YHP-2D_mpl_e.pdf - 第48页
KJG-091 1 Rev . :It is the parts which a change was in in the past. Please be careful at the time of the parts ordering. Rev.: 過去に変更が入った部品を示します。部品発注時は注意してください。 No. Part No. Part Name Q’ty Remarks Rev . Rank Level No. Par…
KJG-0911
4
4
5
18
16
5
8
19
9
10
14
18
1
2
1
6
12
13
17
2121
20
11
2
3
3
22
7
7
5
18
18
16
5
15
2
1
23
24
10
1
LZ-axis / Elevation
Wafer LZ AXIS
KJG-0911
Rev. :It is the parts which a change was in in the past. Please be careful at the time of the parts ordering.
Rev.: 過去に変更が入った部品を示します。部品発注時は注意してください。
No. Part No. Part Name Q’ty Remarks Rev. Rank Level No. Part No. Part Name Q’ty Remarks Rev. Rank Level
1
KV8-M3735-01 BRACKET
3 /
39
2
KV8-M3734-10 BOLT
3
/
40
3
KW6-M1706-00 CASTER
4 /
41
4
KW6-M170B-00 KNOB
2 /
42
5
KJ8-M1134-61 SENSOR PALETTE ORG
2 B
Í
43
6
KV9-M655A-50 SENSOR, 1-1
1 B
Í
44
7
91317-08010 BOLT HEX. SOCKET HEAD
20
45
8
KV4-M1309-00 STAY CYLINDER
1
/
46
9
KL4-M1718-00 KNOCK CYLINDER
1
/
47
10
$TS4-M5 JOINT
1 /
48
11
KW6-M1761-00 SOLENOID VALVE
1 B
Í
49
12
$SL4-01 JOINT
1 /
50
13
$KM-10 MUFFLER
1 /
51
14
KGP-M1715-00 BRACKET, LOWER, S1
1 /
Í
52
15
KGP-M1716-00 BRACKET, UPPER, S1
1 /
Í
53
16
KGP-M1718-00 BRACKET, S2
2 /
Í
54
17
91317-03010 BOLT HEX. SOCKET HEAD
2 55
18
91317-04006 BOLT HEX. SOCKET HEAD
12
56
19
91317-04008 BOLT HEX. SOCKET HEAD
6
57
20
91317-06008 BOLT HEX. SOCKET HEAD
14
58
21
91317-08010
BOLT HEX. SOCKET HEAD
20 59
22
KG2-M8582-40 VALVE
1
spare
B
60
23
90K63-431513 AC SERVO MOTOR
1 B
Í
61
24
KV4-M2220-00 COUPLING Z
1 B
Í
62
25 63
26 64
27 65
28 66
29 67
30 68
31 69
32 70
33 71
34 72
35 73
36 74
37 75
38 76
10
1
LZ-axis / Elevation
Wafer LZ AXIS
KJG-0911
3
1
5
6
2
6
1
5
2
11
11
9
10
8
11
9
4
6
7
5
10
2
Rack
Wafer LZ AXIS