m330_01_gas_cabinet气柜.pdf.pdf - 第8页
GAS SYSTEM G AS CABINET R EFERENCE M ANUAL 2.1 Gassystem parts Pressure Gauges The pressure gauge is used for readout of the process gas pressure before the gas is distributed to the gaspanels. It is designed with safety…
GAS SYSTEM
GAS CABINET REFERENCE MANUAL
2.1 Gassystem parts
Pressure Gauges
The pressure gauge is used for readout of the process gas pressure before the gas is
distributed to the gaspanels. It is designed with safety features to minimize injury to
personnel and damage to property in the event of a gauge failure. The gauges are mounted
above the gassystems at the front of the gascabinet.
Pressure Gauge
Pressure Regulator
Figure 2-1 Source gas pressure adjustment
Pressure Regulators
Each process gas has its own regulator to reduce the gassource pressure and adjust the
correct pressure to the gassystem. The pressure regulators are part of the pre-plumbing and
are located above the gaspanels, see Figure 2-1.
2-3
GAS SYSTEM
GAS CABINET REFERENCE MANUAL
Gaspanels
Digital pressure switch
Mass Flow Controlle
r
Pneumatic valve
Manual shut-off valve
Inline gasfilte
r
Figure 2-2 LPCVD Gaspanel and components
The design of a gaspanel is dedicated to a particular process (refer to section 2.3) and must be
used accordingly. It contains all necessary components to distribute the required gasflows in a
safe and reliable manner.
The gassystem including its gaspanel is vertically mounted by default. A vertically mounted
gaspanel allows disassembling of a process tube from the rear (greyroom).
Note: Vertical gaspanels are always orbital welded.
Four gaspanelmodels are defined as default concepts. See Table 2-1 for details.
Table 2-1 Gaspanel models
Model Nr. 1 2 3 4
(Tempress
Standard)
Piping
SS 316L SS 316 L SS 316L SS 316L
Welding
Heli-arc Heli-arc Heli-arc Orbital/Butt
weld
Flow control
Flowmeter Mass Flow
Controller
Mass Flow
Controller
Mass Flow
Controller
Couplings
Swagelok Swagelok VCR VCR
Filters
Millipore Millipore
Valves
Skinner/Solenoid Skinner/Solenoid Air or N
2
operated Nupro
Air or N
2
operated Nupro
2-4