operating_instructions_from_finetech_beamsplitter_alignment.pdf - 第3页

Load the verniers  Clean A A , , B B , and tool tool in IPA  Place larger s cale (A) on vacuum plate (pattern UP)  Small s cale o n the tool (B), (pattern OUT) A A A A A A A A B B B B B B B B

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The Components
Scale A
11 lines, 19
11 lines, 19 11 lines, 19
11 lines, 19 µmpitch
pitchpitch
pitch
Scale B
20 lines, 10
20 lines, 10 20 lines, 10
20 lines, 10 µmpitch
pitchpitch
pitch
Pick-up Tool
Load the verniers
Clean
A
A
,
,
B
B, and
tool
tool in IPA
Place larger scale (A) on vacuum plate (pattern UP)
Small scale on the tool (B), (pattern OUT)
A
AA
A
A
AA
A
B
BB
B
B
BB
B
Focus Adjustments
Focus scale B
scale Bscale B
scale B
(use small
knurled knob on
left side of
machine)
Focus scale A
scale Ascale A
scale A
(use z-height
table
adjustment)