XM8000 Series Brochure EN.pdf - 第6页
10 | Nordson XM8000 Series Nordson XM8000 Series | 11 Up t o 30 Times F as t er C us t omiz ed Solutions Maximize thr oughput The Nordson XM8000 performanc e is unbeat able in 24/7 oper ation. Cle an room comp atible and…
8 | Nordson XM8000 Series Nordson XM8000 Series | 9
Panel Level Packages
The Nordson XM8000-7P is specifically designed for X-ray inspection
of panel level packages with maximum panel size of 510mm x 515mm.
Enabling manufacturers to identify even the smallest defects, buried
inside multi-layer semiconductor panel level packages.
The 7-axis system includes a detector gimbal for 3D
capabilities which is the pinnacle of accuracy for
fully-automated X-ray metrology.
Upgraded Handling
The XM8000-7P and EFEM has been upgraded
to support wafer panels up to 510mm x
515mm in size. The system is designed to be
tolerant to 6mm panel warpage and weights
up to 3kg.
Imaging Performance
The XM8000-7P has the same X-ray imaging chain
as the regular 7 variant. This means there is no
compromise on image quality, delivering the same
levels of accuracy and precision. High resolution
3D imaging as standard down to 0.2 micrometers
per pixel.
10 | Nordson XM8000 Series Nordson XM8000 Series | 11
Up to 30 Times Faster Customized Solutions
Maximize throughput
The Nordson XM8000 performance is unbeatable in
24/7 operation. Clean room compatible and designed
to S2 and S8 standards, XM8000 fully integrates into
your production process further reducing unit cost.
High throughput automated sample loaders for
wafers, singulated packages, tape frames and tray
loaders are available.
Fully automated solution
The Nordson XM8000 is compatible with all SECS/GEM
factory host systems. This guarantees completely
automated processing with real time results fed back
to optimize FAB performance.
The Nordson XM8000 is customized and configured for your production line.
Applications
With over 150 collective years of industry experience,
our technical team develop custom algorithms to
detect and measure the defects specific to your
samples.
Dedicated 24/7 support
Nordson TEST & INSPECTION provide around
the clock support. Dedicated service support
engineers maximize your system uptime.
The Nordson XM8000’s robust platform will
run continuously with minimum maintenance
and dedicated support, maximizing your
throughput.
Consistent reliability
Proven consistency with unbeatable GR&R
reliability at micron levels across a multitude
of sample applications.
Sample handling
A comprehensive range of sample formats
is supported, including wafer, tapeframe,
singulated dies and panels.
Factory automation
All Nordson XM8000 systems are configured
for your SECS/GEM factory host as standard.
Future proof
As your needs change in the future, Nordson
TEST & INSPECTION is with you every step of
the way providing continuous, customized
applications support ensuring your system
meets today’s and tomorrow’s technology.
The Nordson TEST & INSPECTION XM8000 is the future of defect inspection
operating 30 times faster than any conventional X-ray system.
In-Line Inspection and Metrology
Specifications subject to change without prior notice.
Copyright © Nordson 2024. Other products and company
names mentioned are trademarks or trade names of their
respective companies.
Nordson Test & Inspection products are patent
protected and covered by the patent listed at
www.nordson.com.
Nordson Test & Inspection Japan
ti-sales-jp@nordson.com
Nordson Test & Inspection Singapore
ti-sales-eu@nordson.com
Nordson Test & Inspection Taiwan
ti-sales-tw@nordson.com
Nordson Test & Inspection Korea
ti-sales-korea@nordson.com
BR-XM8000 19/03/2024-V2
www.nordson.com/TestInspect
For more information, speak with your
Nordson representative or contact your
Nordson regional oice
Nordson Test & Inspection
Europe, SEA, Africa
ti-sales-eu@nordson.com
Nordson Test & Inspection Americas
ti-sales-us@nordson.com
Nordson Test & Inspection China
ti-sales-cn@nordson.com
Specifications
Nordson XM8000-5 Nordson XM8000-7 Nordson XM8000-7P
X-ray source NT100M filament free sealed transmissive
Max power 10W 10W 20W
Voltage 30 -160KV
Feature recognition 100nm
Lifetime Minimum 5000 X-ray ON hours
Detector
Detector type AspireXL Varex1512 Varex1512
Analysis techniques 2D/2.5D 2D/2.5D/3D 2D/2.5D/3D
Detector pitch 50µm 75µm 75µm
FoV range 1mm - 25mm 0.5mm - 12.5mm 0.5mm - 12.5mm
Resolution 0.2µm/pixel - 10µm/pixel
Automation
Throughput 25 WPH @ 5 FOVs; 7 WPH @ 50 FOVs 7 WPH @ 5 FOVs; 1 WPH @ 50 FOVs Up to 7 WPH (application specific)
IC-Safe
compatible Yes
Cleanroom ISO3 (stationary), ISO4 (in motion)
Axes 5-axis 7-axis 7-axis
Sample loaders Dual port EFEM
Installation
Footprint
Cabinet only: 2388mm (W) x 1895mm (D) x 2086mm (H) •
Including EFEM: 2388mm (W) x 3131mm (D) x 2086mm (H)
Cabinet only - 2388mm (W) x 1895mm (D)
x 2086mm (H) • Including EFEM - 2388mm
(W) x 3867mm (D) x 2400mm (H)
Weight Cabinet 4562 kg (10058 lbs) • EFEM 543 kg (1196 lbs)
Cabinet 4562 kg (10058 lbs)
EFEM 2500 kg (5510 lbs)
Power 200 - 230 V AC, 50/60Hz single phase with ground
Pneumatic air supply 0.7-0.8 MPa (7-8 Bar) / <20 l/min
Vacuum required -65 kPa (9 psi) / 6 l/min -100 kPa (14.5 psi) / 14 l/min
Network SECS-GEM Ethernet 10/100/1000 Mbit/sec, 8-Pin RJ45 with min Cat5e cable
Safety
X-ray leakage All readings below 1µSv/hour