EUKYX-199-5100_G5S2_Instruction_Vol5_E.pdf - 第92页
EUKYX 2-20 199-5100 1.20 Nozzle Stocker for Multi-Functional Nozzle Section Layout B_DWN1 B_SH1 Y_UP1 Y_SH B_CMP1 B161 1 Symbol Name Symbol Name Y_SH Nozzle Stocker 2 Shutter Open/Close 1 Y_UP1 Multi Function Nozzle Stoc…
EUKYX
2-19199-5100
1.19 Multi-Functional Head Section Layout
1.19 Multi-Functional Head Section Layout
Symbol Name Symbol Name
M141 Nozzle Z-Axis Motor B143 Height Detection Sensor
M142 Nozzle L-Axis Motor B144 L-Axis - Limit
Y145 Vacuum Valve
Y146 Vacuum Break Valve
Y146
M142(1L,2L,3L)
M141(1Z,2Z,3Z)
B144
NOZZLE1
NOZZLE2
NOZZLE3
Y145
B143
EUKYX
2-20199-5100
1.20 Nozzle Stocker for Multi-Functional Nozzle Section Layout
B_DWN1
B_SH1
Y_UP1
Y_SH
B_CMP1
B1611
Symbol Name Symbol Name
Y_SH Nozzle Stocker 2 Shutter Open/Close 1
Y_UP1 Multi Function Nozzle Stocker 2 Ascending 1
B_DWN1 Multi Function Nozzle Stocker 2
Unit Lower Limit Detection 1
B_SH1 Multi Function Nozzle Stocker 2
Shutter Close Check 1
B_CMP1
Multi Function Nozzle Stocker 2 Clamp Check 1
B_1611
Multi Function Nozzle Stocker 2
Setup Error Detection
1.20 Nozzle Stocker for Multi-Functional Nozzle Section Layout
199-5100
Chapter 3
Parts Location
This chapter describes the layout, etc., of each section.
As this contains highly sophisticated contents, it should carefully
be referred to.
1. Parts Location
EUKYX