m330_01_gas_cabinet气柜.pdf.pdf - 第29页

MAINTENANCE

GAS CABINET REFERENCE MANUAL

5-4

Yearly Maintenance:

Replace the filters once a year to avoid clogging.

Pressure Leak-check: Perform a pressure leak-check once a year

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MAINTENANCE

GAS CABINET REFERENCE MANUAL

5-5

5.6 Preventive maintenance processes

Daily maintenance:

Check system for any alarms during process and/or standby.

Check system and/or logging for base pressure value. (This will indicate that

with any major rise the vacuum pump and/or line can have problems)

Check the vacuum atmosphere switch, adjust to atmospheric pressure. LED

should light up.

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Weekly maintenance:

Check the pump status.

If applicable, check TEOS system bubbler temperature.

Check the tightness of the vacuumline connections

• Front flange screws.

• Ball joint clamp.

Check the waterflow on the flanges and the heatexchanger.

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MAINTENANCE

GAS CABINET REFERENCE MANUAL

5-6

Monthly maintenance:

Replace the O-ring on the Loaddoor.

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Yearly maintenance:

Clean complete vacuum lines of the system.

Full check on the vacuum pumps.

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