FX-3_Maintenance_Rev2_C.pdf - 第7页
Rev 2.00 维修调整要领书 1-1 危险 为了防止突然的起动造成事故，请关掉电源之后再进行操作。 XY 轴使用了非常强力的磁铁。 · 金属类物件请勿接近磁铁面。有可能被磁力吸住而无法取下。 · 进行保养时，请将手表等随身携带的精密器械从身上取下。 · 正在使用心房脉冲产生器等精密医疗仪器的人，请勿进行保养作业。 1 ＸＹ装置 1-1 ． 电磁标尺的更换 1 ） 从支架上卸下电磁标尺头。 2 ） 请剥掉旧的电磁标尺。 3 ） 把电磁…
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13 气部····································································································································13-1
13-1.气部的布局················································································································13-1
13-2.底座上部的布局 ············································································································13-2
13-3.源装置·······················································································································13-3
13-4.控制装置·····················································································································13-13
13-4-1.控制装置的构成·······························································································13-13
13-4-2.CPU 基板 (40044475) ····················································································13-14
13-4-3.定位板 （40044540）························································································13-15
13-4-4.cPCI-8994 路板 （40048003） ······································································13-16
13-4-5.ETHER-MAIN 基板（40047502） ······································································13-17
13-4-6.IP-X5 基板件（40047528） ············································································13-18
13-4-7.MOUSE/KEYBOARD SELECTOR (40003281) ··············································13-19
13-4-8.SUPERIMPOSE 板 (40048004) ·····································································13-20
13-4-9.ATX 源 (40048006)·····················································································13-21
13-4-10.池装置 (40048007) ···················································································13-23
13-5.XY 装置 ······················································································································13-25
13-5-1.XY 装置构成····································································································13-25
13-5-2.XY 伺服放大器的示器示···········································································13-26
13-6.Z/θ装置 ·····················································································································13-27
13-6-1.Z/θ 装置的构成································································································13-27
13-6-2.LED 示·········································································································13-28
13-7.送装置·····················································································································
13-29
13-7-1.送装置的构成·······························································································13-29
13-7-2.BASE-CARRY 中基板的整·······································································13-34
13-7-3.器的整 ···························································································13-34
13-8.装装置 ·················································································································13-36
13-9.罩系·····················································································································13-37
13-9-1.操作装置的构成·······························································································13-37
13-9-2.操作路基板的跨接定·················································································13-37
13-9-3.操作 SW 路基板的安装·········································································13-39
13-10.AC 入装置保的更方法 ················································································13-46
13-11.其他的基板 ·····················································································································13-47
13-11-1.XY-RELAY 基板（40047514）·········································································13-47
14 供料器部位尺 ·····················································································································14-1
14-1.FPI 的拆卸····················································································································14-1
15FX-3 具表 ····························································································································15-1
Rev 2.00
维修调整要领书
1-1
危险
为了防止突然的起动造成事故，请关掉电源之后再进行操作。
XY 轴使用了非常强力的磁铁。
· 金属类物件请勿接近磁铁面。有可能被磁力吸住而无法取下。
· 进行保养时，请将手表等随身携带的精密器械从身上取下。
· 正在使用心房脉冲产生器等精密医疗仪器的人，请勿进行保养作业。
1 ＸＹ装置
1-1． 电磁标尺的更换
1） 从支架上卸下电磁标尺头。
2） 请剥掉旧的电磁标尺。
3） 把电磁标尺的安装面和电磁标尺进行完全脱脂。
注意 1： 更换前要把电磁标尺放在装置附近 1 个小时以上，等装置和电磁标尺的温度相同时进行更换。
注意 2： 脱脂剂推荐用「优质机械用棉纱」。
注意 3： 电磁标尺在横向，相对于规定值的偏差量：±0.1mm 以内。
注意 4： 请不要将带磁性驱动器、支撑销等磁石类的东西靠近电磁标尺。因为这将会成为发生故障的原
因。
注意 5： 对于电磁标尺有朝向，所以请按下图的方向进行装贴。
（※S/N：电磁标尺的串行号码）
图 1-1-1 电磁标尺的贴装方向（主体上面图）
LR RR
RR FR
40048026
电磁标尺 X
40048027
电磁标尺Ｙ
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维修调整要领书
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1-1-1． X轴电磁标尺粘贴位置
1） 用 X_MSC 安装夹具一边指导，一边粘贴电磁标尺。
开始装贴的位置以划线标示，LF·RF 从前面看在左侧有条划线，LR·RR 从后面看在左侧有条划线。
以该划线为基准将电磁标尺贴下去。
规格值：电磁标尺的贴装位置（在贴装头移动方向的平行方向距离偏差）±0.1mm
图 1-1-1-1 X_MSC 安装治具的装配示例
40069368
X_MSC安装夹具