00191759-01.pdf - 第240页

 W , , W  9 ROED 'HVNDQDSiV]S UDFRY iQt .OLNQ WHQDWODþtWNR 'HVND QDSiV]S UDFRYi QtEX GRXSU RYHGH Q\QiVOH GXMtFtDNFH   'HVNDVHQDFKi] tQDYV WXSQtPSiVX ± 7UDQVSRUWQt …

100%1 / 412

W ,,W
 9ROEDSURMHWRV\;<
3RNXG]YROtWHWXWRYROEXYPHQX7HVW]QDþN\SURYHGHSRþtWDþVWDQLFHQiVOHGXMtFtDNFH
± =PL]tPHQX7HVW]QDþN\DREUD]RYNDVHS
HSQHQDYLGHRREUD]S LWRPMH]REUD]HQDDNWXiOQt
SRORKDNDPHU\DPRåQRVWLYROHE
±3
LQHEH]SHþtQiUD]XMH]DEORNRYiQR t]HQtRV
Å 3RYROE GpON\NURNXNWHUiMHPRåQiSRPRFtþtVHODåP åHWHSRK\ERYDWNDPHURXSRUWiOX
SRPRFtãLSHNQDNOiYHVQLFL
32=1È0.$
-DNRVWDQGDUWQtXþtFtVHSRUWiOMHYåG\SRXåLWSRUWiO SRUWiO\ DPRKRXEêWSRPRFt
0RåQRVW9êE USRUWiOXY\EUiQ\YL]RGVWDYHFVWUDQD
Å 3RPRFtNOiYHV\(6&P åHWHWXWRIXQNFLRSXVWLW0HQX7HVW]QDþN\MHRS W]REUD]HQR
: x-Achse +
: x-Achse -
: y-Achse +
: y-Achse -
1..6: x/y-Schritt.
x-Pos. [µm]= .......... y-Pos. [µm]= .........
x/y-Achsen verfahren
x/y - Schrittw. =
;<RV\SURMHW

W ,,W
 9ROED'HVNDQDSiV]SUDFRYiQt
.OLNQ WHQDWODþtWNR'HVNDQDSiV]SUDFRYiQtEXGRXSURYHGHQ\QiVOHGXMtFtDNFH
 'HVNDVHQDFKi]tQDYVWXSQtPSiVX
± 7UDQVSRUWQtSiVVHSRK\EXMHDWUDQVSRUWXMHGHVNXQDGRUD]
± 'HVNDMHXSQXWD
 1DYVWXSQtPSiVXQHQtåiGQiGHVND
± 2EGUåtWHKOiãHQt1DYVWXSQtPSDVXQHQtGHVND
± 9ORåWHGHVNX
±.OLNQ
WHQDWODþtWNR'HVNDQDSiV]SUDFRYiQt
± 7UDQVSRUWQtSiVVHSRK\EXMHDWUDQVSRUWXMHGHVNXQDGRUD]
± 'HVNDMHXSQXWD
32=1È0.$
-HVWOLåHMHGHVNDMLåQDSiVX]SUDFRYiQtMHWDWRIXQNFH]DEORNRYiQD'RVWDQHWHKOiãHQtåH
VHGHVNDMLåQDFKi]tYSiVX]SUDFRYiQt
32=1È0.$
3
LLQVWDORYDQpPGYRMLWpPWUDQVSRUWXP åHWHY\EUDWYHYêE URYpPER[X9êE UWUDQVSRUWX
SRPRFtWODþtWHNWUDQVSRUWQtSiVQHER
 9ROED'HVNDQDYêVWXSQtSiV
7DWRIXQNFHMHSURYHGHQDSRX]HWHKG\SRNXGMHGHVNDYSiVX]SUDFRYiQt
32=1È0.$
'HVNDEXGHS LRSXãW QtPHQXDXWRPDWLFN\S HSUDYHQDGRVWXSQtKRSiVX
32=1È0.$
3
LLQVWDORYDQpPGYRMLWpPWUDQVSRUWXP åHWHY\EUDWYHYêE URYpPER[X9êE UWUDQVSRUWX
SRPRFtWODþtWHNWUDQVSRUWQtSiVQHER

W ,,W
 7HVWVRXþiVWN\
 YRMRYêGLDJUDP7HVWVRXþiVWN\
YRMRYêGLDJUDP7HVWVRXþiVWN\XND]XMHYãHFKQ\PRåQRVWLPHQXVHYãHPLSRG t]HQêPL
IXQNFHPLYJUDILFNpP]REUD]HQt0HQXMVRXRUiPRYiQDSOQêPLþDUDPLYêE
URYpER[\
þiUNRYDQRXþDURXDYNOiGDFtER[\WHþNRYDQRXþDURX
 9\VY WOLYN\NYêYRMRYpPXGLDJUDPX7HVWVRXþiVWN\
 0HQX
3RGYROERX7HVWVRXþiVWN\MVRXNGLVSR]LFLQiVOHGXMtFtPHQX
±9êE
UWYDUX
± 7HVWRYiQtVRXþiVWHN
E
URYêER[8ORåLWQi]HYVRXþiVWN\MHYåG\]REUD]HQSRNXGFKFHWHRSXVWLWPHQX7HVWRYiQt
VRXþiVWHNDS
LWRPE\O\QRY Y\WYR HQ\QHER]P Q Q\GDWDWYDUXVRXþiVWN\*)'DWHQ0iWH
S
LWRPPRåQRVWW\WRGDWDXORåLWQHER]UXãLW
-HGQRWOLYiPHQXP
åHWHRSXVWLWNG\åNOLNQHWHQDMLQpPHQXQHERQDLNRQX]iNODGQtKRQiKOHGX
 9NOiGDFtER[\9êE URYpER[\
3URYNOiGiQtGDW]REUD]RYiQtKRGQRWDSURYHGHQtDNFtQDEt]tV\VWpPQiVOHGXMtFtYNOiGDFtER[\
±0
tFtUHåLP
± 1DVWDYLWNRQWUDVWQtFLWOLYRVW
± 1DVWDYLWW\SVRXþiVWN\QMHQXDXWRPDW
)