operating_instructions_from_finetech_beamsplitter_alignment.pdf - 第9页
Error in X-Axis scale A scale B √ √ √ √√ √ √ √√ √ √ √ 0 2 3 3 3 3 3 3 3 3 µ m 41
Error in Y-Axis
√
√√
√
√
√√
√
√
√√
√
√
√√
√
√
√√
√
√
√√
√
X
XX
X
X
XX
X
X
XX
X
X
XX
X
X
XX
X
X
XX
X
X
XX
X
X
XX
X
X
XX
X
X
XX
X
0
1
2
3
4
4 4
4
4
4 4
4 µm
scale A scale B
Error in X-Axis
scale A
scale B
√
√√
√√
√√
√√
√√
√
02
3
3 3
3
3
3 3
3 µm
41
Adjustment Procedure
Switch
OFF
OFF pickup tool vacuum before pickup
Touchdown tool onto scale A- switch
ON
ON vacuum.
Raise arm with scale A
Check alignment is as before – perfectly aligned ?
If not repeat procedure and make new measurement
3
3 3
3
3
3 3
3 µm
to LEFT
to LEFTto LEFT
to LEFT
to LEFT
to LEFTto LEFT
to LEFT
4
4 4
4
4
4 4
4 µm
DOWN
DOWNDOWN
DOWN
DOWN
DOWNDOWN
DOWN
(typical values only)