XM8000 Series Brochure EN.pdf - 第5页

8 | Nordson XM8000 Series Nordson XM8000 Series | 9 P anel L evel P ack ag es The Nordson XM8000-7P is specific ally designed for X -ray inspec tion of panel level p ackages with maximum p anel size of 510mm x 515mm. Ena…

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Intelligent defect measurement
The Nordson XM8000’s intelligence provides optimum
defect analysis, which eliminates the need for
operator interpretation and minimizes false calls.
As a fully automated system, exact measurement
criteria are measured, reproduced and repeatable for
consistent analysis across multiple sites, customized
to the specific device.
Continuous learning
The Nordson XM8000 continuously learns so it
can improve reliability and repeatability of defect
recognition, further eliminating false calls.
Unbeatable resolution
100nm defect recognition opens up a whole
new world of X-ray metrology applications.
The patented NT100M X-ray tube, unique to Nordson
TEST & INSPECTION, is 10 times brighter and
intrinsically more stable than conventional X-ray
tubes. NT100M utilizes a LaB
6
emitter instead of
the traditional tungsten filament, which typically only
achieves 350nm defect recognition.
Consistency as standard
With unrivaled GR&R
to less than 5%,
the XM8000 utilizes
the latest high
resolution stages
to 1um accuracy
providing supreme
repeatability.
Clean by design
The Nordson XM8000 creates an ISO3 (at rest) and ISO4 (in
motion) environment for your sample. Manufactured in a
certified clean room environment and specifically designed
for use in a semiconductor FAB, the XM8000 design has been
optimized to keep your samples clean.
Device ProtectionIntelligent Defect Analysis
As devices become more complex and sensitive
to radiation exposure, providing protection is
ever more paramount. IC-Safe Technology,
unique to Nordson TEST & INSPECTION, allows
products to be safely inspected in-line without
risk of radiation damage.
IC-Safe filters
Protect samples from X-ray over exposure with IC-Safe filters.
Specifically designed for your application to give total peace of
mind for your devices.
IC-Safe shields
When selective sampling is utilized, IC-Safe shields completely
eliminate radiation exposure to all other device samples not
under test.
IC-Safe Radiation Shield
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TSV wafer starts, breakdown by application. Source:
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The semiconductor
market demands
increasingly complex
devices that are enabled
by technologies such
as TSV, PoP, 2.5D and
3D integration. These
complex products
demand a new level
of metrology. The
XM8000 system delivers
fully automated, non-
destructive, radiation
safe defect detection for
all complex devices.
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Panel Level Packages
The Nordson XM8000-7P is specifically designed for X-ray inspection
of panel level packages with maximum panel size of 510mm x 515mm.
Enabling manufacturers to identify even the smallest defects, buried
inside multi-layer semiconductor panel level packages.
The 7-axis system includes a detector gimbal for 3D
capabilities which is the pinnacle of accuracy for
fully-automated X-ray metrology.
Upgraded Handling
The XM8000-7P and EFEM has been upgraded
to support wafer panels up to 510mm x
515mm in size. The system is designed to be
tolerant to 6mm panel warpage and weights
up to 3kg.
Imaging Performance
The XM8000-7P has the same X-ray imaging chain
as the regular 7 variant. This means there is no
compromise on image quality, delivering the same
levels of accuracy and precision. High resolution
3D imaging as standard down to 0.2 micrometers
per pixel.
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Up to 30 Times Faster Customized Solutions
Maximize throughput
The Nordson XM8000 performance is unbeatable in
24/7 operation. Clean room compatible and designed
to S2 and S8 standards, XM8000 fully integrates into
your production process further reducing unit cost.
High throughput automated sample loaders for
wafers, singulated packages, tape frames and tray
loaders are available.
Fully automated solution
The Nordson XM8000 is compatible with all SECS/GEM
factory host systems. This guarantees completely
automated processing with real time results fed back
to optimize FAB performance.
The Nordson XM8000 is customized and configured for your production line.
Applications
With over 150 collective years of industry experience,
our technical team develop custom algorithms to
detect and measure the defects specific to your
samples.
Dedicated 24/7 support
Nordson TEST & INSPECTION provide around
the clock support. Dedicated service support
engineers maximize your system uptime.
The Nordson XM8000’s robust platform will
run continuously with minimum maintenance
and dedicated support, maximizing your
throughput.
Consistent reliability
Proven consistency with unbeatable GR&R
reliability at micron levels across a multitude
of sample applications.
Sample handling
A comprehensive range of sample formats
is supported, including wafer, tapeframe,
singulated dies and panels.
Factory automation
All Nordson XM8000 systems are configured
for your SECS/GEM factory host as standard.
Future proof
As your needs change in the future, Nordson
TEST & INSPECTION is with you every step of
the way providing continuous, customized
applications support ensuring your system
meets today’s and tomorrow’s technology.
The Nordson TEST & INSPECTION XM8000 is the future of defect inspection
operating 30 times faster than any conventional X-ray system.
In-Line Inspection and Metrology