Tech Article._X-ray Inspection_Final Version.pdf - 第6页
QUADR A 7 PR O – Brand new , but prov en t echn ology During years of success with the main ma nual X -ra y inspecon s yst em series called QU ADRA, Nordson’ s has been working in the backgr ound to int r oduce innovav…
early stages is also generally easier. For example, nding void defects in wafer bumps (g. 4)
before any other layers have been added, compared to a fully formed chiplet consisng of
mulple devices, substrates and interconnecon layers (g. 5). This works out well, simple
inspecon can be done with faster, more cost eecve 2D imaging and then each of these
elements are combined when proven good. At the same me, the quality of how these have
been put together can then be inspected with the faster 3D techniques. When any of these
devices are then found to have failed, more me can be jused to gain more detail and this
insight can be fed back to improve process or design.
Fig 3. Inspecon Stages
Fig 4. 100µm bump inspecon
Fig 5. 3D Integrated Die Stack
QUADRA 7 PRO – Brand new, but proven technology
During years of success with the main manual X-ray
inspecon system series called QUADRA, Nordson’s has
been working in the background to introduce innovave,
new core technologies with the Dual Mode X-ray tube and
the Onyx X-ray at panel detector, creang higher image
quality across a wider range of applicaons. The Dual
Mode Quadra NT4® tube provides users with maximum
exibility. This innovave feature oers brightness and
resoluon modes, allowing operators to dynamically switch
between them based on specic applicaon requirements.
The newly developed Revalution software is designed specifically for high-end semiconductor
applications and provides an easy-to-use intuitive interface, optimized workflow, and
expanded functionality, Revalution software empowers operators to efficiently analyze and
interpret inspection data, enabling faster decision-making and improving overall productivity.
QUADRA PRO is taking the technology from the QUADRA SERIES, and advancing it to an even
greater level as the next generaon of high resoluon X-ray inspecon, focused on the
challenges of the semiconductor industry.
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Nordson TEST & INSPECTION