YHP-2D_mpl_e.pdf - 第55页
KJG-091 1 5 1 4 6 8 9 2 7 3 1 1 2 L Y -axis W afer Moving-Axis
KJG-0911
Rev. :It is the parts which a change was in in the past. Please be careful at the time of the parts ordering.
Rev.: 過去に変更が入った部品を示します。部品発注時は注意してください。
No. Part No. Part Name Q’ty Remarks Rev. Rank Level No. Part No. Part Name Q’ty Remarks Rev. Rank Level
1
KJG-M7236-00 COUPLING
1 B
Í
39
2
KJG-M2212-A0 SENSOR, LX ORG
1
B
Í
40
3
90K63-311414 AC SERVO MOTOR
1 B
Í
41
4
91312-04014 BOLT HEX. SOCKET HEAD
12 42
5
98980-03008 SCREW BINDING HEAD
1 43
6 44
7
45
8
46
9
47
10 48
11 49
12 50
13 51
14 52
15 53
16 54
17 55
18
56
19
57
20
58
21
59
22 60
23 61
24 62
25 63
26 64
27 65
28 66
29 67
30 68
31 69
32 70
33 71
34 72
35 73
36 74
37 75
38 76
11
1
LX-axis
Wafer Moving-Axis
KJG-0911
5
1
4
6
8
9
2
7
3
11
2
LY-axis
Wafer Moving-Axis
KJG-0911
Rev. :It is the parts which a change was in in the past. Please be careful at the time of the parts ordering.
Rev.: 過去に変更が入った部品を示します。部品発注時は注意してください。
No. Part No. Part Name Q’ty Remarks Rev. Rank Level No. Part No. Part Name Q’ty Remarks Rev. Rank Level
1
KJG-M2615-00 VALVE
1 B
Í
39
2
KJG-M2616-A0 SENSOR, LEY ORG
1
B
Í
40
3
KJG-M7236-00 COUPLING
1 B
Í
41
4
90K63-311615 AC SERVO MOTOR
1 B
Í
42
5
91312-03030 BOLT HEX. SOCKET HEAD
2 43
6
91312-04012 BOLT HEX. SOCKET HEAD
6 44
7
98980-03012 SCREW, BINDING HEAD
1
45
8
$TS8-01 JOINT
1
46
9
KG2-M8582-40 VALVE
1
spare
B
Í
47
10 48
11 49
12 50
13 51
14 52
15 53
16 54
17 55
18
56
19
57
20
58
21
59
22 60
23 61
24 62
25 63
26 64
27 65
28 66
29 67
30 68
31 69
32 70
33 71
34 72
35 73
36 74
37 75
38 76
11
2
LY-axis
Wafer Moving-Axis