m330_01_gas_cabinet气柜.pdf.pdf - 第28页
MAINTENANCE G AS CABINET R EFERENCE M ANUAL 5-4 Yearly Maintenance: Replace the filters once a ye ar to avoid clogging. Pressure Leak-check: Perform a pressure leak-check once a year -------- ------------ -------------- …
MAINTENANCE
GAS CABINET REFERENCE MANUAL
5-3
5.5 Preventive maintenance Gassystem
Daily maintenance:
Check gas pressures approx. 25 psi.
Check for visible signs of leakage (liquid supply lines)
Check Touchscreen and/or TSC system for any alarms.
Check gasflows of MFC’s take in account that certain hardware interlocks are
implemented in the gassystem.
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Weekly maintenance
For Metal Alloy tubes the Hydrogen filaments should be visually checked.
If applicable check the liquid source level
If applicable check the External Torch on flame shape (there should be no
red color in the flame “tip burning”, and check for condensation.
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Monthly maintenance:
Check amount of exhaust flow (see facility drawing for values).
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MAINTENANCE
GAS CABINET REFERENCE MANUAL
5-4
Yearly Maintenance:
Replace the filters once a year to avoid clogging.
Pressure Leak-check: Perform a pressure leak-check once a year
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MAINTENANCE
GAS CABINET REFERENCE MANUAL
5-5
5.6 Preventive maintenance processes
Daily maintenance:
Check system for any alarms during process and/or standby.
Check system and/or logging for base pressure value. (This will indicate that
with any major rise the vacuum pump and/or line can have problems)
Check the vacuum atmosphere switch, adjust to atmospheric pressure. LED
should light up.
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Weekly maintenance:
Check the pump status.
If applicable, check TEOS system bubbler temperature.
Check the tightness of the vacuumline connections
• Front flange screws.
• Ball joint clamp.
Check the waterflow on the flanges and the heatexchanger.
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