4 BLACK

φ4 ORANGE

φ4 BLACK

φ4 ORANGE

φ4 BLACK

φ4 ORANGE

Φ6 ORANGE

Φ6 ORANGE Φ6 ORANGE

Φ6 ORANGE

Φ8 ORANGE

T

O

　H

E

A

D　

φ10 ORANGE

UP8

UP10

SL8-01

プラグ1/8

UP8

UYD8-6

VQZ332B-5G1-C6

VFU2-66P-NH

TL6-01M

TL6-02

φ10 BLACK

(EXT.)

UYD8-6

UY6

KK3S-06E

UC6

UY6

UYD8-6

φ8 ORANGE

Φ6 ORANGE

KCALB6ΦKCALB6Φ

φ8 ORANGE

Φ6 ORANGE

φ4 BLACK

φ4 ORANGE

φ4 BLACK

φ4 ORANGE

φ4 BLACK

φ4 ORANGE

φ4 BLACK

φ4 ORANGE

φ4 BLACK

φ4 ORANGE

φ4 BLACK

φ4 ORANGE

φ4 BLACKφ4 BLACK

φ4 ORANGE

φ4 BLACK

φ4 ORANGE

φ4 BLACKφ4 BLACK

φ4 ORANGE

φ4 BLACK

φ4 ORANGE

φ4 BLACKφ4 BLACK

φ4 ORANGE

φ4 BLACK

T

APE

CU

TTER

UC4

BLO

W ST.

COVER 2

C

OVER 1

COVER 4

C

OVER 3

ATS

AT

S

US6

⑧

⑨

⑧

⑨

⑧

⑨

⑧

⑨

③

④

⑤

⑥

⑦

⑭

⑦

⑪

⑫

②

①

⑩

⑬

⑮

⑯

Φ8 ORANGE

VQZ1221-5L1-C4

SGDAQ10x15-L-ZE135A2-47W

UY10

UC6

SC4-M3MA

SGDAQ10x15-L-ZE135A2-47W

TL4-01

UT4

TL4-01

SC4-M3MA

TL4-01M

SSU4

TL4-01

UT4

TL4-01M

MGPM40-15Z-DCR4203R

PA

C250-16WY

PA

UT4

MGPM40-15Z-DCR3899R

SSU4

TL4-01

SSU4

MGPM40-15Z-DCR3899R

SSU4

SS0755-AWS07

TL4-01

TL4-01M

TL4-01

UT4

PA

C250-16WY

PA

MGPM40-15Z-DCR4203R

UT4

TL4-01M

UT4

TL4-01M

SSU4

TL4-01M

SSU4

TL4-01M

UT4

SSU4

PA

C250-16WY

PA

SSU4

MGPM40-15Z-DCR3899R

TL4-01

SC4-M3MA

CLA

M

P UNIT F2

C

LAMP U

N

I

T

R

1

プラグ1/8

CL

A

MP UNIT

R

2

MULTI CA

M

ERA

RE

AR

（O

P

TION)

M

ULTI CAMERA

F

RON

T

（OPTION)

CLAMP UNIT F1

TL4-01

UT4

SC4-M3MA

TL4-01

SSU4

UT4

SSU4

TL4-01M

PA

C250-16WY

PA

TL4-01M

SSU4

TL4-01M

TL4-01

UT4

TL4-01

MGPM40-15Z-DCR4203R

TL4-01M

TL4-01

MGPM40-15Z-DCR3899R

MGPM40-15Z-DCR4203R

SSU4

UT4

TL4-01

UT4

KM-11

AN05-M5

VQZ1221-5L1-C4

AN05-M5

KQ2L04-02NS

AN05-M5

KQ2L06-M5N

KQ2L04-02NS

AN05-M5

CDBQ2B63-50DC-RN-M9BM

VQZ1221-5L1-C4

KQ2L04-02NS

AN05-M5

KQ2L04-02NS

CDQ2B63-50DZ-M9BM

KQ2L04-02NS

KQ2L06-M5N

UY8

KK3P-06H

CUTTER R

2

KK3S-06E

C

UT

TER R1

UYD8-6

CUTTER F2

CU

T

TE

R F

1

UK6

KK3P-06H

KK3S-06E

KK3P-06H

KQ2L06-M5N

CDBQ2B63-50DC-RN-M9BM

KQ2L04-02NS

CDQ2B63-50DZ-M9BM

KK3P-06H

UK6

UYD8-6

KK3S-06E

KQ2L04-02NS

AN05-M5

P

ISE30A-C4L-B-MD

PPP

VHS30-03B-X2119A

IR2220-02H-R-A-X1001

UY4

AC30X-03D-A-X2649A

φ12 ORANGE

FUV8-8

US10

φ10 ORANGE

Φ6 ORANGE

UY10

UYD10-8

UYD8-6

UEDW10-8

φ12 ORANGE

φ10 ORANGE EGNARO 4φEGNARO 8φ

TO

　CO

N

VE

YO

R　R

TO

　CON

VE

YO

R　L

US10

φ6 ORANGE

φ10 ORANGE

φ4 ORANGE

φ4 BLACK

φ4 ORANGE

φ4 BLACK

φ4 ORANGE

φ4 BLACK

φ4 ORANGE

Φ6 ORANGE

Φ6 ORANGE Φ6 ORANGE

Φ6 ORANGE

Φ8 ORANGE

T

O

　H

E

A

D　

φ10 ORANGE

UP8

UP10

SL8-01

プラグ1/8

UP8

UYD8-6

VQZ332B-5G1-C6

VFU2-66P-NH

TL6-01M

TL6-02

φ10 BLACK

(EXT.)

UYD8-6

UY6

KK3S-06E

UC6

UY6

UYD8-6

φ8 ORANGE

Φ6 ORANGE

KCALB6ΦKCALB6Φ

φ8 ORANGE

Φ6 ORANGE

φ4 BLACK

φ4 ORANGE

φ4 BLACK

φ4 ORANGE

φ4 BLACK

φ4 ORANGE

φ4 BLACK

φ4 ORANGE

φ4 BLACK

φ4 ORANGE

φ4 BLACK

φ4 ORANGE

φ4 BLACKφ4 BLACK

φ4 ORANGE

φ4 BLACK

φ4 ORANGE

φ4 BLACKφ4 BLACK

φ4 ORANGE

φ4 BLACK

φ4 ORANGE

φ4 BLACKφ4 BLACK

φ4 ORANGE

φ4 BLACK

T

APE

CU

TTER

UC4

BLO

W ST.

COVER 2

C

OVER 1

COVER 4

C

OVER 3

ATS

AT

S

US6

⑧

⑨

⑧

⑨

⑧

⑨

⑧

⑨

③

④

⑤

⑥

⑦

⑭

⑦

⑪

⑫

②

①

⑩

⑬

⑮

⑯

Φ8 ORANGE

VQZ1221-5L1-C4

SGDAQ10x15-L-ZE135A2-47W

UY10

UC6

PAGE

24

Condential & Proprietary

YSM20

H024106

Air circuit

真空発生用バルブ

VQD115-5MO-X1

シャフトブロー用バルブ

VQ120-5MO

VQ111U-5LO-X555

真空破壊用バルブ

H1

NOTE

1.YSM20(KLW) HMヘッドのエア回路図

PPP

KKE-M7113-00X

TUS0425

VQ111U-5LO-X555

真空破壊用バルブ

真空発生用バルブ

VQD115-5MO-X1

PPP

TUS0425

KKE-M7113-00X

H2

VQ111U-5LO-X555

真空破壊用バルブ

真空発生用バルブ

VQD115-5MO-X1

PPP

TUS0425

KKE-M7113-00X

H10

φ10 ORENGE

NO.

KHY-M4592-01X

VAC SENSOR BRD ASSY

1

PARTS NO. PARTS NAME QTY. DESCRIPTION

1

ZZB10-X177C

2

3

KLW-M7151-00X EJECTOR,RESIN

JOINTKKE-M7113-00X

1

10 LF3100

①

②

③③③

KHY-M4592-01X

KLW-M7151-00X

真空発生用バルブ

VQD115-5MO-X1

シャフトブロー用バルブ

VQ120-5MO

VQ111U-5LO-X555

真空破壊用バルブ

H1

NOTE

1.YSM20(KLW) HMヘッドのエア回路図

PPP

KKE-M7113-00X

TUS0425

VQ111U-5LO-X555

真空破壊用バルブ

真空発生用バルブ

VQD115-5MO-X1

PPP

TUS0425

KKE-M7113-00X

H2

VQ111U-5LO-X555

真空破壊用バルブ

真空発生用バルブ

VQD115-5MO-X1

PPP

TUS0425

KKE-M7113-00X

H10

φ10 ORENGE

NO.

KHY-M4592-01X

VAC SENSOR BRD ASSY

1

PARTS NO. PARTS NAME QTY. DESCRIPTION

1

ZZB10-X177C

2

3

KLW-M7151-00X EJECTOR,RESIN

JOINTKKE-M7113-00X

1

10 LF3100

①

②

③③③

KHY-M4592-01X

KLW-M7151-00X

HM head

PAGE

25

Condential & Proprietary

YSM20

H024106

Air circuit

真空発生用バルブ

VQD115-5MO-X1

シャフトブロー用バルブ

VQ120-5MO

VQ111U-5LO-X555

真空破壊用バルブ

H1

NOTE

1.YSM20(KLW) FMヘッドのエア回路図

PPP

$PLH4-M5M

TUS0425

VQ111U-5LO-X555

真空破壊用バルブ

真空発生用バルブ

VQD115-5MO-X1

PPP

TUS0425

$PLH4-M5M

H2

VQ111U-5LO-X555

真空破壊用バルブ

真空発生用バルブ

VQD115-5MO-X1

PPP

TUS0425

$PLH4-M5M

H5

φ10 ORENGE

NO.

KHY-M4592-10X

VAC5 SENS BRD ASSY

1

PARTS NO. PARTS NAME QTY. DESCRIPTION

1

ZZB05-X177C

2

3

KLW-M745A-00X EJECTOR

JOINT$PLH4-M5M

1

5

①

②

③③③

KHY-M4592-10X

KLW-M745A-00X

真空発生用バルブ

VQD115-5MO-X1

シャフトブロー用バルブ

VQ120-5MO

VQ111U-5LO-X555

真空破壊用バルブ

H1

NOTE

1.YSM20(KLW) FMヘッドのエア回路図

PPP

$PLH4-M5M

TUS0425

VQ111U-5LO-X555

真空破壊用バルブ

真空発生用バルブ

VQD115-5MO-X1

PPP

TUS0425

$PLH4-M5M

H2

VQ111U-5LO-X555

真空破壊用バルブ

真空発生用バルブ

VQD115-5MO-X1

PPP

TUS0425

$PLH4-M5M

H5

φ10 ORENGE

NO.

KHY-M4592-10X

VAC5 SENS BRD ASSY

1

PARTS NO. PARTS NAME QTY. DESCRIPTION

1

ZZB05-X177C

2

3

KLW-M745A-00X EJECTOR

JOINT$PLH4-M5M

1

5

①

②

③③③

KHY-M4592-10X

KLW-M745A-00X

FM head