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Layout of Sensors and Loads Nozzle Stockers
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Layout of Sensors and Loads Nozzle Stockers
Symbol Name Symbol Name
-B0918 Nozzle Stocker Lower Limit Detection 1
-B0920 Nozzle Stocker Shutter Open Check 1
-B0922 Nozzle Stocker Clamp Check 1
-B0935 Nozzle Stocker Shutter Open
-B0936 Nozzle Stocker Ascending 1
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Chapter 3
Parts Location
This chapter describes the layout, etc., of each section.
As this contains highly sophisticated contents, it should
carefully be referred to.