FX-3_Maintenance_Rev2_C.pdf - 第5页

󱯉󲣘󰉉󲙖󳕛 󱏃 Rev 2.00 iii 6CAL  ······························································································································· ·········6-1 6-1.CAL  基板 󱮙 件的更 󰀷 ···················…

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3-4.HMS 的更󰀷······················································································································3-7
3-4-1.HMS 部的更󰀷 ···································································································3-7
3-4-2.放大器的更󰀷 ········································································································3-7
3-4-3.󲨉󰓜󱡓 ···················································································································3-8
3-4-4.HMS 高度󲣘·······································································································3-8
3-5.󲨉󱈊路板的更󰀷 ·········································································································3-9
3-6.ZT 󳝆󱈊路板的更󰀷 ·····································································································3-10
4OCC 装配 ···································································································································4-1
4-1.OCC 装配件更󰀷 ··············································································································4-1
4-2.CCD 󰄙像机、󳈱的更󰀷··································································································4-2
4-3.OCC 󲱉/角度照明󱈊路板󱮙件的更󰀷···········································································4-3
4-4.󰮹󳈱的更󰀷····················································································································4-4
4-5.󲣘···························································································································4-6
4-6.OCC 照明的光亮󲣘 ·······································································································4-7
4-7.󰀷 OCC 部分后的从新󲣘····························································································4-7
5 基板送装置 ·····························································································································5-1
5-1.送皮的更󰀷 ················································································································5-1
5-2.送皮󲱃的更󰀷·············································································································
5-2
5-3.STATION/IN/OUT/JOINT 󱈊机的更󰀷 ···········································································5-3
5-4.IN/OUT 感器的更󰀷·······································································································5-4
5-5.WAIT/STOP/C-OUT 感器的更󰀷···················································································5-5
5-5-1.󱭹部的更󰀷 ········································································································5-5
5-5-2.放大器装置的更󰀷 ·································································································5-5
5-5-3.WAIT/STOP/C-OUT 感器的感度󲣘 ································································5-7
5-6.器缸筒的更󰀷·············································································································5-8
5-7.支撑台原点感器(BU 原点感器)的更󰀷·······································································5-9
5-8.T-PIN 感器的更󰀷󲳞󲨂品) ···························································································5-9
5-9.󳕋器Y缸筒的更󰀷(外形基准) ······················································································5-10
5-10.中心󳇕的更󰀷󲳞󲨂品) ·································································································5-11
5-11.支撑台󳝁达的更󰀷BU 󳝁达的更󰀷 ·············································································5-12
5-11-1.󲱁矩架和支撑台󳝁达的󳋉 ···············································································5-12
5-11-2.支撑台󳝆用同󰠺󲣘 ····································································
5-13
5-11-3.支撑台的平面󲣘 ·····························································································5-13
5-12.支撑台󱯫󱓖器的更󰀷 ·····································································································5-14
5-13.器的更󰀷EN 机)····························································································5-15
5-14.基板󲣘·········································································································5-17
5-14-1.AWC 󱈊机的更󰀷 ···························································································5-17
5-14-2.AWC 原点感器的更󰀷····················································································5-18
5-14-3.送限制干󰩞感器的更󰀷 ···············································································5-18
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6CAL ········································································································································6-1
6-1.CAL 基板󱮙件的更󰀷·····································································································6-1
7ATC ············································································································································7-1
7-1.气缸的更󰀷 ·······················································································································7-1
7-2.ATC OPEN/CLOSE 感器的更󰀷 ···················································································7-2
7-3.速度控制器的󲣘·············································································································7-2
8 供料器 ž 一次更󰀷󲰻󲳞󲨂品)·······························································································8-1
8-1.整体 ······························································································································8-1
8-2.󳝆汽缸的更󰀷 ················································································································8-2
8-3.󳝆气缸的速度控制󲣘··································································································8-3
8-4.供料器基板的更󰀷·············································································································8-3
8-5.供料器上升气缸的更󰀷 ·····································································································8-4
8-6.供料器上升气缸的速度控制󲣘整(󲳞󲨂品、一次更󰀷台)·····················································8-5
8-7.供料器上升󰖕󰨠感器的更󰀷󲳞󲨂品、一次更󰀷台) ························································8-5
8-8.󲳞器的更󰀷󲳞󲨂品、一次更󰀷台) ·················································································8-6
8-9.󲱟杆的更󰀷󲳞󲨂品、一次更󰀷台) ·················································································
8-6
8-10.供料器 PCB 基板更󰀷 ·····································································································8-7
9 空气机器 ····································································································································9-1
9-1.数字(正)的更󰀷 ······························································································9-1
9-2.󰮹清器的更󰀷····················································································································9-3
9-3.数字󲧴)的更󰀷 ······························································································9-4
9-4.真空󰧊零件的更󰀷·············································································································9-6
10SW 󱥐 ·····································································································································10-1
10-1.󳈃的更󰀷 ············································································································10-1
10-2.󱧼急停止的更󰀷 ·····································································································10-2
10-3.罩打的更󰀷 ·····································································································10-3
10-4.󳈃的更󰀷CE 机) ························································································10-5
11 供料器浮感器的更󰀷·󲣘 ·······························································································11-1
12 其它机器 ································································································································12-1
12-1.LCD󱎦󲚛器的更󰀷 ········································································································12-1
12-2.󱮴󱎭的更󰀷················································································································
12-7
12-2-1.SSD 的更󰀷·······································································································12-7
12-2-2.HDD 的更󰀷方法 ·······························································································12-9
12-2-3.BIOS 󲢓····································································································12-10
12-2-4.󱮱󲢓置(要与 HLC IS 通信的情况下󲲰󲢓置)······································12-16
12-2-5.FX-3 󱮴程序和 Flexline DB 的安装·······························································12-25
12-2-6.󱮴版本升󱭼󳕛 ···························································································12-36
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13 󱈊气部····································································································································13-1
13-1.󱈊气部的布局················································································································13-1
13-2.底座上部的布局 ············································································································13-2
13-3.󱈊源装置·······················································································································13-3
13-4.控制装置·····················································································································13-13
13-4-1.控制装置的构成·······························································································13-13
13-4-2.CPU 基板 (40044475) ····················································································13-14
13-4-3.定位板 40044540························································································13-15
13-4-4.cPCI-8994 󱈊路板 40048003 ······································································13-16
13-4-5.ETHER-MAIN 基板(40047502 ······································································13-17
13-4-6.IP-X5 基板󱮙件(40047528 ············································································13-18
13-4-7.MOUSE/KEYBOARD SELECTOR (40003281) ··············································13-19
13-4-8.SUPERIMPOSE (40048004) ·····································································13-20
13-4-9.ATX 󱈊 (40048006)·····················································································13-21
13-4-10.󱈊池装置 (40048007) ···················································································13-23
13-5.XY 装置 ······················································································································13-25
13-5-1.XY 装置构成····································································································13-25
13-5-2.XY 伺服放大器的󰌓示器󰌓···········································································13-26
13-6.Z/θ装置 ·····················································································································13-27
13-6-1.Z/θ 装置的构成································································································13-27
13-6-2.LED 󰌓·········································································································13-28
13-7.送装置·····················································································································
13-29
13-7-1.送装置的构成·······························································································13-29
13-7-2.BASE-CARRY 󲱁基板的󲣘·······································································13-34
13-7-3.󰠺󲲰󳝆器的󲣘 ···························································································13-34
13-8.󲨉装置 ·················································································································13-36
13-9.·····················································································································13-37
13-9-1.操作装置的构成·······························································································13-37
13-9-2.操作󱈊路基板的跨接󲢓·················································································13-37
13-9-3.操作 SW 󱈊路基板的安装·········································································13-39
13-10.AC 󲱨入装置保󳌾的更󰀷方法 ················································································13-46
13-11.其他的基板 ·····················································································································13-47
13-11-1.XY-RELAY 基板(40047514·········································································13-47
14 供料器部位󰓜 ·····················································································································14-1
14-1.FPI 的拆卸····················································································································14-1
15FX-3 具表 ····························································································································15-1