00191828-01.pdf - 第283页

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Å       (6&    

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: x-Achse +

: x-Achse -

: y-Achse +

: y-Achse -

1..6: x/y-Schritt.

x-Pos. [µm]= .......... y-Pos. [µm]= .........

x/y-Achsen verfahren

x/y - Schrittw. =

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