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空圧制御部( 基板搬送部) PNEUMATIC S YSTEM SECT.(P. C.B.TRANSFER SECT.) 1 F10811-03-400-AG_A P7
PART No.
ｲﾗｽﾄ
No.
REF
No.
PART NAME
REMARKS
Q'TY
1
空圧制御部(真空ﾎﾟﾝﾌﾟ部)
PNEUMATIC SYSTEM SECT.(VACUUM PUMP SECT.)
部 品 名 品 番 個数
備 考
R
1
R
2
1 1081103300
VACUUM PUMP UNIT ｼﾝｸｳﾎ
ﾟﾝﾌﾟﾕﾆｯﾄ
TM-136-8(7018)
4
N301
N982TM7018
RUBBER LEG ｺﾞﾑｱｼ
M30851-17-931 S
1
N302
N452KHA4-047
VACUUM PUMP ｼﾝｸｳﾎﾟﾝﾌﾟ
BU3/4X1/4
1
N303
N431BU0602
FITTING ﾌ
ﾞｯｼｭ
S-25
1
N304
N434S25
TUBE ﾁｭｰﾌ
ﾞ
SGT-W4-25-40/9
2
N305
N462SGTW-003
BAND ﾊﾞﾝﾄﾞ
JHN27-3/4
1
N306
N431JHN2706
FITTING ﾂｷﾞﾃ
T-3/4
1
N307
N431T06
FITTING ﾂｷ
ﾞﾃ
BU3/4X3/8
1
N308
N431BU0603
BUSHING ﾌﾞｯｼｭ
JKN-3/8
2
N309
N431JKN03
FITTING ﾆｯﾌﾟﾙ
R3/8B
1
N310
N413R03B
VALVE ﾊﾞﾙﾌﾞ
P6
F10811-03-300-AB_B
空圧制御部(基板搬送部)
PNEUMATIC SYSTEM SECT.(P.C.B.TRANSFER SECT.)
1
F10811-03-400-AG_A
P7
PART No.
ｲﾗｽﾄ
No.
REF
No.
PART NAME
REMARKS
Q'TY
1
空圧制御部(基板搬送部)
PNEUMATIC SYSTEM SECT.(P.C.B.TRANSFER SECT.)
部 品 名 品 番 個数
備 考
R
1
R
2
1 1081103400
P.C BOARD TRANSFER UNIT ｷﾊﾞ
ﾝﾊﾝｿｳﾕﾆｯﾄ
1
401 1081103401
MAIN FRAME ﾒｲﾝﾌﾚｰﾑ
TU0425B
1
N401
N434TU0425B
TUBE ﾁｭｰﾌﾞ
TU0425Y
1
N402
N434TU0425Y
TUBE ﾁｭｰﾌ
ﾞ
TU0604B
1
N403
N434TU0604B
TUBE ﾁｭｰﾌ
ﾞ
TU0604Y
1
N404
N434TU0604Y
TUBE ﾁｭｰﾌﾞ
VV5Q14-03-X142
1
N405
N415VV5Q-872
MANIFOLD W/SOLENOID VALVE ﾏﾆﾎｰﾙﾄﾞﾃﾞﾝｼﾞﾍﾞﾝ
AN103-X233
4
N406
N418AN10-006
SILENCER ｻｲﾚﾝｻ
KQ2R04-06
6
N407
N431KQ2R0406
FITTING ﾂｷ
ﾞﾃ
KQ2U04-00
2
N408
N431KQ2U0400
FITTING ﾂｷﾞﾃ
KQ2U06-00
2
N409
N431KQ2U0600
FITTING ﾂｷﾞﾃ
SY5320-5LU-C6-F2
2
N410
N411SY53-915
SOLENOID VALVE ｿﾚﾉｲﾄ
ﾞﾊﾞﾙﾌﾞ
JKC6-01A1.0
2
N411
N406JKC6-134
SPEED CONTROLLER ｽﾋﾟｰﾄﾞｺﾝﾄﾛｰﾗ
KQ2H06-01S
2
N412
N431KQ2H-255
FITTING ﾊｰﾌﾕﾆｵﾝ
AN101-01
2
N413
N418AN10101
SILENCER ｻｲﾚﾝｻ
AS2001F-06
4
N414
N406AS20-048
SPEED CONTROLLER ｽﾋﾟ
ｰﾄﾞｺﾝﾄﾛｰﾗ
P8
F10811-03-400-AG_A