YHP-2D_mpl_e.pdf - 第59页

KJG-091 1 8 5 1 7 10 13 14 12 3 2 9 1 1 1 1 6 17 15 16 14 10 4 12 2 LH AXIS W afer Hook

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KJG-0911
Rev. :It is the parts which a change was in in the past. Please be careful at the time of the parts ordering.
Rev.: 過去に変更が入った部品を示します。部品発注時は注意してください。
No. Part No. Part Name Q’ty Remarks Rev. Rank Level No. Part No. Part Name Q’ty Remarks Rev. Rank Level
1
KJG-M1830-A0 SENSOR, PLT F
1 B
Í
39
2
KJG-M1830-B0 SENSOR, PLT C1
1
B
Í
40
3
KJG-M1830-C0 SENSOR, PLT C2
1 B
Í
41
4
KJG-M1830-D0 SENSOR, PLT R
1 B
Í
42
5
KJG-M1830-E0 SENSOR, PLT CHK 6
1 B
Í
43
6
KJG-M1830-F0 SENSOR, PLT CHK 8
1 B
Í
44
7
KJG-M1831-00 COVER, CABLE
1
/
Í
45
8
91312-03006 BOLT HEX. SOCKET HEAD
15
46
9
92902-03200 WASHER, PLAIN
3
47
10
KJG-M1899-00 CYLINDER
1 B
Í
48
11
KJG-M9709-00 KNUCKLE JOINT
1 B
Í
49
12
$SC4-M5 SPEED CONTROLLER
2 /
Í
50
13 51
14 52
15 53
16 54
17 55
18
56
19
57
20
58
21
59
22 60
23 61
24 62
25 63
26 64
27 65
28 66
29 67
30 68
31 69
32 70
33 71
34 72
35 73
36 74
37 75
38 76
12
1
Hook Frame / Clamp
Wafer Hook
KJG-0911
8
5
1
7
10
13
14
12
3
2
9
11
11
6
17
15
16
14
10
4
12
2
LH AXIS
Wafer Hook
KJG-0911
Rev. :It is the parts which a change was in in the past. Please be careful at the time of the parts ordering.
Rev.: 過去に変更が入った部品を示します。部品発注時は注意してください。
No. Part No. Part Name Q’ty Remarks Rev. Rank Level No. Part No. Part Name Q’ty Remarks Rev. Rank Level
1
KJG-M1844-00 BELT
1 /
Í
39
2
KJG-M1851-A0
SENSOR, LH ORG
1 B
Í
40
3
KJG-M1854-00 CYLINDER ASSY
1 B
Í
41
4
KJG-M1872-00 CYLINDER ASSY, HOOK
1 B
Í
42
5
90K63-311320 AC SERVO MOTOR
1 B
Í
43
6
91312-03014 BOLT HEX. SOCKET HEAD
2 44
7
91312-03016 BOLT HEX. SOCKET HEAD
2
45
8
91312-04010 BOLT HEX. SOCKET HEAD
4
46
9
98902-03008 SCREW, BINDING HEAD
1
47
10
$SC4-M5A SPEED CONTROLLER
2 48
11
$SL6-M5 JOINT
2 49
12
KJG-M1854-B0 SENSOR, ARM OP
1 50
13
KJG-M1854-C0 SENSOR, ARM CL
1 51
14
KJG-M1854-20 SENSOR HOLDER,CYL.
2 52
15
KJG-M1872-B0 SENSOR, HOOK OP
1 53
16
KJG-M1872-C0 SENSOR, HOOK CL
1 54
17
KJG-M1872-20 SENSOR, HOLDER,CYL.
2 55
18
56
19
57
20
58
21
59
22 60
23 61
24 62
25 63
26 64
27 65
28 66
29 67
30 68
31 69
32 70
33 71
34 72
35 73
36 74
37 75
38 76
12
2
LH AXIS
Wafer Hook