YHP-2D_mpl_e.pdf - 第52页

KJG-091 1 Rev . :It is the parts which a change was in in the past. Please be careful at the time of the parts ordering. Rev.: 過去に変更が入った部品を示します。部品発注時は注意してください。 No. Part No. Part Name Q’ty Remarks Rev . Rank Level No. Par…

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KJG-0911
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Cover
Wafer LZ AXIS
KJG-0911
Rev. :It is the parts which a change was in in the past. Please be careful at the time of the parts ordering.
Rev.: 過去に変更が入った部品を示します。部品発注時は注意してください。
No. Part No. Part Name Q’ty Remarks Rev. Rank Level No. Part No. Part Name Q’ty Remarks Rev. Rank Level
1
90990-42J030 JOINT
1 /
Í
39
2
90990-42J031 JOINT
1
/
Í
40
3
$UKM4-01 JOINT
1 /
Í
41
4
KL4-M1309-10 HANDLE
1
/
42
5
KG2-M1372-00 PIECE B HINGE
2 /
43
6
K46-M1373-00 SHAFT HINGE
2 /
44
7
K44-M1354-00 MG. CATCH (TL-152-2)
2
/
45
8
91317-03008 BOLT HEX. SOCKET HEAD
4
46
9
91317-04008 BOLT HEX. SOCKET HEAD
8
47
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10
3
Cover
Wafer LZ AXIS
KJG-0911
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1
3
5
4
11
1
LX-axis
Wafer Moving-Axis