operating_instructions_from_finetech_beamsplitter_alignment.pdf - 第11页
X-Axis Correction The screw is sensitive !!!!! The screw is sensitive !!!!! • Look throu gh micros cope – s cales shou ld be aligned • Turn screw in a di recti on that m oves scale A in the dire ction of the erro r (gree…
Adjustment Procedure
Switch
OFF
OFF pickup tool vacuum before pickup
Touchdown tool onto scale A- switch
ON
ON vacuum.
Raise arm with scale A
Check alignment is as before – perfectly aligned ?
If not repeat procedure and make new measurement
3
3 3
3
3
3 3
3 µm
to LEFT
to LEFTto LEFT
to LEFT
to LEFT
to LEFTto LEFT
to LEFT
4
4 4
4
4
4 4
4 µm
DOWN
DOWNDOWN
DOWN
DOWN
DOWNDOWN
DOWN
(typical values only)
X-Axis Correction
The screw is sensitive !!!!!
The screw is sensitive !!!!!
• Look through microscope – scales should be aligned
• Turn screw in a direction that moves scale A in the direction of the error (green
arrow)
• Stop when the scales read an offset the same as the error ( 3µm left in the example)
• Looking through the microscope now adjust the x-axis micrometer so that the scales
are once again aligned
• Repeat the placement procedure to check the X-axis alignment
• Note the new error
• Repeat the adjustment procedure until error is 1 micron or less
Y-Axis Correction
The screw is sensitive !!!!!
The screw is sensitive !!!!!
• Look through microscope – scales should be aligned
• Turn screw in a direction that moves scale A in the direction of the error (blue arrow)
• Stop when the scales read an offset the same as the error ( 4µm down in the example)
• Looking through the microscope now adjust the Y-axis micrometer so that the scales are
once again aligned
• Repeat the placement procedure to check the Y-axis alignment
• Note the new error
• Repeat the adjustment procedure until error is 1 micron or less