Horizon APiX Appendix Manual-low res.pdf - 第28页
INSTALLATION APPENDIX COVERS Chapter Issue 1 June 15 Appendix to Micron Technical Manuals 2.9 COVERS Rear Corner Panels T o remove the rear corner pa nels, carry out the following: 1. Raise the rear printhead cover . 2. …
INSTALLATION APPENDIX
SEMI - LEVELS OF ELECTRICAL WORK
2.8 Appendix to Micron Technical Manuals Chapter Issue 1 June 15
SEMI - LEVELS OF ELECTRICAL WORK
The table below show the four levels of energized electrical work carried out on
electrical equipment and its associated circuits, as defined by the SEMI S2-
0712 Standard.
Throughout all the ASM manuals when a maintenance or calibration procedure
falls within any of these four levels of energized electrical state, the appropriate
symbol is represented in the margin alongside that procedure.
A full definition can be found in the SEMI S2-0712c Safety Guidelines for
Semiconductor Manufacturing Equipment. See also NFPA 79-14.3, IEC/
EN60204-1, BS EN60950-1 and IEC/EN 60950-1.
Type Symbol Definition
1 Equipment is fully de-energized
2 Equipment is energized. Energized circuits are covered or
insulated. Work is performed at a remote location to pre-
clude accidental shock
3 Equipment is energized. Energized circuits are exposed and
accidental contact is possible. Potential exposures are less
than 30 volts rms, 42.4 volts peak to peak, 60 volts dc, or 240
volt-amps in dry locations
4 Equipment is energized. Energized circuits are exposed and
accidental contact is possible. Potential exposures are
greater than 30 volts rms, 42.4 volts peak to peak, 60 volts
dc, 240 volt-amps in dry locations, or radio frequency (rf) is
present
SEMI 1
SEMI 2
SEMI 3
SEMI 4
INSTALLATION APPENDIX
COVERS
Chapter Issue 1 June 15 Appendix to Micron Technical Manuals 2.9
COVERS
Rear Corner
Panels
To remove the rear corner panels, carry out the following:
1. Raise the rear printhead cover.
2. Remove the rear panel.
3. Gain access to the rear of the EMO switch.
4. To disconnect the EMO carry out the following:
a. Locate the yellow locking collar at the rear of the switch.
b. Slide the collar rearwards towards the switch contact assembly against
spring pressure.
c. Viewed from the rear of the switch, rotate the locking collar anticlockwise
to release the contact assembly from the switch body.
5. Remove the rear corner panel.
Locking Collar
EMO Switch
View on Rear EMO Switch
View on Rear EMO Switch
Locking Collar
INSTALLATION APPENDIX
COVERS
2.10 Appendix to Micron Technical Manuals Chapter Issue 1 June 15
Front Corner
Panels
To remove the front corner panels, carry out the following:
1. Raise the front printhead cover.
2. Remove the front panel.
3. Gain access to the rear of the EMO switch.
4. To disconnect the EMO carry out the following:
a. Locate the yellow locking collar at the rear of the switch.
b. Slide the collar rearwards towards the switch contact assembly against
spring pressure.
c. Viewed from the rear of the switch, rotate the locking collar anticlockwise
to release the contact assembly from the switch body.
5. Remove the front corner panel.
Locking Collar
EMO Switch
View on Rear EMO Switch
View on Rear EMO Switch
Locking Collar